US5478609A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Substrate heating mechanism
Assignee: Canon Inc
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Filing: 1993-07-23
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Granted: 1995-12-26
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Expires: 2013-07-23
Abstract
Abstract A substrate-heating mechanism has a heat source for heating a substrate for heating a substrate face side reverse to a film formation face in a film deposition on the film formation surface of the substrate held on a substrate holder in a vacuum chamber, the mechanism comprises a second vacuum chamber for maintaining vacuum the substrate face reverse to the film formation face.
Inventors
- 👤 Nobuyuki Okamura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:50
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/50
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
176 words
A film-forming apparatus comprising: a first vacuum chamber connected to a gas introducing conduit for introducing a gas into the first vacuum chamber and to a first evacuating means for vacuum evacuating the chamber and having therein a substrate held by a substrate holder and a plasma region including a film-forming region of the substrate; a second vacuum chamber connected to a second evacuating means for vacuum evacuating the second vacuum chamber and having a region including a surface of the substrate opposite to the film-forming region, a heating means for heating the opposite surface and a cooling means for cooling the substrate holder; and means for lowering the inner pressures of the first and the second vacuum chambers to below 1.0×10 -8 Torr by the first and the second evacuating means at the same time of plasma generation in the first vacuum chamber and heating by the heating means, cooling the substrate holder by the cooling means, and introducing a gas from the gas introducing conduit into the first vacuum chamber in the order mentioned.
Claim 2
Dependent Claim
176 words
A film-forming apparatus comprising: a first vacuum chamber connected to a gas introducing conduit for introducing a gas into the first vacuum chamber and to a first evacuating means for vacuum evacuating the chamber and having therein a substrate held by a substrate holder and a plasma region including a film-forming region of the substrate; a second vacuum chamber connected to a second evacuating means for vacuum evacuating the second vacuum chamber and having a region including a surface of the substrate opposite to the film-forming region, a heating means for heating the opposite surface and a cooling means for cooling the substrate holder; and means for lowering the inner pressures of the first and the second vacuum chambers to below 1.0×10 -8 Torr by the first and the second evacuating means at the same time of plasma generation in the first vacuum chamber and heating by the heating means, cooling the substrate holder by the cooling means, and introducing a gas from the gas introducing conduit into the first vacuum chamber in the order mentioned.
Claim 3
Dependent Claim
183 words
A film-forming apparatus comprising: a first vacuum chamber connected to a gas introducing conduit for introducing a gas into the first vacuum chamber and to a first evacuating means for vacuum evacuating the chamber and having therein a substrate held by a substrate holder and a plasma region including a film-forming region of the substrate; a second vacuum chamber connected to a second evacuating means for vacuum evacuating the second vacuum chamber and having a cooling means for cooling the substrate holder; a heating means provided outside the first and the second vacuum chambers and having a light source for heating a surface of the substrate opposite to the film-forming region; and means for lowering the inner pressures of the first and the second vacuum chambers to below 1.0×10 -8 Torr by the first and the second evacuating means at the same time of plasma generation in the first vacuum chamber and heating by the heating means, cooling the substrate holder by the cooling means, and introducing a gas from the gas introducing conduit into the first vacuum chamber in the order mentioned.
Claim 4
Dependent Claim
183 words
A film-forming apparatus comprising: a first vacuum chamber connected to a gas introducing conduit for introducing a gas into the first vacuum chamber and to a first evacuating means for vacuum evacuating the chamber and having therein a substrate held by a substrate holder and a plasma region including a film-forming region of the substrate; a second vacuum chamber connected to a second evacuating means for vacuum evacuating the second vacuum chamber and having a cooling means for cooling the substrate holder; a heating means provided outside the first and the second vacuum chambers and having a light source for heating a surface of the substrate opposite to the film-forming region; and means for lowering the inner pressures of the first and the second vacuum chambers to below 1.0×10 -8 Torr by the first and the second evacuating means at the same time of plasma generation in the first vacuum chamber and heating by the heating means, cooling the substrate holder by the cooling means, and introducing a gas from the gas introducing conduit into the first vacuum chamber in the order mentioned.
Claim 5
Independent Claim
182 words
A method for preparing a deposited film prepared by a film-forming apparatus comprising a first vacuum chamber connected to a gas introducing conduit for introducing a gas into the first vacuum chamber and to a first evacuating means for vacuum evacuating the chamber and having therein a substrate held by a substrate holder and a plasma region including a film-forming region of the substrate, and a second vacuum chamber connected to a second evacuating means for vacuum evacuating the second vacuum chamber and having a region including a surface of the substrate opposite to the film-forming region, a heating means for heating the opposite surface and a cooling means for cooling the substrate holder, comprising the steps of: lowering the inner pressures of the first and the second vacuum chambers to below 0.10×10 -8 Torr by the first and the second evacuating means at the same time of plasma generation in the first vacuum chamber and heating by the heating means; cooling the substrate holder by the cooling means; introducing a gas from the gas introducing conduit into the first vacuum chamber.
Claim 6
Independent Claim
182 words
A method for preparing a deposited film prepared by a film-forming apparatus comprising a first vacuum chamber connected to a gas introducing conduit for introducing a gas into the first vacuum chamber and to a first evacuating means for vacuum evacuating the chamber and having therein a substrate held by a substrate holder and a plasma region including a film-forming region of the substrate, and a second vacuum chamber connected to a second evacuating means for vacuum evacuating the second vacuum chamber and having a region including a surface of the substrate opposite to the film-forming region, a heating means for heating the opposite surface and a cooling means for cooling the substrate holder, comprising the steps of: lowering the inner pressures of the first and the second vacuum chambers to below 0.10×10 -8 Torr by the first and the second evacuating means at the same time of plasma generation in the first vacuum chamber and heating by the heating means; cooling the substrate holder by the cooling means; introducing a gas from the gas introducing conduit into the first vacuum chamber.
Claim 7
Independent Claim
191 words
A method for preparing a deposited film prepared by a film-forming apparatus comprising a first vacuum chamber connected to a gas introducing conduit for introducing a gas into the first vacuum chamber and to a first evacuating means for vacuum evacuating the chamber and having therein a substrate held by a substrate holder and a plasma region including a film-forming region of the substrate, and a second vacuum chamber connected to a second evacuating means for vacuum evacuating the second vacuum chamber and having a cooling means for cooling the substrate holder, and a heating means provided outside the first and the second vacuum chambers and having a light source for heating a surface of the substrate opposite to the film-forming region, comprising the steps of: lowering the inner pressures of the first and the second vacuum chambers to below 1.0×10 -8 torr by the first and the second evacuating means at the same time of plasma generation in the first vacuum chamber and heating by the heating means; cooling the substrate holder by the cooling means; and introducing a gas from the gas introducing conduit into the first vacuum chamber.
Claim 8
Independent Claim
191 words
A method for preparing a deposited film prepared by a film-forming apparatus comprising a first vacuum chamber connected to a gas introducing conduit for introducing a gas into the first vacuum chamber and to a first evacuating means for vacuum evacuating the chamber and having therein a substrate held by a substrate holder and a plasma region including a film-forming region of the substrate, and a second vacuum chamber connected to a second evacuating means for vacuum evacuating the second vacuum chamber and having a cooling means for cooling the substrate holder, and a heating means provided outside the first and the second vacuum chambers and having a light source for heating a surface of the substrate opposite to the film-forming region, comprising the steps of: lowering the inner pressures of the first and the second vacuum chambers to below 1.0×10 -8 torr by the first and the second evacuating means at the same time of plasma generation in the first vacuum chamber and heating by the heating means; cooling the substrate holder by the cooling means; and introducing a gas from the gas introducing conduit into the first vacuum chamber.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-12-25 | 1999-06-26 | 1999-12-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-12-25 | 2003-06-26 | 2003-12-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-12-25 | 2007-06-26 | 2007-12-26 | $7700.00 | Window Closed / Lapsed |