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US5498500A
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US
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Overlay measurement mark and method of measuring an overlay error between multi patterns in a semiconductor device using the measurement mark
Assignee: SK Hynix Inc
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Filing: 1994-12-27
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Granted: 1996-03-12
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Expires: 2014-12-27
Abstract
Abstract An overlay measurement mark and a method of measuring an overlay error between multi patterns of a semiconductor device. A first overlay measurement patterns are formed on a first selected portion of a scribe line by a first mask which is formed considering the margin between the first mask pattern and the second pattern, with the first overlay measurement pattern consisting of two patterns spacing parallel to each other. A second overlay measurement patterns are formed on a second selected portion of the scribe line by a second mask which is formed considering the margin between the second mask pattern and the third mask pattern so as not to superimpose the first overlay measurement patterns, with the second overlay measurement patterns consisting of two patterns spacing parallel to each other. A third overlay measurement pattern is formed on the scribe line by a third mask which is used to form the third mask pattern, with said third overlay measurement pattern forming at the center of inside the first and second overlay measurement patterns. The distance between the first overlay measurement patterns and the third overlay measurement pattern, and the distance between the second overlay measurement patterns and the third overlay measurement pattern, are measured.
Inventors
- 👤 Sang M. Bae
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 09:47
CPC Classifications
H; H10; H10P; H10P74/00; H10P74/20; H10P74/203; G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70605; G03F7/70616; G03F7/70633; H10P74/23
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
108 words
An overlay measurement mark comprising: first overlay measurement patterns formed on the Y-axis of a scribe line, with said first overlay measurement patterns including two patterns spaced from one another and parallel to each other; second overlay measurement patterns formed on the X-axis of said scribe line, with said second overlay measurement patterns including two patterns spaced from one another and parallel to each other, so that said first and second overlay patterns create a rectangular exterior box; and a third overlay measurement pattern formed on said scribe line, with said third overlay mark formed inside said rectangular exterior box formed by said first and second overlay marks.
Claim 2
Dependent Claim
108 words
An overlay measurement mark comprising: first overlay measurement patterns formed on the Y-axis of a scribe line, with said first overlay measurement patterns including two patterns spaced from one another and parallel to each other; second overlay measurement patterns formed on the X-axis of said scribe line, with said second overlay measurement patterns including two patterns spaced from one another and parallel to each other, so that said first and second overlay patterns create a rectangular exterior box; and a third overlay measurement pattern formed on said scribe line, with said third overlay mark formed inside said rectangular exterior box formed by said first and second overlay marks.
Claim 3
Dependent Claim
43 words
The mark of claim 1, wherein each portion where said first overlay measurement patterns are adjacent to said second overlay measurement patterns is spaced at a distance of 0.5 to 2 μm and is graded at an angle of 0 to 90 degrees.
Claim 4
Dependent Claim
41 words
The mark of claim 1, wherein each portion where said first overlay measurement patterns are adjacent to said second overlay measurement patterns is spaced at a distance of 0.5 to 2 μm and is graded at an angle of 45 degrees.
Claim 5
Dependent Claim
28 words
The mark of claim 1, wherein any one of said first, second, third overlay marks is formed with photoresist, and the residual marks are formed with conductive material.
Claim 6
Independent Claim
212 words
A method of measuring an overlay error between multiple patterns in a semiconductor device, comprising the steps of: forming first overlay measurement patterns on a first selected portion of a scribe line with a first mask which is formed taking into consideration an X and Y-axis margin between the first mask pattern and the third mask pattern which are formed on a product die, with said first overlay measurement patterns including two patterns spaced parallel to each other; forming second overlay measurement patterns on a second selected portion of said scribe line with a second mask which is formed taking into consideration X and Y-axis margins between the second mask pattern and said third mask pattern so as not to superimpose said first overlay measurement pattern, said second overlay measurement patterns including two patterns spaced parallel to each other; forming third overlay measurement patterns on said scribe line with a third mask which is used to form said third mask pattern, said third overlay measurement patterns formed at a center of an inside of said first and second overlay measurement patterns; and measuring a distance between said first overlay measurement patterns and said third overlay measurement patterns, and a distance between said second overlay measurement patterns and said third overlay measurement patterns.
Claim 7
Independent Claim
212 words
A method of measuring an overlay error between multiple patterns in a semiconductor device, comprising the steps of: forming first overlay measurement patterns on a first selected portion of a scribe line with a first mask which is formed taking into consideration an X and Y-axis margin between the first mask pattern and the third mask pattern which are formed on a product die, with said first overlay measurement patterns including two patterns spaced parallel to each other; forming second overlay measurement patterns on a second selected portion of said scribe line with a second mask which is formed taking into consideration X and Y-axis margins between the second mask pattern and said third mask pattern so as not to superimpose said first overlay measurement pattern, said second overlay measurement patterns including two patterns spaced parallel to each other; forming third overlay measurement patterns on said scribe line with a third mask which is used to form said third mask pattern, said third overlay measurement patterns formed at a center of an inside of said first and second overlay measurement patterns; and measuring a distance between said first overlay measurement patterns and said third overlay measurement patterns, and a distance between said second overlay measurement patterns and said third overlay measurement patterns.
Claim 8
Dependent Claim
43 words
The method of claim 5, wherein each portion where said first overlay measurement patterns are adjacent to said second overlay measurement patterns is spaced at a distance of 0.5 to 2 μm and is graded at an angle of 0 to 90 degrees.
Claim 9
Dependent Claim
39 words
The method of claim 5, wherein each portion where said first overlay marks are adjacent to said second overlay marks is spaced at a distance of 0.5 to 2 μm and is graded at an angle of 45 degrees.
Claim 10
Dependent Claim
29 words
The method of claim 5, wherein any one of said first, second, third overlay measurement patterns is formed with photoresist, and the residual marks are formed with conductive material.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-03-12 | 1999-09-11 | 2000-03-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-03-12 | 2003-09-11 | 2004-03-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-03-12 | 2007-09-11 | 2008-03-12 | $7700.00 | Window Closed / Lapsed |