US5496594A
Expired / Lapsed
US
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Chemical vapor deposition apparatus and method wherein a corona discharge is generated inside a perforated cage which surrounds the substrate
Assignee: Widia GmbH
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Filing: 1992-11-30
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Granted: 1996-03-05
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Expires: 2012-11-30
Abstract
Abstract Apparatus and method for corona-activated chemical vapor deposition. A substrate is positioned in a reaction vessel in all-around spaced relationship from the walls of the vessel. A cage having throughgoing perforations surrounds the substrate and is spaced from the vessel walls and the substrate. A corona discharge is generated along at least an inner surface of the cage by connecting the cage and substrate with a voltage source. A reaction gas mixture is passed through the cage and a coating is formed from the reaction gas mixture on the substrate.
Inventors
- 👤 Udo Ko/ nig
- 👤 Hendrikus van den Berg
- 👤 Ralf Tabersky
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 04:04
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32018; C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/515; H01J37/32431; H01J37/32623; H01J2237/00; H01J2237/32; H01J2237/33; H01J2237/332; H01J2237/3321
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
162 words
A method of coating at least one substrate body by a corona-activated CVD process at a temperature above 300° C. and a pressure below 10,000 Pa comprising the steps of: (a) supporting the at least one substrate body in a reaction vessel in all-around spaced relationship from walls thereof; (b) surrounding said at least one substrate body on all sides in a cage provided with thoroughgoing perforations, said cage being spaced from said walls and from said at least one substrate body; (c) generating along at least an inner surface of said cage a corona discharge by connecting said cage with a voltage source; (d) passing a reactive gas mixture through said reaction vessel capable of depositing a coating on said at least one substrate body whereby said gas mixture passes through said cage to said at least one substrate body; and (e) electrically connecting said body to said source whereby said coating is deposited on said at least one substrate body.
Claim 2
Independent Claim
162 words
A method of coating at least one substrate body by a corona-activated CVD process at a temperature above 300° C. and a pressure below 10,000 Pa comprising the steps of: (a) supporting the at least one substrate body in a reaction vessel in all-around spaced relationship from walls thereof; (b) surrounding said at least one substrate body on all sides in a cage provided with thoroughgoing perforations, said cage being spaced from said walls and from said at least one substrate body; (c) generating along at least an inner surface of said cage a corona discharge by connecting said cage with a voltage source; (d) passing a reactive gas mixture through said reaction vessel capable of depositing a coating on said at least one substrate body whereby said gas mixture passes through said cage to said at least one substrate body; and (e) electrically connecting said body to said source whereby said coating is deposited on said at least one substrate body.
Claim 3
Dependent Claim
22 words
The method defined in claim 1 wherein said at least one substrate body is enclosed in said cage, said cage being spherical.
Claim 4
Dependent Claim
26 words
The method defined in claim 1 wherein said corona discharge is produced at said inner surface of said cage by applying a pulsed direct current thereto.
Claim 5
Dependent Claim
25 words
The method defined in claim 1, further comprising the step of heating said at least one substrate body to a temperature up to 1100° C.
Claim 6
Dependent Claim
24 words
The method defined in claim 4 wherein said at least one substrate body is heated to a temperature of substantially 400° to 600° C.
Claim 7
Dependent Claim
25 words
The method defined in claim 1, further comprising the step of maintaining a pressure in said vessel of substantially 100 Pa to substantially 1000 Pa.
Claim 8
Independent Claim
170 words
An apparatus for forming a coating on at least one substrate body by a corona-activated CVD, said apparatus comprising: a reaction vessel having at least one reaction gas inlet and at least one reaction gas outlet for passing a reaction gas through said vessel capable of depositing said coating on said at least one substrate body; means in said vessel for supporting said at least one substrate body out of contact with walls of said vessel; a perforated cage forming an electrode and completely surrounding said at least one substrate body in said vessel out of contact with said at least one substrate body and said walls of said vessel; a voltage source connected to said cage for generating along at least an inner surface thereof a corona discharge, said reaction gas passing through said cage to said at least one substrate body; and means for electrically connecting said at least one substrate body with said voltage source whereby said coating is deposited on said at least one substrate body.
Claim 9
Independent Claim
170 words
An apparatus for forming a coating on at least one substrate body by a corona-activated CVD, said apparatus comprising: a reaction vessel having at least one reaction gas inlet and at least one reaction gas outlet for passing a reaction gas through said vessel capable of depositing said coating on said at least one substrate body; means in said vessel for supporting said at least one substrate body out of contact with walls of said vessel; a perforated cage forming an electrode and completely surrounding said at least one substrate body in said vessel out of contact with said at least one substrate body and said walls of said vessel; a voltage source connected to said cage for generating along at least an inner surface thereof a corona discharge, said reaction gas passing through said cage to said at least one substrate body; and means for electrically connecting said at least one substrate body with said voltage source whereby said coating is deposited on said at least one substrate body.
Claim 10
Dependent Claim
12 words
The apparatus defined in claim 7 wherein said cage is substantially spherical.
Claim 11
Dependent Claim
28 words
The apparatus defined in claim 7 wherein said perforated cage has a percentage of perforation area to a total area of said cage of substantially 10% to 60%.
Claim 12
Dependent Claim
14 words
The apparatus defined in claim 9 wherein said percentage is substantially 30% to 40%.
Claim 13
Dependent Claim
28 words
The apparatus defined in claim 7 wherein said cage has a perforation area in a ratio to the area of said substrate body which is greater than four.
Claim 14
Dependent Claim
33 words
The apparatus defined in claim 7 wherein said cage has a ratio of an inner surface area covered by corona discharge to the surface area of said body which is greater than four.
Claim 15
Dependent Claim
25 words
The apparatus defined in claim 7 wherein said body is spaced from said cage by a distance of at least 5 mm in all directions.
Claim 16
Dependent Claim
14 words
The apparatus defined in claim 13 wherein said distance is greater than 10 mm.
Claim 17
Dependent Claim
19 words
The apparatus defined in claim 7 wherein said cage includes a plurality of interconnected enclosures provided within said vessel.
Claim 18
Dependent Claim
18 words
The apparatus defined in claim 7 wherein said inlet is configured to direct said gas toward said cage.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-03-05 | 1999-09-04 | 2000-03-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-03-05 | 2003-09-04 | 2004-03-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-03-05 | 2007-09-04 | 2008-03-05 | $7700.00 | Window Closed / Lapsed |