Radiation-source unit for generating a beam having two directions of polarisation and two frequencies

Claim 2

A radiation-source unit for producing a radiation beam having two components which are polarised perpendicularly to one another and which have different frequencies thereof and further having a desired optical frequency difference, said unit comprising: a coherent radiation source; a beam splitter; an acousto-optical modulation system for generating a desired frequency difference between two sub-beams formed by said beam splitter, said acousto-optical modulation system receiving a drive signal having a drive signal frequency, wherein tile drive signal frequency dictates a desired optical frequency difference between the two sub-beams; and a beam combiner for recombining the two sub-beams emerging from said modulation system to one beam, wherein said beam splitter is a polarisation-sensitive beam splitter which forms two linearly polarised sub-beams having mutually perpendicular directions of polarisation, further wherein said beam splitter and said beam combiner are of a similar type and operate in transmission, still further wherein a connecting line between a centre of said beam splitter and said beam combiner extends through a centre of said modulation system, and wherein said beam splitter, said modulation system, and said beam combiner form a symmetrical unit about the centre of said modulation system.

Claim 3

The radiation-source unit as claimed in claim 1, wherein said acousto-optical modulation system comprises a separate acousto-optical modulator for each sub-beam in which a first acousto-optical modulator is disposed in a path of a first sub-beam and a second acousto-optical modulator is disposed in a path of a second sub-beam, and wherein the drive signal comprises a first drive signal for driving the first acousto-optical modulator and a second drive signal for driving the second acousto-optical modulator, the first drive signal having a frequency (f1) different from a frequency (f2) of the second drive signal, said modulation system thereby imparting a frequency difference of (f1-f2) between the two sub-beams.

Claim 4

The radiation-source unit as claimed in claim 1, wherein said modulation system comprises a first acousto-optical modulator, and wherein each of the two sub-beams are characterized by a chief ray, which when described together comprise chief rays, wherein the chief rays of the sub-beams traverse the first acousto-optical modulator along separate paths.

Claim 5

The radiation-source unit as claimed in claim 3, wherein said modulation system further comprises a second acousto-optical modulator disposed between the first acousto-optical modulator and said beam combiner, and wherein the drive signal comprises a first drive Signal for driving the first acousto-optical modulator and a second drive signal for driving the second acousto-optical modulator, the first drive signal having a frequency (f s1 ) different from a frequency (f s2 ) of the second drive signal, said modulation system thereby imparting a frequency difference of 2(f s1 -f s2 ) between the two sub-beams.

Claim 6

The radiation-source unit as claimed in claim 1, wherein said radiation source is a Zeeman laser.

Claim 7

The radiation-source unit as claimed in claim 1, wherein said radiation source is a wavelength-stabilised laser which emits two linearly polarised beams having mutually perpendicular directions of polarisation and having different frequencies.

Claim 8

The radiation-source unit as claimed in claim 1, wherein said polarisation-sensitive beam splitter is formed by a diffraction grating and a λ/2 plate arranged in a path of one of the sub-beams, λ being the wavelength of radiation provided by said radiation source, and wherein said beam combiner is formed by a diffraction grating.

Claim 9

The radiation-source unit as claimed in claim 1, wherein said beam splitter and said beam combiner are each formed by a wedge of a birefringent material.

Claim 10

The radiation-source unit as claimed in claim 1, wherein said beam splitter and said beam combiner are each formed by a Rochon prism.

Claim 11

The radiation-source unit as claimed in claim 1, wherein said beam splitter and said beam combiner are each formed by a Koster prism.

Claim 12

The radiation-source unit as claimed in claim 1, wherein said beam splitter and said beam combiner are Wollaston prisms.

Claim 13

The radiation-source unit as claimed in claim 3, wherein said beam splitter, the first acousto-optical modulator and said beam combiner are integrated in a first symmetrical three-element Wollaston prism whose outer elements form said beam splitter and said beam combiner, respectively, and whose inner element is provided with an electro-acoustic transducer and thus forms the acousto-optical modulator.

Claim 14

The radiation-source unit as claimed in claim 12, further comprising a second symmetrical three-element Wollaston prism similar to the first symmetrical three-element Wollaston prism, wherein the first symmetrical three-element Wollaston prism is followed by the second symmetrical thru-element Wollaston prison and wherein a first drive signal drives the acousto-optical modulator of the first symmetrical three-element Wollaston prism and a second drive signal drives an acousto-optical modulator of the second symmetrical three-element Wollaston prism, further wherein a frequency (f s1 ) of the first drive signal for the acousto-optical modulator of the first three-element Wollaston prison differs from a frequency (f s2 ) of the second drive signal for the acousto-optical modulator of the second three-element Wollaston prism, whereby the two components of a radiation beam produced by said radiation-source unit have a frequency difference of 2(f s1 -f s2 ).

Claim 15

The radiation-source unit as claimed in claim 12, wherein the inner element of the Wollaston prism is provided with a second electro-acoustic transducer and further wherein, in operation, drive signals of different frequencies are applied to the two transducers.

Claim 16

The radiation-source unit as claimed in claim 3, wherein said radiation source is a wavelength-stabilised laser which emits a laser beam of two linearly polarised beam components having mutually perpendicular directions of polarisation and having different frequencies, further wherein said beam splitter and said beam combiner are formed, respectively, by an entrance face and an exit face of the first acousto-optical modulator, which faces extend parallel to one another and make an angle deviating from 90° with a chief ray of the laser beatn and wherein an optic axis of the modulator makes an angle deviating from 90° with the chief ray of the laser beam.

Claim 17

An interferometer comprising a radiation-source unit, a beam splitter for splitting the beam emitted by said radiation-source unit into a measurement beam and a reference beam, a measurement branch traversed by the measurement beam, a reference branch traversed by the reference beam, and a radiation-sensitive detector in the path of a beam formed by recombining the measurement beam and the reference beam which have traversed their respective branches, wherein said radiation-source unit is a unit as claimed in claim 1.

Claim 18

A device for detecting a position of a first object relative to a second object, which objects have been provided with marks, said device comprising: an illumination system for producing two beams whose components with the same direction of polarisation together form an interference pattern on both the mark of the first object and the mark of the second object, a first and a second radiation-sensitive detector for converting radiation received from the mark of the first object and the mark of the second object, respectively, into a first electric signal and a second electric signal, respectively, a phase difference between the two signals being indicative of the position of the two objects relative to one another, wherein said illumination system comprises a radiation-source unit as claimed in claim 1.

Claim 19

An apparatus for projecting a mask onto a substrate, said apparatus comprising, in succession: an illumination system producing an actinic radiation beam; a mask holder; a projection lens system; and a substrate holder; and further comprising an alignment system for aligning the mask relative to the substrate, wherein said alignment system comprises a device as claimed in claim 17, the first object being the mask and the second object being the substrate.

Claim 20

An apparatus for projecting a mask onto a substrate, said apparatus comprising, in succession: an illuminination system producing an actinic radiation beam; a mask holder; a projection lens system; and a substrate holder; and further comprising an interferometer system for detecting the position and displacements of said substrate holder, wherein said interferometer system includes at least one radiation-source unit as claimed in claim 1.

Claim 21

An apparatus as claimed in claim 18, comprising an interferometer system for detecting the position and displacements of said substrate holder, wherein said interferometer system includes at least one radiation-source unit for producing a radiation beam having two components which are polarised perpendicularly to one another and which have different frequencies thereof and further having a desired optical frequency difference, said at least one radiation-source unit comprises: a coherent radiation source; a beam splitter; an acousto-optical modulation system for generating a desired frequency difference between two sub-beams formed by said beam splitter, said acousto-optical modulation system receiving a drive signal having a drive signal frequency, wherein the drive signal frequency dictates a desired optical frequency difference between the two sub-beams; and a beam combiner for recombining the two sub-beams emerging from said modulation system to one beam, wherein said beam splitter is a polarisation-sensitive beam splitter which forms two linearly polarised sub-beams having mutally perpendicular directions of polarisation, further wherein said beam splitter and said beam combiner are of a similar type and operate in transmission still further wherein a connecting line between a centre of said beam splitter and said beam combiner extends through a centre of said modulation system, and wherein said beam splitter, said modulation system, and said beam combiner form a symmetrical unit about the centre of said modulation system.