US5470393A
Expired / Lapsed
US
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Semiconductor wafer treating method
Assignee: Toshiba Corp
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Filing: 1994-07-08
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Granted: 1995-11-28
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Expires: 2014-07-08
Abstract
Abstract A surface of a semiconductor water is washed with HF water solution, thereby removing an oxide film formed on a surface of the semiconductor water. Next, the surface of the semiconductor water is treated with mixed liquid of HF, HCl, H 2 O 2 , and deionized water. Then, the surface of the semiconductor wafer is treated with mixed liquid of HCl, H 2 O 2 , and deionized water, thereby removing the surface of the semiconductor wafer to remove metallic impurity such as Cu adhered onto the surface of the semiconductor wafer.
Inventors
- 👤 Yuji Fukazawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:55
CPC Classifications
H; H10; H10P; H10P52/00; H10P70/00; H10P70/10; H10P70/15; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; H10P72/0411; H10P72/0416
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
118 words
A method for treating a semiconductor wafer, comprising: a first step of treating a surface of a semiconductor wafer with about a 0.2 weight % HF water solution, thereby removing an oxide film formed on the surface of said semiconductor wafer; a second step, sequentially from said first step, of treating the surface of said semiconductor wafer with a mixture of between 0.1 ppm and 100 ppm HF water solution, a HCl water solution, and an oxidizing agent; and a third step, sequentially from said second step, of treating the surface of said semiconductor wafer with a mixture of about a 0.5 weight % HCl water solution and about a 1 weight % concentration of an oxidizing agent.
Claim 2
Independent Claim
118 words
A method for treating a semiconductor wafer, comprising: a first step of treating a surface of a semiconductor wafer with about a 0.2 weight % HF water solution, thereby removing an oxide film formed on the surface of said semiconductor wafer; a second step, sequentially from said first step, of treating the surface of said semiconductor wafer with a mixture of between 0.1 ppm and 100 ppm HF water solution, a HCl water solution, and an oxidizing agent; and a third step, sequentially from said second step, of treating the surface of said semiconductor wafer with a mixture of about a 0.5 weight % HCl water solution and about a 1 weight % concentration of an oxidizing agent.
Claim 3
Dependent Claim
61 words
The method according to claim 1, wherein HF water solution of said second step is a part of HF water solution of said first step, and HCl water solution and oxidizing agent of the mixed liquid of said third step are a part of HCl water solution and that of oxidizing agent of the mixed liquid of said second step, respectively.
Claim 4
Dependent Claim
170 words
The method according to claim 1, wherein concentration of HF of HF water solution of said first step is controlled by supplying only an amount of each of HF water solution and deionized water to said treating tank, and by discharging mixed liquid of HF water solution and deionized water from said treating tank, concentration of each of HCl and oxide material of the mixed liquid of said second step is controlled by supplying only an amount of each of HCl water solution, oxidizing agent and deionized water to said treating tank, and by discharging mixed liquid of HF water solution, HCl water solution, oxidizing agent and deionized water from said treating tank, and concentration of each of HCl and oxide material of the mixed liquid of said third step is controlled by supplying only an amount of each of HCl water solution, oxidizing agent and deionized water to said treating tank, and by discharging mixed liquid of HCl water solution, oxidizing agent and deionized water from said treating tank.
Claim 5
Independent Claim
152 words
A method for treating a semiconductor wafer, comprising: a first step of treating a surface of a semiconductor wafer with about a 3 weight % concentration of an oxidizing agent, thereby removing particles formed on the surface of said semiconductor wafer; a second step of treating the surface of said semiconductor wafer with about a 0.2 weight % HF water solution, thereby removing an oxide film formed on the surface of said semiconductor wafer; a third step, sequentially from said second step, of treating the surface of said semiconductor wafer with a mixture of between a 0.1 ppm and 100 ppm HF water solution, an HCl water solution, and an oxidizing agent; and a fourth step, sequentially from said third step, of treating the surface of said semiconductor wafer with a mixture of about a 0.5 weight % HCl water solution and about a 1 weight % concentration of an oxidizing agent.
Claim 6
Independent Claim
152 words
A method for treating a semiconductor wafer, comprising: a first step of treating a surface of a semiconductor wafer with about a 3 weight % concentration of an oxidizing agent, thereby removing particles formed on the surface of said semiconductor wafer; a second step of treating the surface of said semiconductor wafer with about a 0.2 weight % HF water solution, thereby removing an oxide film formed on the surface of said semiconductor wafer; a third step, sequentially from said second step, of treating the surface of said semiconductor wafer with a mixture of between a 0.1 ppm and 100 ppm HF water solution, an HCl water solution, and an oxidizing agent; and a fourth step, sequentially from said third step, of treating the surface of said semiconductor wafer with a mixture of about a 0.5 weight % HCl water solution and about a 1 weight % concentration of an oxidizing agent.
Claim 7
Dependent Claim
26 words
The method according to claim 4, wherein said oxidizing agent is H 2 O 2 water solution or NHO 3 water solution or O 3 water.
Claim 8
Dependent Claim
52 words
The method according to claim 4, wherein HF water solution of said third step is a part of HF water solution of said second step, and HCl water solution and oxidizing agent of said fourth are a part of HCl water solution and that of oxidizing agent of said third step, respectively.
Claim 9
Dependent Claim
215 words
The method according to claim 4, wherein concentration of oxide material of oxidizing agent of said first step is controlled by supplying only an amount of each of oxidizing agent and deionized water to said treating tank, and by discharging mixed liquid of oxidizing agent and deionized water from said treating tank, concentration of HF of HF water solution of said second step is controlled by supplying only an amount of each of HF water solution and deionized water to said treating tank, and by discharging mixed liquid of HF water solution and deionized water from said treating tank, concentration of each of HCl and oxide material of the mixed liquid of said third step is controlled by supplying only an amount of each of HCl water solution, oxidizing agent and deionized water to said treating tank, and by discharging mixed liquid of HF water solution, HCl water solution, oxidizing agent and deionized water from said treating tank, and concentration of each of HCl and oxide material of the mixed liquid of said fourth step is controlled by supplying only an amount of each of HCl water solution, oxidizing agent and deionized water to said treating tank, and by discharging mixed liquid of, HCl water solution, oxidizing agent and deionized water from said treating tank.
Claim 10
Independent Claim
187 words
A method for treating a surface of a semiconductor wafer, comprising the steps of: supplying HF to a treating tank accommodating a semiconductor wafer and filled with deionized water until an HF concentration attains about a 0.2 weight % concentration, thereby removing an oxide film formed on the surface of a semiconductor wafer; terminating the HF supply to said treating tank and supplying deionized water to said treating tank while the HF solution is allowed to overflow from the treating tank, followed by supplying HCl to about 0.5 weight % and an oxidizing agent to about 1 weight to said treating tank when the HF concentration falls within the range from 100 ppm to 0.1 ppm, thereby removing metallic impurities attached to the surface of said semiconductor wafer; and terminating the supply of said HCl and said oxidizing agent followed by supplying deionized water while a mixture of the HCl water solution and said oxidizing agent is allowed to overflow the treating tank, thereby lowering the concentrations of said HCl and said oxidizing agent in said treating tank and filling said treating tank substantially with deionized water.
Claim 11
Independent Claim
187 words
A method for treating a surface of a semiconductor wafer, comprising the steps of: supplying HF to a treating tank accommodating a semiconductor wafer and filled with deionized water until an HF concentration attains about a 0.2 weight % concentration, thereby removing an oxide film formed on the surface of a semiconductor wafer; terminating the HF supply to said treating tank and supplying deionized water to said treating tank while the HF solution is allowed to overflow from the treating tank, followed by supplying HCl to about 0.5 weight % and an oxidizing agent to about 1 weight to said treating tank when the HF concentration falls within the range from 100 ppm to 0.1 ppm, thereby removing metallic impurities attached to the surface of said semiconductor wafer; and terminating the supply of said HCl and said oxidizing agent followed by supplying deionized water while a mixture of the HCl water solution and said oxidizing agent is allowed to overflow the treating tank, thereby lowering the concentrations of said HCl and said oxidizing agent in said treating tank and filling said treating tank substantially with deionized water.
Claim 12
Dependent Claim
140 words
The method according to claim 8, further comprising the following steps, prior to said HF supplying step to remove an oxide film formed on the surface of the semiconductor wafer, of: supplying deionized water to the treating tank; accommodating the semiconductor wafer in said treating tank followed by soaking said semiconductor wafer in the deionized water; supplying an oxidizing agent to said treating tank to a concentration of about 3 weight % while the deionized water is allowed to overflow the tank, thereby removing particles attached on the surface of the semiconductor wafer; and terminating the supply of the oxidizing agent and supplying deionized water while said water solution of said oxidizing agent is allowed to overflow the tank, thereby lowering the concentration of said oxidizing agent in said treating tank and filling the treating tank substantially with deionized water.
Claim 13
Dependent Claim
32 words
The method according to claim 8, wherein said oxidizing agent is at least one selected from the group consisting of H 2 O 2 , HNO 3 , and O 3 .
Claim 14
Independent Claim
171 words
A method for treating a surface of a semiconductor wafer, comprising the steps of: supplying HF to a treating tank accommodating said semiconductor wafer and filled with deionized water until an HF concentration attains about a 0.2 weight % concentration, thereby removing an oxide film formed on the surface of the semiconductor wafer; terminating the HF supply to said treating tank and supplying deionized water while the HF water solution is allowed to overflow from said treating tank, followed by supplying HCl to said treating tank to about 0.5 weight % when the HF concentration falls within a range from 100 ppm to 0.1 ppm; supplying an oxidizing agent to said treating tank to a concentration of about 1 weight %; and supplying deionized water while a mixture of said HCl water solution and a water solution of said oxidizing agent is allowed to overflow the tank, thereby reducing the concentrations of said HCl and said oxidizing agent in said treating tank and filling said treating tank substantially with deionized water.
Claim 15
Independent Claim
171 words
A method for treating a surface of a semiconductor wafer, comprising the steps of: supplying HF to a treating tank accommodating said semiconductor wafer and filled with deionized water until an HF concentration attains about a 0.2 weight % concentration, thereby removing an oxide film formed on the surface of the semiconductor wafer; terminating the HF supply to said treating tank and supplying deionized water while the HF water solution is allowed to overflow from said treating tank, followed by supplying HCl to said treating tank to about 0.5 weight % when the HF concentration falls within a range from 100 ppm to 0.1 ppm; supplying an oxidizing agent to said treating tank to a concentration of about 1 weight %; and supplying deionized water while a mixture of said HCl water solution and a water solution of said oxidizing agent is allowed to overflow the tank, thereby reducing the concentrations of said HCl and said oxidizing agent in said treating tank and filling said treating tank substantially with deionized water.
Claim 16
Dependent Claim
133 words
The method according to claim 11, further comprising the following steps, prior to said HF supplying step to remove an oxide film formed on the surface of said semiconductor wafer, of: supplying deionized water to the treating tank; accommodating the semiconductor wafer in said treating tank followed by soaking said semiconductor wafer in deionized water; supplying an oxidizing agent to said treating tank to about 3 weight % while deionized water is allowed to overflow the tank, thereby removing particles attached on the surface of said semiconductor wafer; and terminating the supply of the oxidizing agent and supplying deionized water while the water solution of said oxidizing agent is allowed to overflow, thereby lowering the concentration of said oxidizing agent in said treating tank and filling the treating tank substantially with deionized water.
Claim 17
Dependent Claim
32 words
The method according to claim 11, wherein said oxidizing agent is at least one selected from the group consisting of H 2 O 2 , HNO 3 , and O 3 .
Claim 18
Independent Claim
182 words
A method for treating a surface of a semiconductor wafer, comprising the steps of: supplying HF to a treating tank filled with deionized water to a concentration of about 0.2 weight %; soaking said semiconductor wafer in the HF water solution in said treating tank, thereby removing an oxide film formed on the surface of the semiconductor wafer; supplying deionized water while said HF solution is allowed to overflow from the treating tank, followed by supplying HCl to about 0.5 weight % and an oxidizing agent to about 1 weight % to said treating tank when the HF concentration falls within a range from 100 ppm to 0.1 ppm, thereby removing metallic impurities attached on a surface of said semiconductor wafer; and terminating said supply of HCl and said oxidizing agent followed by supplying deionized water while a mixed liquid of an HCl water solution and a water solution of said oxidizing agent is allowed to overflow the tank, thereby lowering the concentrations of HCl and said oxidizing agent in said treating tank and filling said treating tank substantially with deionized water.
Claim 19
Independent Claim
182 words
A method for treating a surface of a semiconductor wafer, comprising the steps of: supplying HF to a treating tank filled with deionized water to a concentration of about 0.2 weight %; soaking said semiconductor wafer in the HF water solution in said treating tank, thereby removing an oxide film formed on the surface of the semiconductor wafer; supplying deionized water while said HF solution is allowed to overflow from the treating tank, followed by supplying HCl to about 0.5 weight % and an oxidizing agent to about 1 weight % to said treating tank when the HF concentration falls within a range from 100 ppm to 0.1 ppm, thereby removing metallic impurities attached on a surface of said semiconductor wafer; and terminating said supply of HCl and said oxidizing agent followed by supplying deionized water while a mixed liquid of an HCl water solution and a water solution of said oxidizing agent is allowed to overflow the tank, thereby lowering the concentrations of HCl and said oxidizing agent in said treating tank and filling said treating tank substantially with deionized water.
Claim 20
Dependent Claim
32 words
The method according to claim 14, wherein said oxidizing agent is at least one selected from the group consisting of H 2 O 2 , HNO 3 , and O 3 .
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