Capacitive absolute pressure measurement sensor and method of manufacturing a plurality of such sensors

Claim 1

A capacitive absolute pressure measuring sensor comprising a first element forming a mobile electrode, a second element forming a fixed electrode positioned facing and separated from said mobile electrode, and a connecting frame interposed between said first and second elements, said first and second elements being electrically conductive, said connecting frame constituting a part distinct from said first and second elements and being made of an insulating material such that said first and second elements are electrically insulated from each other, said connecting frame together with said first and second elements defining a chamber isolated from the external environment and inside of which there is substantially zero pressure, said second element having a surface facing said first element, said surface comprising an active part and a cavity disposed outside of said active part, and said cavity being formed by a groove extending around said active part.