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Patent US5478973A successfully refreshed from Google Patents.
US5478973A
Expired / Lapsed
US
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Semiconductor chip contact bump structure
Assignee: Samsung Electronics Co Ltd
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Filing: 1994-06-30
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Granted: 1995-12-26
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Expires: 2014-06-30
Abstract
Abstract A semiconductor contact bump structure is disclosed in which at least one contact bump is formed on an electrode pad of a semiconductor substrate through a contact window formed in a passivation layer on the semiconductor substrate. The contact bump has different lengths along respective perpendicular directions. In a first direction, the bump covers first edges of the passivation layer which define the contact window, while in a second direction, the contact bump is formed to be fully between second edges of the passivation layer defining the contact window. Such a construction results in a chip bump having an upper surface which is concavely curved along the first direction. By attaching leads to the bump along the second direction, junction resistance is advantageously lowered and noise generation is controlled to improve reliability of a semiconductor package. Also, shorting of the lead is prevented owing to the strong bonding force to improve yield of the semiconductor package.
Inventors
- 👤 Jin H. Yoon
- 👤 Seung H. Chae
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 08:11
CPC Classifications
H; H10; H10W; H10W72/00; H10W72/20; H10W72/01; H10W72/012; H10W72/01231; H10W72/01233; H10W72/01235; H10W72/251; H10W72/252; H10W72/90; H10W72/921; H10W72/923; H10W72/951; H10W72/952
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
174 words
A semiconductor chip contact bump structure comprising: a semiconductor substrate; an electrode pad formed on said semiconductor substrate; a passivation layer formed over said semiconductor substrate and said electrode pad formed on said semiconductor substrate, said passivation layer having a contact window formed therethrough to expose at least a portion of said electrode pad, said contact window being defined by a pair of opposing first edges of said passivation layer and a pair of opposing second edges of said passivation layer; and a contact bump made from an electrically conductive material formed on said electrode pad through said contact window, wherein, along a first direction, said contact bump is wider than said contact window so as to cover said opposing first edges, and wherein, along a second direction perpendicular to said first direction, said contact bump is narrower than said opposing second edges, wherein at least a portion of an upper surface of said contact bump is curved in a concave manner along said first direction and is substantially flat along said second direction.
Claim 2
Dependent Claim
174 words
A semiconductor chip contact bump structure comprising: a semiconductor substrate; an electrode pad formed on said semiconductor substrate; a passivation layer formed over said semiconductor substrate and said electrode pad formed on said semiconductor substrate, said passivation layer having a contact window formed therethrough to expose at least a portion of said electrode pad, said contact window being defined by a pair of opposing first edges of said passivation layer and a pair of opposing second edges of said passivation layer; and a contact bump made from an electrically conductive material formed on said electrode pad through said contact window, wherein, along a first direction, said contact bump is wider than said contact window so as to cover said opposing first edges, and wherein, along a second direction perpendicular to said first direction, said contact bump is narrower than said opposing second edges, wherein at least a portion of an upper surface of said contact bump is curved in a concave manner along said first direction and is substantially flat along said second direction.
Claim 3
Dependent Claim
20 words
A contact bump structure according to claim 1, wherein said contact bump is made from an electroplated electrically conductive material.
Claim 4
Dependent Claim
18 words
A contact bump structure according to claim 1, wherein said electrode pad is made from an aluminum material.
Claim 5
Dependent Claim
204 words
A semiconductor chip comprising: a substrate having a central area thereon provided with a circuitry pattern and a peripheral area surrounding said central area; a plurality of electrode pads formed on said peripheral area; a passivation layer covering said substrate and said plurality of electrode pads, said passivation layer having a plurality of contact windows, each contact window exposing a respective electrode pad and being defined by a pair of opposing first edges of said passivation layer and a pair of opposing second edges of said passivation layer; a plurality of contact bumps, each contact bump of said plurality of contact bumps being formed on a respective electrode pad exposed through a respective contact window, wherein said plurality of contact bumps are made from an electrically conductive material, each contact bump being wider than a corresponding contact window along a first direction parallel to said pair of opposing first edges so as to cover a portion of said passivation layer and being narrower than said corresponding window along a second direction parallel to said opposing second edges of said contact window, wherein each contact bump has an upper surface which is curved along said first direction and is substantially flat along said second direction.
Claim 6
Dependent Claim
204 words
A semiconductor chip comprising: a substrate having a central area thereon provided with a circuitry pattern and a peripheral area surrounding said central area; a plurality of electrode pads formed on said peripheral area; a passivation layer covering said substrate and said plurality of electrode pads, said passivation layer having a plurality of contact windows, each contact window exposing a respective electrode pad and being defined by a pair of opposing first edges of said passivation layer and a pair of opposing second edges of said passivation layer; a plurality of contact bumps, each contact bump of said plurality of contact bumps being formed on a respective electrode pad exposed through a respective contact window, wherein said plurality of contact bumps are made from an electrically conductive material, each contact bump being wider than a corresponding contact window along a first direction parallel to said pair of opposing first edges so as to cover a portion of said passivation layer and being narrower than said corresponding window along a second direction parallel to said opposing second edges of said contact window, wherein each contact bump has an upper surface which is curved along said first direction and is substantially flat along said second direction.
Claim 7
Dependent Claim
21 words
A semiconductor chip according to claim 4, wherein said plurality of contact bumps are made from an electroplated electrically conductive material.
Claim 8
Dependent Claim
99 words
A semiconductor chip contact bump structure comprising: a semiconductor substrate; an electrode pad formed on said semiconductor substrate; a passivation layer formed over said semiconductor substrate and said electrode pad formed on said semiconductor substrate, said passivation layer having a contact window formed therethrough to expose at least a portion of said electrode pad; and a contact bump made from an electrically conductive material formed on said electrode pad through said contact window, wherein an upper surface of said contact bump is curved in a concave manner along said first direction and is substantially flat along said second direction.
Claim 9
Dependent Claim
99 words
A semiconductor chip contact bump structure comprising: a semiconductor substrate; an electrode pad formed on said semiconductor substrate; a passivation layer formed over said semiconductor substrate and said electrode pad formed on said semiconductor substrate, said passivation layer having a contact window formed therethrough to expose at least a portion of said electrode pad; and a contact bump made from an electrically conductive material formed on said electrode pad through said contact window, wherein an upper surface of said contact bump is curved in a concave manner along said first direction and is substantially flat along said second direction.
Claim 10
Dependent Claim
91 words
A semiconductor chip comprising: a substrate having a central area thereon provided with a circuitry pattern and a peripheral area surrounding said central area; an electrode pad formed on said peripheral area; a passivation layer covering said substrate and said electrode pad, said passivation layer having a contact window formed therethrough exposing said electrode pad; a contact bump formed on said electrode pad exposed through said contact window, wherein said contact bump has an upper surface which is curved along a first direction and is substantially flat along said second direction.
Claim 11
Dependent Claim
91 words
A semiconductor chip comprising: a substrate having a central area thereon provided with a circuitry pattern and a peripheral area surrounding said central area; an electrode pad formed on said peripheral area; a passivation layer covering said substrate and said electrode pad, said passivation layer having a contact window formed therethrough exposing said electrode pad; a contact bump formed on said electrode pad exposed through said contact window, wherein said contact bump has an upper surface which is curved along a first direction and is substantially flat along said second direction.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-12-25 | 1999-06-26 | 1999-12-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-12-25 | 2003-06-26 | 2003-12-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-12-25 | 2007-06-26 | 2007-12-26 | $7700.00 | Window Closed / Lapsed |