Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
335 words
A multiwavelength focal plane array light detector, comprising: a substrate doped to have a first conductivity, said substrate having top and bottom faces; a plurality of (N+1) absorption layers formed over the top of said substrate, where N=1,2,3,4. . . , the composition of each of said plurality of absorption layers being individually predetermined for absorbing or detecting different wavelengths of light, respectively; a plurality of (N-1) groups of light transparent buffer layers sandwiched between each successive pair of said plurality of (N+1) absorption layers, each of said groups of buffer layers including a plurality of buffer layers, said buffer layers of each group having successively decreasing bandgaps the further a buffer layer is from said substrate relative to other buffer layers of its associated said group of buffer layers, and at least all but one buffer layer of each said group of buffer layers having smaller bandgaps than the buffer layers of any other of said groups of said buffer layers closer to said substrate, respectively, relative to said substrate, for substantially preventing lattice mismatch dislocations from propagating through successive ones of said plurality of absorption layers, said buffer layers each having said first conductivity; a plurality of spaced apart holes formed from a top of said detector through selected successive ones of said absorption layers and buffer layers, for exposing predetermined areas of top portions of successive ones of said absorption layers, respectively, each of said exposed areas of said absorption layers being doped to form an underlying region in the associated absorption layer having a second conductivity opposite that of said first conductivity; a plurality of first ohmic contacts individually formed in a portion of the holes and on top of a portion of each of said exposed areas of said absorption layers; and a second ohmic contact formed on the bottom of said substrate, whereby a plurality of light detecting diodes are provided relative to each exposed area of said absorption layers, respectively, for individually detecting light of different wavelengths, respectively.
Claim 2
Dependent Claim
335 words
A multiwavelength focal plane array light detector, comprising: a substrate doped to have a first conductivity, said substrate having top and bottom faces; a plurality of (N+1) absorption layers formed over the top of said substrate, where N=1,2,3,4. . . , the composition of each of said plurality of absorption layers being individually predetermined for absorbing or detecting different wavelengths of light, respectively; a plurality of (N-1) groups of light transparent buffer layers sandwiched between each successive pair of said plurality of (N+1) absorption layers, each of said groups of buffer layers including a plurality of buffer layers, said buffer layers of each group having successively decreasing bandgaps the further a buffer layer is from said substrate relative to other buffer layers of its associated said group of buffer layers, and at least all but one buffer layer of each said group of buffer layers having smaller bandgaps than the buffer layers of any other of said groups of said buffer layers closer to said substrate, respectively, relative to said substrate, for substantially preventing lattice mismatch dislocations from propagating through successive ones of said plurality of absorption layers, said buffer layers each having said first conductivity; a plurality of spaced apart holes formed from a top of said detector through selected successive ones of said absorption layers and buffer layers, for exposing predetermined areas of top portions of successive ones of said absorption layers, respectively, each of said exposed areas of said absorption layers being doped to form an underlying region in the associated absorption layer having a second conductivity opposite that of said first conductivity; a plurality of first ohmic contacts individually formed in a portion of the holes and on top of a portion of each of said exposed areas of said absorption layers; and a second ohmic contact formed on the bottom of said substrate, whereby a plurality of light detecting diodes are provided relative to each exposed area of said absorption layers, respectively, for individually detecting light of different wavelengths, respectively.
Claim 3
Dependent Claim
36 words
The light detector of claim 1, wherein for each successive second through (1+Nth) absorption layer, the same lattice parameter is provided for the ones of said buffer layers formed on top and bottom surfaces thereof, respectively.
Claim 4
Dependent Claim
31 words
The light detector of claim 1, further including: an antireflective coating on top and bottom faces thereof exclusive of said plurality of first ohmic contacts, and said second ohmic contact, respectively.
Claim 5
Dependent Claim
33 words
The light detector of claim 1, further including a transparent capping layer of buffer layer material formed over top portions of said detector exclusive of said exposed areas of said absorption layers, respectively.
Claim 6
Dependent Claim
32 words
The light detector of claim 4, further including: an antireflective coating on topmost and bottommost faces of said detector exclusive of said plurality of first ohmic contacts, and said second ohmic contact.
Claim 7
Dependent Claim
62 words
The light detector of claim 1, wherein said plurality of (N+1) absorption layers consist of In x Ga 1-x As (X≧0.53), whereby beginning with N=1 for first and second absorption layers formed over said substrate, and succeeding (N+1) ones of said absorption layers, each have successively decreasing bandgaps relative to said substrate, respectively, for detecting successively increasing or longer wavelengths of light.
Claim 8
Dependent Claim
22 words
The light detector of claim 6, wherein said plurality of N buffer layers consist of InAs y P 1-y material where y≦1.
Claim 9
Dependent Claim
13 words
The light detector of claim 7, wherein said substrate consists of InP material.
Claim 10
Dependent Claim
60 words
The light detector of claim 8, wherein each one of said plurality of (N+1) absorption layers is sandwiched between two of said buffer layers of substantially the same composition, whereby a first one of said absorption layers formed directly over said InP substrate, is covered by a buffer layer of InP material substantially the same as that of said substrate.