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US5486237A
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Polysilicon thin film and method of preparing polysilicon thin film and photovoltaic element containing same
Assignee: Sanyo Electric Co Ltd
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Filing: 1994-06-22
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Granted: 1996-01-23
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Expires: 2014-06-22
Abstract
Abstract A polysilicon thin film obtained by using a heat treatment to crystallize an amorphous silicon thin film formed on a substrate has substantially no grain boundaries present in the direction of its thickness, i.e. substantially no grain boundaries extend across the thickness direction. Such a polysilicon thin film can be prepared by forming a doped first amorphous silicon layer containing dispersed crystal phases on a substrate, forming an undoped second amorphous silicon layer on the first amorphous silicon layer, and crystallizing the first and second amorphous silicon layers by heat treatment.
Inventors
- 👤 Keiichi Sano
- 👤 Yoichiro Aya
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 15:30
CPC Classifications
H; H10; H10F; H10F71/00; H10F71/121; H10F71/1221; H10F71/131; H10F77/00; H10F77/10; H10F77/16; H10F77/162; H10F77/164; H10F77/1642; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/546; Y02P; Y02P70/00; Y02P70/50; Y10; Y10T; Y10T428/00; Y10T428/12; Y10T428/12493; Y10T428/12528
Claims Analysis
Total Claims: 34
Claim 1
Independent Claim
58 words
A polysilicon thin film formed on a substrate and obtained by crystallizing through heat treatment, an amorphous silicon thin film formed on said substrate, wherein said polysilicon thin film has a thickness of at least 3 μm, and has crystal grains, wherein substantally all grain boundaries of said crystal grains extend substantially in the direction of said thickness.
Claim 2
Dependent Claim
58 words
A polysilicon thin film formed on a substrate and obtained by crystallizing through heat treatment, an amorphous silicon thin film formed on said substrate, wherein said polysilicon thin film has a thickness of at least 3 μm, and has crystal grains, wherein substantally all grain boundaries of said crystal grains extend substantially in the direction of said thickness.
Claim 3
Dependent Claim
20 words
The polysilicon thin film formed on a substrate in accordance with claim 1, wherein said substrate has a textured surface.
Claim 4
Dependent Claim
32 words
The polysilicon thin film formed on a substrate in accordance with claim 2, wherein said textured surface has peak-to-peak and peak-to-valley spacing distances within the range from 10 μm to 20 μm.
Claim 5
Dependent Claim
26 words
The polysilicon thin film formed on a substrate in accordance with claim 2, wherein said textured surface comprises relatively flat areas dispersed among relatively textured areas.
Claim 6
Dependent Claim
34 words
The polysilicon thin film formed on a substrate in accordance with claim 2, having a Hall mobility greater than 400 cm 2 /Vs and a carrier concentration greater than 10 16 /cm 3 .
Claim 7
Dependent Claim
44 words
The polysilicon thin film formed on a substrate in accordance with claim 1, wherein substantially all said grain boundaries extend across said thickness of said film from a first surface of said film to a second surface of said film opposite said first surface.
Claim 8
Dependent Claim
24 words
The polysilicon thin film formed on a substrate in accordance with claim 1, wherein said thickness is between about 5 μm and 20 μm.
Claim 9
Dependent Claim
45 words
The polysilicon thin film formed on a substrate in accordance with claim 1, wherein said substrate has a flat surface, and said thin film has a Hall mobility greater than 200 cm 2 /Vs and a carrier concentration greater than 5×10 15 /cm 3 .
Claim 10
Dependent Claim
38 words
The polysilicon thin film formed on a substrate in accordance with claim 1, wherein said crystal grains have an inplane crystal width in the plane of said thin film of about 0.1 to about 1 times said thickness.
Claim 11
Dependent Claim
98 words
A photovoltaic element comprising: a substrate; a polysilicon thin film obtained by forming an amorphous silicon thin film on said substrate and crystallizing said amorphous film through heat treatment, wherein said polysilicon thin film has a thickness of at least 3 μm, and has crystal grains with an inplane crystal width in the plane of said thin film of about 0.1 to about 1 times said thickness, and wherein substantially all grain boundaries of said crystal grains extend substantially in the direction of said thickness; and a semiconductor layer forming a semiconductor junction with said polysilicon thin film.
Claim 12
Dependent Claim
98 words
A photovoltaic element comprising: a substrate; a polysilicon thin film obtained by forming an amorphous silicon thin film on said substrate and crystallizing said amorphous film through heat treatment, wherein said polysilicon thin film has a thickness of at least 3 μm, and has crystal grains with an inplane crystal width in the plane of said thin film of about 0.1 to about 1 times said thickness, and wherein substantially all grain boundaries of said crystal grains extend substantially in the direction of said thickness; and a semiconductor layer forming a semiconductor junction with said polysilicon thin film.
Claim 13
Dependent Claim
17 words
The photovoltaic element in accordance with claim 10, wherein said semiconductor layer is an amorphous silicon layer.
Claim 14
Dependent Claim
28 words
The photovoltaic element in accordance with claim 11, wherein said amorphous silicon layer comprises a silicon thin film of opposite conductivity type relative to said polysilicon thin film.
Claim 15
Dependent Claim
36 words
The photovoltaic element in accordance with claim 11, wherein said amorphous silicon layer comprises an intrinsic first silicon thin film, and a second silicon thin film of opposite conductivity type relative to said polysilicon thin film.
Claim 16
Dependent Claim
15 words
The photovoltaic element in accordance with claim 10, wherein said substrate has a textured surface.
Claim 17
Dependent Claim
42 words
The photovoltaic element in accordance with claim 10, having a short-circuit current of at least 33 mA/cm 2 , an open-circuit voltage of at least 0.55 V, and a current of at least 30 mA/cm 2 at a voltage of 0.4 V.
Claim 18
Independent Claim
53 words
A method of preparing a polysilicon thin film, comprising the steps of: forming on a substrate a doped first amorphous silicon layer containing dispersed crystal phases; forming an undoped second amorphous silicon layer on said first amorphous silicon layer; and heat treating said first and second amorphous silicon layers for crystallizing the same.
Claim 19
Independent Claim
53 words
A method of preparing a polysilicon thin film, comprising the steps of: forming on a substrate a doped first amorphous silicon layer containing dispersed crystal phases; forming an undoped second amorphous silicon layer on said first amorphous silicon layer; and heat treating said first and second amorphous silicon layers for crystallizing the same.
Claim 20
Dependent Claim
33 words
The method of preparing a polysilicon thin film in accordance with claim 16, wherein said steps of forming said first and second amorphous silicon layers comprise forming said amorphous silicon layers by CVD.
Claim 21
Dependent Claim
34 words
The method of preparing a polysilicon thin film in accordance with claim 17, wherein said steps of forming said first and second amorphous silicon layers are sequentially carried out by changing raw material gases.
Claim 22
Dependent Claim
148 words
The method of preparing a polysilicon thin film in accordance with claim 17, wherein said first layer is formed under conditions of a substrate temperature of 500° to 600° C., and SiH 4 gas flow rate of 3 to 5 sccm, a PH 3 gas flow rate of 0.003 to 0.01 sccm, an H 2 gas flow rate of 40 to 300 sccm, a reaction pressure of 10 to 100 Pa, and an RF power of 50 to 100 mW/cm 2 , and wherein said second layer is formed under conditions of a substrate temperature of 500° to 600° C., at least one of an SiH 4 gas flow rate of 10 to 60 sccm and an Si 2 H 6 gas flow rate of 10 to 40 sccm, a reaction pressure of 10 to 100 Pa, and an RF power of 100 to 500 mW/cm 2 .
Claim 23
Dependent Claim
20 words
The method of preparing a polysilicon thin film in accordance with claim 16, wherein said substrate has a textured surface.
Claim 24
Dependent Claim
37 words
The method of preparing a polysilicon thin film in accordance with claim 20, further comprising adjusting the degree of dispersion of said crystal phases in said first amorphous silicon layer by adjusting the texturing of said substrate.
Claim 25
Dependent Claim
21 words
A photovoltaic element comprising as a photoactive layer a polysilicon thin film obtained by a method in accordance with claim 16.
Claim 26
Dependent Claim
19 words
The photovoltaic element of claim 22, wherein said polysilicon thin film has a thickness of at least 3 μm.
Claim 27
Dependent Claim
34 words
The photovoltaic element of claim 22, wherein said polysilicon thin film has a Hall mobility of at least 300 cm 2 /Vs and a carrier concentration of at least 10 16 /cm 3 .
Claim 28
Dependent Claim
42 words
The method of preparing a polysilicon thin film in accordance with claim 16, wherein said heat treating is carried out within the temperature range from 550° C. to 650° C. for a time within the range from 3 hours to 20 hours.
Claim 29
Dependent Claim
34 words
The method of preparing a polysilicon thin film in accordance with claim 16, wherein said heat treating is carried out at a temperature of about 600° C. for a time of about 10 hours.
Claim 30
Dependent Claim
29 words
The method of preparing a polysilicon thin film in accordance with claim 16, wherein said crystal phases are dispersed with a spacing of about 0.5 to about 20 μm.
Claim 31
Dependent Claim
28 words
The method of preparing a polysilicon thin film in accordance with claim 16, wherein said crystal phases have sizes in the range of 100 Å to 10 μm.
Claim 32
Dependent Claim
29 words
The method of preparing a polysilicon thin film in accordance with claim 16, wherein said crystal phases have sizes in the range of 1000 Å to 2000 Å .
Claim 33
Dependent Claim
34 words
The method of preparing a polysilicon thin film in accordance with claim 16, wherein said crystal phases protrude from said first layer by about 200 Å to about 600 Å into said second layer.
Claim 34
Dependent Claim
55 words
The method of preparing a polysilicon thin film in accordance with claim 16, wherein said first layer is formed to have a thickness in the range from about 0.1 μm to about 0.2 μm, and said second layer is formed to have a thickness in the range from about 3 μm to about 10 μm.
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