Cleaning apparatus

Claim 2

A cleaning apparatus for cleaning a semiconductor wafer by immersing the semiconductor wafer in cleaning chemicals contained in a cleaning container, comprising: a cleaning container being made of teflon-based materials, for accommodating the cleaning chemicals; a conduit for waste fluid provided on the bottom of said cleaning container for externally discharging the cleaning chemicals; and wetting agent supply means for supplying a wetting agent for wetting the inner wall surface of said cleaning container.

Claim 3

A cleaning apparatus as recited in claim 1, wherein said wetting agent supply means includes a plurality of through holes provided on the top of said cleaning container, a nozzle fitted in each of said plurality of through holes, and a wetting agent supply conduit for guiding the wetting agent to said nozzle.

Claim 4

A cleaning apparatus as recited in claim 2, further comprising heating means for heating said wetting agent supply conduit.

Claim 5

A cleaning apparatus as recited in claim 2, wherein said wetting agent supply conduit is connected to a ultra pure water supply conduit for supplying ultra pure water into said wetting agent supply conduit.

Claim 6

A cleaning apparatus as recited in claim 4, wherein a hydrogen peroxide supply conduit for supplying aqueous hydrogen peroxide into said wetting agent supply conduit is connected to said wetting agent supply conduit.

Claim 7

A cleaning apparatus as recited in claim 1, further comprising a buffer tank connected to said conduit.

Claim 8

A cleaning apparatus as recited in claim 1, wherein said wetting agent supply means includes vapor supply means for supplying vapor of the wetting agent.

Claim 9

A cleaning apparatus for cleaning a semiconductor wafer with cleaning chemicals, comprising: a cleaning container for accommodating the cleaning chemicals; a conduit for waste fluid provided on the bottom of said cleaning container for externally discharging the cleaning chemicals; wetting agent supply means for supplying a wetting agent for wetting the inner wall surface of said cleaning container; a buffer tank connected to said conduit; count means connected to said conduit, downstream of the buffer tank, for waste fluid for counting the number of particles in the waste fluid flowing in said conduit for waste fluid; and control means for controlling the amount of fluid flowing in said wetting agent supply means and said waste fluid conduit based on information obtained from said count means.

Claim 10

A cleaning apparatus for cleaning a semiconductor wafer with cleaning chemicals, comprising: a cleaning container for accommodating the cleaning chemicals; a conduit for waste fluid provided on the bottom of said cleaning container for externally discharging the cleaning chemicals; wetting agent supply means for supplying a wetting agent for wetting the inner wall surface of said cleaning container; a buffer tank connected to said conduit; count means connected to said conduit, downstream of the buffer tank, for waste fluid for counting the number of particles in the waste fluid flowing in said conduit for waste fluid; and control means for controlling the amount of fluid flowing in said wetting agent supply means and said waste fluid conduit based on information obtained from said count means.

Claim 11

A cleaning apparatus for cleaning a semiconductor wafer with cleaning chemicals, comprising: a cleaning container for accommodating the cleaning chemicals; a conduit for waste fluid provided on the bottom of said cleaning container for externally discharging the cleaning chemicals; wetting agent supply means for supplying a wetting agent for wetting the inner wall surface of said cleaning container; count means connected to said conduit for waste fluid for counting the number of particles in the waste fluid flowing in said conduit for waste fluid; control means for controlling the amount of fluid flowing in said wetting agent supply means and said waste fluid conduit based on information obtained from said count means; and bubble removal means provided between said conduit for waste fluid and said count means for removing bubbles in the fluid flowing in said conduit for waste fluid.

Claim 12

A cleaning apparatus for cleaning a semiconductor wafer with cleaning chemicals, comprising: a cleaning container for accommodating the cleaning chemicals; a conduit for waste fluid provided on the bottom of said cleaning container for externally discharging the cleaning chemicals; wetting agent supply means for supplying a wetting agent for wetting the inner wall surface of said cleaning container; count means connected to said conduit for waste fluid for counting the number of particles in the waste fluid flowing in said conduit for waste fluid; control means for controlling the amount of fluid flowing in said wetting agent supply means and said waste fluid conduit based on information obtained from said count means; and bubble removal means provided between said conduit for waste fluid and said count means for removing bubbles in the fluid flowing in said conduit for waste fluid.

Claim 13

A cleaning apparatus as recited in claim 9, wherein said conduit for waste fluid is branched into a first branch conduit for sending the cleaning chemicals to said bubble removal means and a second branch conduit for directly discharging the cleaning chemicals.

Claim 14

A cleaning apparatus for cleaning a semiconductor wafer with cleaning chemicals including a cleaning vessel for accommodating cleaning chemicals supplied from a cleaning chemicals tank, said cleaning vessel including, (a) a bottom wall member, (b) a first tubular surrounding member provided on said bottom wall member for forming an accommodation chamber for accommodating said cleaning chemicals (c) a second tubular surrounding member provided on said bottom wall member and surrounding said first tubular surrounding member from the outside at a distance apart so as to form a first space, and (d) a third tubular surrounding member provided on said bottom wall member and surrounding said second tubular surrounding member from the outside at a distance apart so as to form a second space, (e) the height of said second tubular surrounding member being larger than the height of said first tubular surrounding member, said apparatus further including, a first cleaning chemicals supply conduit for supplying the cleaning chemicals into said accommodation chamber, a second cleaning chemicals supply conduit for supplying the cleaning chemicals to said first space up from the bottom, a first conduit for waste fluid provided at said bottom wall member for discharging the cleaning chemicals present in said accommodation chamber, and a second conduit for waste fluid connected to said bottom wall member for discharging the cleaning chemicals present in said second space.

Claim 15

A cleaning apparatus for cleaning a semiconductor wafer with cleaning chemicals including a cleaning vessel for accommodating cleaning chemicals supplied from a cleaning chemicals tank, said cleaning vessel including, (a) a bottom wall member, (b) a first tubular surrounding member provided on said bottom wall member for forming an accommodation chamber for accommodating said cleaning chemicals (c) a second tubular surrounding member provided on said bottom wall member and surrounding said first tubular surrounding member from the outside at a distance apart so as to form a first space, and (d) a third tubular surrounding member provided on said bottom wall member and surrounding said second tubular surrounding member from the outside at a distance apart so as to form a second space, (e) the height of said second tubular surrounding member being larger than the height of said first tubular surrounding member, said apparatus further including, a first cleaning chemicals supply conduit for supplying the cleaning chemicals into said accommodation chamber, a second cleaning chemicals supply conduit for supplying the cleaning chemicals to said first space up from the bottom, a first conduit for waste fluid provided at said bottom wall member for discharging the cleaning chemicals present in said accommodation chamber, and a second conduit for waste fluid connected to said bottom wall member for discharging the cleaning chemicals present in said second space.

Claim 16

A cleaning apparatus as recited in claim 11, further comprising: a conduit for connection for connecting said first conduit for waste fluid and said second conduit for waste fluid; circulation means provided at said conduit for connection for circulating the cleaning chemical between said first conduit for waste fluid, said accommodation chamber, said second space, and said second conduit for waste fluid; and filter means provided at said conduit for connection for filtering the circulation chemicals flowing in said conduit for connection and removing particles therein.