Abstract Described is a thin-film battery, especially a thin-film microbattery, and a method for making same having application as a backup or primary integrated power source for electronic devices. The battery includes a novel electrolyte which is electrochemically stable and does not react with the lithium anode and a novel vanadium oxide cathode Configured as a microbattery, the battery can be fabricated directly onto a semiconductor chip, onto the semiconductor die or onto any portion of the chip carrier. The battery can be fabricated to any specified size or shape to meet the requirements of a particular application. The battery is fabricated of solid state materials and is capable of operation between -15 DEG C. and 150 DEG C.
A method for making an amorphous electrolyte for an electrochemical cell comprising the steps of: a) selecting a sputtering apparatus chosen from the group consisting of rf magnetron sputterers and diode sputterers for deposition of thin films; b) selecting a lithium orthophosphate target material for sputtering in said sputtering apparatus; c) selecting a pure Nitrogen process gas for operation in said sputtering apparatus; d) operating said sputtering apparatus at a total gas pressure of 20 milliTorr and a total gas flow rate of at least 14 sccm; and e) depositing said electrolyte at an average rate of 8 Angstroms per minute.
Claim 2
Independent Claim
101 words
A method for making an amorphous electrolyte for an electrochemical cell comprising the steps of: a) selecting a sputtering apparatus chosen from the group consisting of rf magnetron sputterers and diode sputterers for deposition of thin films; b) selecting a lithium orthophosphate target material for sputtering in said sputtering apparatus; c) selecting a pure Nitrogen process gas for operation in said sputtering apparatus; d) operating said sputtering apparatus at a total gas pressure of 20 milliTorr and a total gas flow rate of at least 14 sccm; and e) depositing said electrolyte at an average rate of 8 Angstroms per minute.