Method for designing high-Q inductors in silicon technology without expensive metalization

Claim 2

A computer implemented method for designing a high-Q spiral inductor as part of an integrated circuit, the spiral inductor being implemented in a plurality of wiring levels in the integrated circuit, the comprising the steps of: (a) graphically modeling a geometrical structure of the plurality of wiring levels and via holes which connect said wiring levels to implement a plurality of spiral turns of the inductor; (b) computing an inductance, resistance and parasitic capacitance for the modeled geometrical structure using a method of moments algorithm; (c) computing a Q factor based on said computed inductance, resistance, and parasitic capacitance; and (d) determining if the Q factor for the modeled geometric structure is greater than a predetermined value; (e) redesigning a number of layers or width of lines of the geometric structure if the Q factor is not greater than said predetermined value; and (f) repeating steps (a) through (e) until a sufficiently high Q is obtained.

Claim 3

The method recited in claim 1 wherein said step of graphically modeling is performed using a computer software graphical modeling program which creates a graphical model and a meshed model with triangular elements of a resonator structure including the inductor.

Claim 4

The method recited in claim 2 wherein step (b) is performed using the method of moments algorithm in which the geometry of the resonator structure is meshed into triangles in which a piece wise constant charge distribution and a piece wise linear current distribution is employed.

Claim 5

A computer implemented method of designing a high Q monolithic inductor structure formed using a conventional silicon technology comprising at least first and second metal levels separated from one another by a first insulating layer, said first and second metal levels being formed with identical spiral patterns and connected through via holes in the first insulating layer to implement parallel connected turns of the inductor structure having a low resistance value, said method comprising the steps of: (a) graphically modeling a geometrical structure of the plurality of wiring levels and via holes which connect said wiring levels to implement a plurality of spiral turns of the inductor; (b) computing an inductance, resistance and parasitic capacitance for the modeled geometrical structure using a method of moments algorithm; (c) computing a Q factor based on said computed inductance, resistance, and parasitic capacitance; (d) determining if the Q factor for the modeled geometric structure is greater than a predetermined value; (e) redesigning a number of layers or width of lines of the geometric structure if the Q factor is not greater than said predetermined value; and (f) repeating steps (a) through (e) until a sufficiently high Q is obtained.

Claim 6

A computer implemented method of designing a high Q monolithic inductor structure formed using a conventional silicon technology comprising at least first and second metal levels separated from one another by a first insulating layer, said first and second metal levels being formed with identical spiral patterns and connected through via holes in the first insulating layer to implement parallel connected turns of the inductor structure having a low resistance value, said method comprising the steps of: (a) graphically modeling a geometrical structure of the plurality of wiring levels and via holes which connect said wiring levels to implement a plurality of spiral turns of the inductor; (b) computing an inductance, resistance and parasitic capacitance for the modeled geometrical structure using a method of moments algorithm; (c) computing a Q factor based on said computed inductance, resistance, and parasitic capacitance; (d) determining if the Q factor for the modeled geometric structure is greater than a predetermined value; (e) redesigning a number of layers or width of lines of the geometric structure if the Q factor is not greater than said predetermined value; and (f) repeating steps (a) through (e) until a sufficiently high Q is obtained.

Claim 7

The method recited in claim 4 wherein said step of graphically modeling is performed using a computer software graphical modeling program which creates a graphical model and a meshed model with triangular elements of a resonator structure including the inductor and wherein step (b) is performed using the method of moments algorithm in which the geometry of the resonator structure is meshed into triangles in which a piece wise constant charge distribution and a piece wise linear current distribution is assumed.