US5502779A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Integrated optical modulator and waveguide and method
Assignee: Texas Instruments Inc
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Filing: 1994-11-07
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Granted: 1996-03-26
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Expires: 2014-11-07
Abstract
Abstract An optical waveguide (20) is comprised of a core layer (20) fabricated on an interference layer (18). The interference layer (18) is supported by a lower cladding layer (16) deposited on a semiconductor substrate (12), a and Light travels through the core layer and is coupled into the interference layer by a grating. An electronic element in the interference layer modulates the light passing through the interference layer. The modulated light is then coupled back into the core layer by either another portion of the grating, or a separate grating.
Inventors
- 👤 Gregory A. Magel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 03:51
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/011; G02F1/015; G02F1/025; G02F1/0151; G02F1/0152; G02F2201/00; G02F2201/06; G02F2201/063; G02F2201/30; G02F2201/302; G02F2202/00; G02F2202/10; G02F2202/101; G02F2202/105
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
64 words
An optical modulator comprising: a. a substrate; b. a lower cladding layer upon said substrate; c. an interference layer upon said lower cladding layer; d. a core layer upon said interference layer; e. at least one grating in said modulator operable to couple light between said core layer and said interference layer; and f. an electrical element to modulate light in said interference layer.
Claim 2
Dependent Claim
64 words
An optical modulator comprising: a. a substrate; b. a lower cladding layer upon said substrate; c. an interference layer upon said lower cladding layer; d. a core layer upon said interference layer; e. at least one grating in said modulator operable to couple light between said core layer and said interference layer; and f. an electrical element to modulate light in said interference layer.
Claim 3
Dependent Claim
12 words
The modulator as claimed in claim 1 wherein said substrate is silicon.
Claim 4
Dependent Claim
13 words
The modulator as claimed in claim 1 wherein said substrate is gallium arsenide.
Claim 5
Dependent Claim
14 words
The modulator as claimed in claim 1 wherein said lower cladding is silicon oxide.
Claim 6
Dependent Claim
15 words
The modulator as claimed in claim 1 wherein said lower cladding is aluminum gallium arsenide.
Claim 7
Dependent Claim
13 words
The modulator as claimed in claim 1 wherein said interference layer is silicon.
Claim 8
Dependent Claim
14 words
The modulator as claimed in claim 1 wherein said interference layer is gallium arsenide.
Claim 9
Dependent Claim
14 words
The modulator as claimed in claim 1 wherein said core layer is silicon oxide.
Claim 10
Dependent Claim
15 words
The modulator as claimed in claim 1 wherein said core layer is aluminum gallium arsenide.
Claim 11
Dependent Claim
13 words
The modulator as claimed in claim 1 wherein said element is a transistor.
Claim 12
Dependent Claim
14 words
The modulator as claimed in claim 1 wherein said element is a p-i-n diode.
Claim 13
Independent Claim
75 words
A method for forming an optical modulator comprising: a. preparing a semiconductor substrate; b. building a lower cladding layer upon said substrate; c. depositing an interference layer upon said lower cladding layer; d. depositing a core layer upon said interference layer; e. forming gratings in said modulator operable to couple light between said core layer and said interference layer; and f. forming an electronic element in said modulator to modulate light in said interference layer.
Claim 14
Independent Claim
75 words
A method for forming an optical modulator comprising: a. preparing a semiconductor substrate; b. building a lower cladding layer upon said substrate; c. depositing an interference layer upon said lower cladding layer; d. depositing a core layer upon said interference layer; e. forming gratings in said modulator operable to couple light between said core layer and said interference layer; and f. forming an electronic element in said modulator to modulate light in said interference layer.
Claim 15
Dependent Claim
23 words
The method as claimed in claim 12 wherein said building step comprises building a lower cladding layer upon said substrate by thermal oxidation.
Claim 16
Dependent Claim
28 words
The method as claimed in claim 12 wherein said depositing an interference layer step comprises depositing an interference layer upon said lower cladding layer by chemical vapor deposition.
Claim 17
Dependent Claim
23 words
The method as claimed in claim 12 wherein said forming step comprises patterning and etching said interference layer to to form said gratings.
Claim 18
Dependent Claim
27 words
The method as claimed in claim 12 wherein said depositing a core layer step comprises depositing a core layer upon said interference layer by chemical vapor deposition.
Claim 19
Dependent Claim
16 words
The modulator-as claimed in claim 1, further comprising an upper cladding layer on said core layer.
Claim 20
Dependent Claim
27 words
The modulator as claimed in claim 1, said core layer further comprising a waveguide rib, said waveguide rib for transversely confining light traveling through said core layer.
Claim 21
Dependent Claim
96 words
An optical modulator comprising: a. a silicon substrate; b. a silicon dioxide lower cladding layer supported by said substrate; c. an interference layer supported by said lower cladding layer; d. a core layer for guiding light, said core layer supported by said interference layer and at least twice as thick as said lower cladding layer; e. a first grating for coupling light from said core layer to said interference layer; f. a second grating for coupling light from said interference layer to said core layer; and g. a means fur modulating light in said interference layer.
Claim 22
Dependent Claim
96 words
An optical modulator comprising: a. a silicon substrate; b. a silicon dioxide lower cladding layer supported by said substrate; c. an interference layer supported by said lower cladding layer; d. a core layer for guiding light, said core layer supported by said interference layer and at least twice as thick as said lower cladding layer; e. a first grating for coupling light from said core layer to said interference layer; f. a second grating for coupling light from said interference layer to said core layer; and g. a means fur modulating light in said interference layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-03-26 | 1999-09-25 | 2000-03-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-03-26 | 2003-09-25 | 2004-03-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-03-26 | 2007-09-25 | 2008-03-26 | $7700.00 | Window Closed / Lapsed |