US5476566A
Expired / Lapsed
US
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Method for thinning a semiconductor wafer
Assignee: Apple Inc
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Filing: 1994-01-26
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Granted: 1995-12-19
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Expires: 2014-01-26
Abstract
Abstract Advances in wafer technology and packaging have led to an increase in wafer size while requiring a decrease in wafer thickness. Thickness limitations increase as wafer diameter increases. Thinning a wafer past a certain limit can result in wafer breakage. A laminated semiconductor wafer structure (10) is assembled to provide mechanical support for the wafer. A semiconductor wafer (12) is affixed to a UV transparent support substrate (16) with a double-sided adhesive tape (14). The tape has dissimilar adhesives on its two sides. The first side has a UV curable adhesive (22) that adheres to the active surface of the wafer. The second side has a non-UV curable adhesive (24) which adheres to the UV transparent support substrate. This laminated structure can be used during a wafer thinning process and any subsequent handling. The support substrate and the tape are removed from the wafer by exposing the laminated structure to UV radiation.
Inventors
- 👤 Daniel Cavasin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 16:12
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/74; H10P72/7402; H10P72/7416; H10P72/7422; Y; Y10; Y10T; Y10T156/00; Y10T156/11; Y10T156/1153; Y10T156/1158
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
157 words
A method for thinning a semiconductor wafer comprising the steps of: providing a semiconductor wafer having an active surface and an inactive surface; providing a portable and rigid support substrate, the substrate being a polymer; affixing the active surface of the semiconductor wafer to the support substrate using a double-sided adhesive tape, wherein only one side contains a UV curable adhesive, to form a laminated structure; backgrinding the inactive surface of the semiconductor wafer to a desired thickness to produce a thinned semiconductor wafer having a backlapped surface, wherein the thinned semiconductor wafer remains laminated to and is supported by the portable and rigid support substrate; mounting the backlapped surface of the thinned semiconductor wafer to a dicing tape; and removing the portable and rigid support substrate from the thinned semiconductor wafer after the step of mounting by exposing the UV curable adhesive tape to UV radiation, leaving the thinned semiconductor wafer mounted to the dicing tape.
Claim 2
Independent Claim
157 words
A method for thinning a semiconductor wafer comprising the steps of: providing a semiconductor wafer having an active surface and an inactive surface; providing a portable and rigid support substrate, the substrate being a polymer; affixing the active surface of the semiconductor wafer to the support substrate using a double-sided adhesive tape, wherein only one side contains a UV curable adhesive, to form a laminated structure; backgrinding the inactive surface of the semiconductor wafer to a desired thickness to produce a thinned semiconductor wafer having a backlapped surface, wherein the thinned semiconductor wafer remains laminated to and is supported by the portable and rigid support substrate; mounting the backlapped surface of the thinned semiconductor wafer to a dicing tape; and removing the portable and rigid support substrate from the thinned semiconductor wafer after the step of mounting by exposing the UV curable adhesive tape to UV radiation, leaving the thinned semiconductor wafer mounted to the dicing tape.
Claim 3
Dependent Claim
78 words
The method according to claim 1 wherein the step of affixing the active surface of the semiconductor wafer to the support substrate is further characterized as providing the double-sided adhesive tape having a first side with the UV curable adhesive and a second side having a non-UV curable adhesive, wherein the first side of the double-sided adhesive tape is affixed to the active surface of the semiconductor wafer and the second side is affixed to the support substrate.
Claim 4
Dependent Claim
40 words
The method according to claim 1 wherein the step of providing the portable and rigid support substrate comprises providing a UV transparent support substrate composed of a material selected from a group consisting of: a polycarbonate and a polyvinyl chloride.
Claim 5
Dependent Claim
66 words
The method according to claim 3 further comprising the step of: irradiating the dicing tape, the thinned semiconductor wafer, and the portable, rigid and UV transparent support substrate with UV light after the step of mounting such that the UV curable adhesive loses its tackiness to allow easy removal of the thinned semiconductor wafer from the portable, rigid and UV transparent support substrate without requiring solvents.
Claim 6
Dependent Claim
25 words
The method according to claim 1 wherein the step of providing the semiconductor wafer comprises providing a wafer having a diameter greater than 125 millimeters.
Claim 7
Dependent Claim
37 words
The method according to claim 5 wherein the step of providing the portable and rigid support substrate comprises providing a rigid UV transparent support substrate having a diameter substantially equal to the diameter of the semiconductor wafer.
Claim 8
Dependent Claim
36 words
The method according to claim 1 wherein the step of providing the portable and rigid support substrate comprises providing a UV transparent support substrate having a thickness substantially in a range of 1.6 to 18 millimeters.
Claim 9
Dependent Claim
32 words
The method according to claim 1 wherein the step of providing the semiconductor wafer comprises providing a wafer composed of a material selected from a group consisting of: silicon and gallium arsenide.
Claim 10
Independent Claim
199 words
A method for thinning a semiconductor wafer comprising the steps of: providing a semiconductor wafer having an active surface and an inactive surface; providing a double-sided adhesive tape having a first side with a UV curable adhesive and a second side having a non-UV curable adhesive; providing a portable and rigid UV transparent support substrate, the substrate being a polymer; affixing the first side of the double-sided adhesive tape to the active surface of the semiconductor wafer; affixing the second side of the double-sided adhesive tape to the portable and rigid UV transparent support substrate; backgrinding the inactive surface of the semiconductor wafer to a desired thickness to produce a thinned semiconductor wafer having a backlapped surface, wherein the thinned semiconductor wafer is supported by the rigid UV transparent support substrate; mounting the backlapped surface of the thinned semiconductor wafer to a dicing tape; irradiating the dicing tape, the thinned semiconductor wafer, the double-sided adhesive tape, and the rigid UV transparent support substrate with UV light after the step of mounting; and removing the rigid UV transparent support substrate and the double-sided adhesive tape from the thinned semiconductor wafer, leaving the thinned semiconductor wafer mounted to the dicing tape.
Claim 11
Independent Claim
199 words
A method for thinning a semiconductor wafer comprising the steps of: providing a semiconductor wafer having an active surface and an inactive surface; providing a double-sided adhesive tape having a first side with a UV curable adhesive and a second side having a non-UV curable adhesive; providing a portable and rigid UV transparent support substrate, the substrate being a polymer; affixing the first side of the double-sided adhesive tape to the active surface of the semiconductor wafer; affixing the second side of the double-sided adhesive tape to the portable and rigid UV transparent support substrate; backgrinding the inactive surface of the semiconductor wafer to a desired thickness to produce a thinned semiconductor wafer having a backlapped surface, wherein the thinned semiconductor wafer is supported by the rigid UV transparent support substrate; mounting the backlapped surface of the thinned semiconductor wafer to a dicing tape; irradiating the dicing tape, the thinned semiconductor wafer, the double-sided adhesive tape, and the rigid UV transparent support substrate with UV light after the step of mounting; and removing the rigid UV transparent support substrate and the double-sided adhesive tape from the thinned semiconductor wafer, leaving the thinned semiconductor wafer mounted to the dicing tape.
Claim 12
Dependent Claim
28 words
The method according to claim 9 wherein the step of backgrinding comprises producing the thinned wafer having a thickness substantially in a range of 0.17 to 0.35 millimeter.
Claim 13
Dependent Claim
32 words
The method according to claim 9 wherein the step of providing the semiconductor wafer comprises providing a wafer composed of a material selected from a group consisting of: silicon and gallium arsenide.
Claim 14
Dependent Claim
44 words
The method according to claim 9 wherein the step of providing the portable and rigid UV transparent support substrate comprises providing a substrate composed of a material selected from a group consisting of: a polycarbonate, a polyvinyl chloride, a glass, and a rigid polymer.
Claim 15
Dependent Claim
26 words
The method according to claim 9 wherein the step of providing the semiconductor wafer comprises selecting a semiconductor wafer having a diameter greater than 125 millimeters.
Claim 16
Dependent Claim
29 words
The method according to claim 13 further comprising providing the portable and rigid UV transparent support substrate having a diameter substantially equal to the diameter of the semiconductor wafer.
Claim 17
Dependent Claim
35 words
The method according to claim 9 wherein the step of providing the portable and rigid UV transparent support substrate comprises providing a substrate having a thickness substantially in a range of 1.6 to 18 millimeter.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1998-12-18 | 1999-06-19 | 1999-12-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-12-18 | 2003-06-19 | 2003-12-19 | $3760.00 | Window Closed / Lapsed |
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