Method of manufacturing semiconductor devices with semiconductor elements formed in a layer of semiconductor material provided on a support slice
Abstract
Abstract A method is provided of manufacturing a semiconductor device whereby semiconductor elements (5) and conductor tracks (14) are formed on a first side (2) of a semiconductor slice (1) which is provided with a layer of semiconductor material (4) disposed on an insulating layer (3). Then the semiconductor slice (1) is fastened with said first side (2) to a support slice (15), after which material is removed from the semiconductor slice (1) from the other, second side (17) until the insulating layer (3) has become exposed. The insulating layer (3) is provided with contact windows (18) in which conductive elements (19) are provided. This is done from the first side (2) of the semiconductor slice (1) before the latter is fastened to the support slice (15). The semiconductor elements (5) are externally contacted with a contact wire (20) via the conductive elements (19). The contact windows (18) and the conductive elements (19) may be formed during process steps which are carried out for manufacturing the semiconductor elements.
Inventors
- 👤 Ronald Dekker
- 👤 Henricus G. R. Maas
- 👤 Wilhelmus T. A. J. van den Einden
Bibliographic Details
Claims Analysis
Total Claims: 7References Cited (Backward Citations)
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