Patent US1537783A successfully refreshed from Google Patents.
US4648348A
Expired / Lapsed
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Plasma CVD apparatus
Assignee: CAON A CORP OF JAPAN KK
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Filing: 1985-07-23
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Granted: 1987-03-10
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Expires: 2005-07-23
Abstract
Abstract There is disclosed a plasma CVD apparatus for depositing a film on a substrate by creating a discharge between the substrate and an electrode arranged to face the substrate, wherein the electrode is constructed by a plurality of hexagonal pillar electrodes arranged in a honeycomb structure.
Inventors
- 👤 Yasutomo Fujiyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 04:26
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/505; C23C16/509; C23C16/5093
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
56 words
A plasma CVD apparatus for depositing a film on a substrate by creating a discharge between the substrate and an outer electrode arranged to face the surface of the substrate on which the film is deposited wherein said electrode is formed from a plurality of hexagonal pillar electrodes so that said electrode forms a honeycomb structure.
Claim 2
Dependent Claim
56 words
A plasma CVD apparatus for depositing a film on a substrate by creating a discharge between the substrate and an outer electrode arranged to face the surface of the substrate on which the film is deposited wherein said electrode is formed from a plurality of hexagonal pillar electrodes so that said electrode forms a honeycomb structure.
Claim 3
Dependent Claim
19 words
A plasma CVD apparatus according to claim 1 wherein said substrate is coaxially arranged in the hexagonal pillar electrode.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-03-09 | 1990-09-08 | 1991-03-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-03-09 | 1994-09-08 | 1995-03-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-03-09 | 1998-09-08 | 1999-03-10 | $7700.00 | Window Closed / Lapsed |