Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
153 words
A method for extracting a desired feature of an image generated by an electron microscope, comprising the computer implemented steps of: a) inputting in a processor having a CPU and a frame memory said image generated by said electron microscope; b) storing pixels of said image in said frame memory; c) converting, in a logarithmic manner, each of said pixels using said CPU and creating non-linear image enhancement pixels; d) assigning each of said non-linear image enhancement pixels to one of N different groups each having a corresponding pixel value and converting said non-linear image enhancement pixels into valued process pixels, each of said valued process pixels in said different groups having said corresponding pixel value; e) partially differentiating said valued process pixels in X- and Y-directions using said CPU and creating partially differentiated pixels; and f) determining said desired feature of said image by detecting a boundary from said partially differentiated pixels.
Claim 2
Independent Claim
153 words
A method for extracting a desired feature of an image generated by an electron microscope, comprising the computer implemented steps of: a) inputting in a processor having a CPU and a frame memory said image generated by said electron microscope; b) storing pixels of said image in said frame memory; c) converting, in a logarithmic manner, each of said pixels using said CPU and creating non-linear image enhancement pixels; d) assigning each of said non-linear image enhancement pixels to one of N different groups each having a corresponding pixel value and converting said non-linear image enhancement pixels into valued process pixels, each of said valued process pixels in said different groups having said corresponding pixel value; e) partially differentiating said valued process pixels in X- and Y-directions using said CPU and creating partially differentiated pixels; and f) determining said desired feature of said image by detecting a boundary from said partially differentiated pixels.
Claim 3
Dependent Claim
30 words
A method according to claim 1, further comprising a step of detecting a pattern shape and a pattern size of said image by detecting partially differentiated pixels having equivalent magnitudes.
Claim 4
Dependent Claim
80 words
A method according to claim 1, wherein said CPU performs the conversion in step c) according to the following equation: F'(X, Y)=CNmax(log F(X, Y)-log Fmin)/(log Fmax-log Fmin) where F(X, Y) represents a gray level of a pixel at coordinates (X, Y), Fmax represents a maximum gray level, Fmin represents a minimum gray level, CNmax is a constant value, F'(X, Y) represents a gray level of a non-linear image enhancement pixel at the coordinates (X, Y) obtained in said step c).
Claim 5
Dependent Claim
80 words
A method according to claim 2, wherein said CPU performs the conversion in step c) according to the following equation: F'(X, Y)=CNmax(log F(X, Y)-log Fmin)/(log Fmax-log Fmin) where F(X, Y) represents a gray level of a pixel at coordinates (X, Y), Fmax represents a maximum gray level, CNmax is a constant value, Fmin represents a minimum gray level, F'(X, Y) represents a gray level of a non-linear image enhancement pixel at the coordinates (X, Y) obtained in said step c).
Claim 6
Dependent Claim
24 words
A method according to claim 1, wherein said step d) includes dividing said non-linear image enhancement pixels into N number of gray level groups.
Claim 7
Dependent Claim
24 words
A method according to claim 2, wherein said step d) includes dividing said non-linear image enhancement pixels into N number of gray level groups.
Claim 8
Dependent Claim
18 words
A method of claim 1, wherein said image is generated by a single scan of an electron microscope.
Claim 9
Dependent Claim
27 words
A method according to claim 1, wherein said step e) includes making said valued process pixels within a same area equal to a first gray level value.
Claim 10
Dependent Claim
34 words
A method according to claim 5, wherein said step d) includes assigning each of the non-linear image enhancement pixels to a gray level value representing one of the N number of gray level groups.
Claim 11
Dependent Claim
27 words
A method according to claim 8, wherein said step d) includes making valued processing pixels on a boundary between areas equal to a second gray level value.
Claim 12
Independent Claim
139 words
A method for extracting a desired feature of an image generated by an electron microscope, comprising the computer implemented steps of: inputting in a processor having a CPU and a frame memory said image generated by said electron microscope; storing electronic pixel signals of said image in said frame memory; converting, in a logarithmic manner, each of said electronic pixels signals using said CPU and creating non-linear image enhancement pixel signals; processing each of said non-linear image enhancement pixel signals using said CPU and creating N types of (N is a predetermined number valued process pixel signals; partially differentiating said N types of valued process pixel signals using said CPU in X- and Y- directions and creating partially differentiated pixel signals; and generating said desired feature of said image by detecting a boundary from said partially differentiated pixel signals.
Claim 13
Independent Claim
139 words
A method for extracting a desired feature of an image generated by an electron microscope, comprising the computer implemented steps of: inputting in a processor having a CPU and a frame memory said image generated by said electron microscope; storing electronic pixel signals of said image in said frame memory; converting, in a logarithmic manner, each of said electronic pixels signals using said CPU and creating non-linear image enhancement pixel signals; processing each of said non-linear image enhancement pixel signals using said CPU and creating N types of (N is a predetermined number valued process pixel signals; partially differentiating said N types of valued process pixel signals using said CPU in X- and Y- directions and creating partially differentiated pixel signals; and generating said desired feature of said image by detecting a boundary from said partially differentiated pixel signals.
Claim 14
Independent Claim
138 words
An apparatus for extracting a desired feature of an image generated by an electron microscope, comprising: an image processor having a CPU and a frame memory for receiving said image generated by said electron microscope, said frame memory storing electronic pixel signals of said image and said CPU converting, in a logarithmic manner, each of said electronic pixels signals stored in said frame memory and creating non-linear image enhancement pixel signals, wherein said image processor further processes each of said non-linear image enhancement pixel signals and creates N types of (N is a predetermined number valued process pixel signals, partially differentiates said N types of valued process pixel signals in X- and Y- directions and creates partially differentiated pixel signals, and determines said desired feature of said image by detecting a boundary from said partially differentiated pixel signals.
Claim 15
Independent Claim
138 words
An apparatus for extracting a desired feature of an image generated by an electron microscope, comprising: an image processor having a CPU and a frame memory for receiving said image generated by said electron microscope, said frame memory storing electronic pixel signals of said image and said CPU converting, in a logarithmic manner, each of said electronic pixels signals stored in said frame memory and creating non-linear image enhancement pixel signals, wherein said image processor further processes each of said non-linear image enhancement pixel signals and creates N types of (N is a predetermined number valued process pixel signals, partially differentiates said N types of valued process pixel signals in X- and Y- directions and creates partially differentiated pixel signals, and determines said desired feature of said image by detecting a boundary from said partially differentiated pixel signals.