US5129955A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Wafer cleaning method
Assignee: Dainippon Screen Manufacturing Co Ltd
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Filing: 1990-01-08
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Granted: 1992-07-14
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Expires: 2010-01-08
Abstract
Abstract A surface of a silicon wafer is treated with hydrogen fluoride. Subsequently, the surface is cleaned with choline, choline-derivative and/or tetraalkyl ammonium hydroxide. Impurities are removed from the surface by cations from the cleaning agent. Further, hydroxyl groups from the cleaning agent cause the surface to become hydrophilic, preventing the formation of droplets which would otherwise roll along and contaminate the surface.
Inventors
- 👤 Masato Tanaka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 00:28
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; H10P72/0411; H10P72/0414; C; C11; C11D; C11D7/00; C11D7/22; C11D7/32; C11D7/3209
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
188 words
A method of cleaning a surface of a wafer, and of preventing natural oxide from reforming on the surface after cleaning, the method comprising the steps of: (a) treating a surface of a silicon wafer with a treating agent, said treating agent including hydrogen fluoride, and thereby removing natural oxide formed on said surface and rendering said surface hydrophobic; (b) subsequently, cleaning said surface with a cleaning agent, wherein said cleaning agent includes at least one from the group consisting of choline, choline-derivative and tetraalkyl ammonium hydroxide, wherein said cleaning agent does not include hydrogen peroxide, and thereby: (1) producing collodial particles, (2) causing said surface of said wafer to become hydrophilic, and (3) preventing natural oxide from reforming on said surface after said cleaning; (c) rinsing said surface with pure water and thereby forming a layer of water on said surface, said colloidal particles being drawn to and concentrated at a vapor-liquid boundary of said layer of water; and (d) spin drying said surface such that surface portion of said layer of water, including said vapor-liquid boundary and said colloidal particles, are scattered away by centrifugal force.
Claim 2
Independent Claim
188 words
A method of cleaning a surface of a wafer, and of preventing natural oxide from reforming on the surface after cleaning, the method comprising the steps of: (a) treating a surface of a silicon wafer with a treating agent, said treating agent including hydrogen fluoride, and thereby removing natural oxide formed on said surface and rendering said surface hydrophobic; (b) subsequently, cleaning said surface with a cleaning agent, wherein said cleaning agent includes at least one from the group consisting of choline, choline-derivative and tetraalkyl ammonium hydroxide, wherein said cleaning agent does not include hydrogen peroxide, and thereby: (1) producing collodial particles, (2) causing said surface of said wafer to become hydrophilic, and (3) preventing natural oxide from reforming on said surface after said cleaning; (c) rinsing said surface with pure water and thereby forming a layer of water on said surface, said colloidal particles being drawn to and concentrated at a vapor-liquid boundary of said layer of water; and (d) spin drying said surface such that surface portion of said layer of water, including said vapor-liquid boundary and said colloidal particles, are scattered away by centrifugal force.
Claim 3
Dependent Claim
21 words
A wafer cleaning method as claimed in claim 1, wherein said treating agent is applied to said surface as a liquid.
Claim 4
Dependent Claim
21 words
A wafer cleaning method as claimed in claim 1, wherein said treating agent is applied to said surface as a vapor.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-07-14 | 1996-01-13 | 1996-07-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-07-14 | 2000-01-13 | 2000-07-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-07-14 | 2004-01-13 | 2004-07-14 | $7700.00 | Window Closed / Lapsed |