Method for fabricating an insulating gate field effect transistor

Claim 1

A method for fabricating a field effect transistor comprising the steps of: forming a gate insulating film on a semiconductor substrate; forming a gate electrode on said gate insulating film, said gate electrode having a top surface and a pair of side surfaces; forming lightly-doped source and drain regions in said semiconductor substrate by introducing impurities into said semiconductor substrate by using said gate electrode as a mask; covering said gate electrode with a first insulating film, said first insulating film thereby having a first portion on said top surface of said gate electrode and second and third portions respectively on said pair of side surfaces of said gate electrode, forming first and second sidewall spacers respectively on said second and third portions of said first insulating film; forming heavily-doped source and drain regions into said semiconductor substrate by introducing impurities into said semiconductor substrate by using said first and second sidewall spacers, said first insulating film and said gate electrode as a mask; subjecting said first and second sidewall spacers to an etchant to remove said first and second sidewall spacers, said first insulating film protecting said gate insulating film against said etchant; and forming third and fourth sidewall spacers respectively on said second and third portions of said first insulating film, each of said third and fourth sidewall spacers having a dielectric constant lower than that of a silicon oxide film.

Claim 2

A method for fabricating a field effect transistor comprising the steps of: forming a gate insulating film on a semiconductor substrate; forming a gate electrode on said gate insulating film, said gate electrode having a top surface and a pair of side surfaces; forming lightly-doped source and drain regions in said semiconductor substrate by introducing impurities into said semiconductor substrate by using said gate electrode as a mask; covering said gate electrode with a first insulating film, said first insulating film thereby having a first portion on said top surface of said gate electrode and second and third portions respectively on said pair of side surfaces of said gate electrode, forming first and second sidewall spacers respectively on said second and third portions of said first insulating film; forming heavily-doped source and drain regions into said semiconductor substrate by introducing impurities into said semiconductor substrate by using said first and second sidewall spacers, said first insulating film and said gate electrode as a mask; subjecting said first and second sidewall spacers to an etchant to remove said first and second sidewall spacers, said first insulating film protecting said gate insulating film against said etchant; and forming third and fourth sidewall spacers respectively on said second and third portions of said first insulating film, each of said third and fourth sidewall spacers having a dielectric constant lower than that of a silicon oxide film.

Claim 8

A method for fabricating a field effect transistor comprising the steps of: forming a gate insulating film on a semiconductor substrate; forming a gate electrode on said gate insulating film, said gate electrode having a top surface and a pair of side surfaces; forming lightly-doped source and drain regions by introducing impurities into said semiconductor substrate by using said gate electrode as a mask; covering said gate electrode with a first insulating film, said first insulating film thereby having a first portion on said top surface of said gate electrode and second and third portions respectively on said pair of side surfaces of said gate electrode, said first insulating film including a first silicon oxide film and a first silicon nitride film formed on said first silicon oxide film; forming first and second silicon oxide sidwall spacers respectively on said second and third portions of said first insulating film; forming heavily-doped source and drain regions by introducing impurities into said semiconductor substrate by using said first and second silicon oxide sidewall spacers, said first insulating film and said gate electrode as a mask; removing said first and second sidewall spacers while protecting said first silicon oxide film in said first insulating film and said gate insulating film by said first silicon nitride film in said first insulating film; forming first and second polyimide sidewall spacers on said second and third portions of said first insulating film; covering said first and second polyimide sidewall spacers with a second silicon nitride film; forming an inter-layer insulating layer on said second silicon nitride film.

Claim 9

A method for fabricating a field effect transistor comprising the steps of: forming a gate insulating film on a semiconductor substrate; forming a gate electrode on said gate insulating film, said gate electrode having a top surface and a pair of side surfaces; forming lightly-doped source and drain regions by introducing impurities into said semiconductor substrate by using said gate electrode as a mask; covering said gate electrode with a first insulating film, said first insulating film thereby having a first portion on said top surface of said gate electrode and second and third portions respectively on said pair of side surfaces of said gate electrode, said first insulating film including a first silicon oxide film and a first silicon nitride film formed on said first silicon oxide film; forming first and second silicon oxide sidwall spacers respectively on said second and third portions of said first insulating film; forming heavily-doped source and drain regions by introducing impurities into said semiconductor substrate by using said first and second silicon oxide sidewall spacers, said first insulating film and said gate electrode as a mask; removing said first and second sidewall spacers while protecting said first silicon oxide film in said first insulating film and said gate insulating film by said first silicon nitride film in said first insulating film; forming first and second polyimide sidewall spacers on said second and third portions of said first insulating film; covering said first and second polyimide sidewall spacers with a second silicon nitride film; forming an inter-layer insulating layer on said second silicon nitride film.

Claim 11

A method for fabricating a field effect transistor comprising the steps of: forming a gate insulating film on a semiconductor substrate; forming a gate electrode on said gate insulating layer, said gate electrode having a top surface and a pair of side surfaces; forming lightly-doped source and drain regions by introducing impurities into said semiconductor substrate by using gate electrode as a mask; covering said gate electrode with a first insulating film, said first insulating film thereby having a first portion on said top surface of said gate electrode and second and third portions respectively on said pair of side surfaces of said gate electrode, said first insulating film including a first silicon oxide film and a first silicon nitride film formed on said first silicon oxide film; forming first and second silicon oxide sidewall spacers respectively on said second and third portions of said first insulating film; forming heavily-doped source and drain regions by introducing impurities into said semiconductor substrate by using said first and second silicon oxide sidewall spacers, said first insulating film and said gate electrode as a mask; removing said first and second sidewall spacers while protecting said first silicon oxide film in said first insulating film and said gate insulating film by said first silicon nitrode film in said first insulating film; forming first and second boron nitride sidewall spacers on said second and third portions of said first insulating film; and forming an inter-layer insulating layer on said first and second boron nitride sidewall spacers and said first insulating film.

Claim 12

A method for fabricating a field effect transistor comprising the steps of: forming a gate insulating film on a semiconductor substrate; forming a gate electrode on said gate insulating layer, said gate electrode having a top surface and a pair of side surfaces; forming lightly-doped source and drain regions by introducing impurities into said semiconductor substrate by using gate electrode as a mask; covering said gate electrode with a first insulating film, said first insulating film thereby having a first portion on said top surface of said gate electrode and second and third portions respectively on said pair of side surfaces of said gate electrode, said first insulating film including a first silicon oxide film and a first silicon nitride film formed on said first silicon oxide film; forming first and second silicon oxide sidewall spacers respectively on said second and third portions of said first insulating film; forming heavily-doped source and drain regions by introducing impurities into said semiconductor substrate by using said first and second silicon oxide sidewall spacers, said first insulating film and said gate electrode as a mask; removing said first and second sidewall spacers while protecting said first silicon oxide film in said first insulating film and said gate insulating film by said first silicon nitrode film in said first insulating film; forming first and second boron nitride sidewall spacers on said second and third portions of said first insulating film; and forming an inter-layer insulating layer on said first and second boron nitride sidewall spacers and said first insulating film.