US5500544A
Expired / Lapsed
US
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Dynamic random access memory cell and method for fabricating the same
Assignee: SK Hynix Inc
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Filing: 1994-04-15
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Granted: 1996-03-19
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Expires: 2014-04-15
Abstract
Abstract The DRAM cell comprises a bit line having a topology higher than a plate electrode atop a dielectric film formed on a charge storage electrode, wherein the bit line is connected with a drain region and also with an oxide film which is formed at a predetermined portion of the plate electrode placed above the drain region, the oxide film playing a role in insulating said plate electrode from said bit line. Serving as an insulator between the plate electrode and the bit line, the oxide film is formed by oxidizing the plate electrode adjacent to the bit line. By virtue of this oxide film, there can be secured allowance for the formation of highly integrated device. A DRAM cell can be fabricated in fewer process steps according to the present invention. The DRAM cell is superior in reliability even if it is highly integrated since the area of the capacitor is largely secured without any short phenomenon of bit line.
Inventors
- 👤 Chan K. Park
- 👤 Yo H. Koh
- 👤 Seong M. Hwang
- 👤 Kwang M. Roh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 20:44
CPC Classifications
H; H10; H10B; H10B12/00; H10B12/30; H10B12/31; H10B12/01; H10B12/02; H10B12/03; H10B12/033; Y; Y10; Y10S; Y10S257/00; Y10S257/908; Y10S257/909
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
91 words
A DRAM cell comprising: a bit line having a topology higher than a polysilicon plate electrode atop a dielectric film formed on a charge storage electrode, said cell including an insulating film separating a portion of said bit line and said plate electrode, said bit line being connected with a drain region and also with an oxide film, said oxide film being an oxidized extension of said plate electrode and being located above said drain region, said oxide film and said insulating film insulating said plate electrode from said bit line.
Claim 2
Dependent Claim
91 words
A DRAM cell comprising: a bit line having a topology higher than a polysilicon plate electrode atop a dielectric film formed on a charge storage electrode, said cell including an insulating film separating a portion of said bit line and said plate electrode, said bit line being connected with a drain region and also with an oxide film, said oxide film being an oxidized extension of said plate electrode and being located above said drain region, said oxide film and said insulating film insulating said plate electrode from said bit line.
Claim 3
Independent Claim
148 words
A method for fabricating a DRAM cell wherein a bit line has a topology higher than a capacitor of a semiconductor device and is connected with a drain region of a transistor, comprising the steps of: depositing a polysilicon film over a dielectric film formed on a charge storage electrode, to form a plate electrode; coating an interlayer insulating film on the resulting structure comprising said plate electrode and then, forming a contact hole being spaced apart from said charge storage electrode and exposing said drain region therethrough; oxidizing a portion of said plate electrode to form a first oxide film, said plate electrode having been exposed in the course of the formation of said contact hole, said oxidizing step also forming a second oxide film on said drain region; removing the second oxide film; and contacting said bit line with said drain region through said contact hole.
Claim 4
Independent Claim
148 words
A method for fabricating a DRAM cell wherein a bit line has a topology higher than a capacitor of a semiconductor device and is connected with a drain region of a transistor, comprising the steps of: depositing a polysilicon film over a dielectric film formed on a charge storage electrode, to form a plate electrode; coating an interlayer insulating film on the resulting structure comprising said plate electrode and then, forming a contact hole being spaced apart from said charge storage electrode and exposing said drain region therethrough; oxidizing a portion of said plate electrode to form a first oxide film, said plate electrode having been exposed in the course of the formation of said contact hole, said oxidizing step also forming a second oxide film on said drain region; removing the second oxide film; and contacting said bit line with said drain region through said contact hole.
Claim 5
Dependent Claim
30 words
A method according to claim 2, wherein said first oxide film at a portion of said plate electrode is formed at temperatures ranging from approximately 600° to approximately 900° C.
Claim 6
Dependent Claim
29 words
A method according to claim 2, wherein said first oxide film at a portion of said plate electrode is formed under a pressure of not less than 1 atm.
References Cited (Backward Citations)
US5109259A
Cited
US5264712A
Cited
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