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US5506515A Expired / Lapsed US ⏱️ 0.0 years remaining

High-frequency probe tip assembly

Assignee: FormFactor Beaverton Inc
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Filing: 1994-07-20
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Granted: 1996-04-09
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Expires: 2014-07-20
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Abstract

Abstract A probe suitable for low-loss microwave frequency operation has a tip assembly including a semi-rigid coaxial cable having a Teflon™ dielectric for temperature stability and a freely-suspended end. On this end a semicylindrical recess is formed defining a shelf along which an inner finger and outer pair of fingers are mounted, each made of resilient conductive material, so as to form a coplanar transmission line. Cantilevered portions of the fingers extend past the end of the cable to form an air-dielectric transmission path of uniform and stable characteristic despite exposure to numerous contact cycles and to provide suitable means for probing nonplanar device pads while also offering good visibility of device pads generally. Corresponding sections of the cantilevered portions are equivalently configured in terms of material composition, cross-sectional geometry and spatial orientation to provide a uniform deflection characteristic relative to each finger for even wearing of the pads and fingers and for stability of transmission characteristic despite contact pressure variation. A rearwardly-inclining end face on each finger reflects dark background shading to cause a dark line to form on each extreme finger end in sharp contrast to the device pads thus facilitating finger visibility. The fingers are originally formed in one-piece and are joined by a carrier strip which is trimmed off after the fingers are connected to the cable so that their transverse spacing is precisely determined.

Inventors

  • 👤 Edward M. Godshalk
  • 👤 Jeffrey A. Williams
  • 👤 Jeremy N. Burr

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 06:21
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/06772

Claims Analysis

Total Claims: 17
Claim 1
Independent Claim 150 words
A probe tip assembly comprising: (a) a coaxial cable having an end and including an inner conductor, an outer conductor and an inner dielectric; (b) respective first and second resilient conductive fingers formed separately from and connected to said inner conductor and said outer conductor, respectively, each finger including a cantilevered portion extending past said end of said cable, said cantilevered portions of said fingers being arranged in transversely spaced apart relationship to each other so as to cooperatively form a controlled impedance transmission line; and (c) said cantilevered portion of each finger being self-supporting in a manner substantially unsupported by any dielectric material and having a contacting member thereon suitably disposed for selective pressing engagement against a corresponding contact pad of a device-under-test, said contacting members on said fingers being arranged in substantially coplanar relationship with each other in the absence of any external forces acting on said fingers.
Claim 2
Dependent Claim 150 words
A probe tip assembly comprising: (a) a coaxial cable having an end and including an inner conductor, an outer conductor and an inner dielectric; (b) respective first and second resilient conductive fingers formed separately from and connected to said inner conductor and said outer conductor, respectively, each finger including a cantilevered portion extending past said end of said cable, said cantilevered portions of said fingers being arranged in transversely spaced apart relationship to each other so as to cooperatively form a controlled impedance transmission line; and (c) said cantilevered portion of each finger being self-supporting in a manner substantially unsupported by any dielectric material and having a contacting member thereon suitably disposed for selective pressing engagement against a corresponding contact pad of a device-under-test, said contacting members on said fingers being arranged in substantially coplanar relationship with each other in the absence of any external forces acting on said fingers.
Claim 3
Dependent Claim 16 words
The probe tip assembly of claim 1 wherein each finger is of substantially rectangular transverse cross-section.
Claim 4
Dependent Claim 34 words
The probe tip assembly of claim 1 wherein said cantilevered portions of said fingers are arranged in mutually coplanar relationship to each other in the absence of any external forces acting on said fingers.
Claim 5
Dependent Claim 45 words
The probe tip assembly of claim 1 wherein a semicylindrical recess is formed on said cable adjacent said end so as to provide a flat shelf on said cable extending to said end and each finger includes a supported portion connected along said flat shelf.
Claim 6
Dependent Claim 60 words
The probe tip assembly of claim 1, further including a support block, said cable being mounted on said support block in cantilevered relationship thereto, said cable being of semirigid type so that when sufficient forces act on said fingers, said cable bends in relation to said support block to enable each finger to wipe across the corresponding said contact pad.
Claim 7
Dependent Claim 58 words
The probe tip assembly of claim 1 wherein said assembly includes a third resilient conductive finger having a cantilevered portion and connected to said outer conductor in such a manner that said cantilevered portion of said first resilient conductive finger is in spaced apart centered relationship between said cantilevered portions of said second and third resilient conductive fingers.
Claim 8
Dependent Claim 75 words
The probe tip assembly of claim 1 wherein the transverse spacing between said cantilevered portions as measured between any pair of corresponding sections thereof is of substantially constant amount despite flexing of said fingers from respective rest positions wherein the corresponding said contacting members are spaced apart from a coplanar group of contact pads to respective deflected positions wherein said contacting members are in pressing engagement against the corresponding contact pads of said coplanar group.
Claim 9
Dependent Claim 54 words
The probe tip assembly of claim 1 wherein each finger includes a reflective face arranged so that when the corresponding contacting member is in contact with a pad on said device-under-test, said reflective face reflects back a portion of said device lying ahead of said pad to a user looking down on said finger.
Claim 10
Dependent Claim 17 words
The probe tip assembly of claim 1 wherein said contacting member is integrally formed on each finger.
Claim 11
Dependent Claim 19 words
The probe tip assembly of claim 9 wherein said contacting member is a lower flat surface on each finger.
Claim 12
Dependent Claim 47 words
The probe tip assembly of claim 1 wherein said cantilevered portion of each finger has an upper face and a flat inclined face so arranged in relation to each other that said flat inclined face extends at a predetermined obtuse interior angle relative to said upper face.
Claim 13
Dependent Claim 27 words
The probe tip assembly of claim 11 wherein said inclined face is located on each finger along an end thereof distal to said end of said cable.
Claim 14
Dependent Claim 111 words
A probe tip assembly comprising: (a) a coaxial cable having an end and including an inner conductor, an outer conductor and an inner dielectric; (b) respective first and second conductive fingers formed separately from and connected to said inner conductor and said outer conductor, respectively, each finger including a cantilevered portion extending past said end of said cable, said cantilevered portions of said fingers being arranged in transversely spaced relationship to each other; and (c) a semicylindrical recess being formed on said cable adjacent said end so as to provide a flat shelf on said cable extending to said end, each finger including a supported portion connected along said flat shelf.
Claim 15
Dependent Claim 111 words
A probe tip assembly comprising: (a) a coaxial cable having an end and including an inner conductor, an outer conductor and an inner dielectric; (b) respective first and second conductive fingers formed separately from and connected to said inner conductor and said outer conductor, respectively, each finger including a cantilevered portion extending past said end of said cable, said cantilevered portions of said fingers being arranged in transversely spaced relationship to each other; and (c) a semicylindrical recess being formed on said cable adjacent said end so as to provide a flat shelf on said cable extending to said end, each finger including a supported portion connected along said flat shelf.
Claim 16
Dependent Claim 32 words
The probe tip assembly of claim 13 wherein said flat shelf is partially defined by a flat face formed on said center conductor, said first finger being connected along said flat face.
Claim 17
Dependent Claim 25 words
The probe tip assembly of claim 13 wherein said cantilevered portion of each finger is self-supporting in a manner substantially unsupported by any dielectric material.

References Cited (Backward Citations)

EP0259183A2 Cited
US5373231A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1999-04-09 1999-10-09 2000-04-09 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2003-04-09 2003-10-09 2004-04-09 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2007-04-09 2007-10-09 2008-04-09 $7700.00 Window Closed / Lapsed

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