Abstract A semiconductor integrated circuit includes an interlayer insulating film in which vacancies are evenly scattered. In this structure, the effective dielectric constant of the insulating film is reduced so that capacitance between upper and lower wirings and capacitance between adjacent wirings are reduced, resulting in a high speed semiconductor device. In production, a main material of the insulating film mixed with particles of a different material is applied to a surface of a wafer where the insulating film is to be formed. Then, the main material is solidified and the particles are selectively etched with an etchant that etches the particles but does not etch the main material, resulting in an insulating film in which vacancies are uniformly distributed. In this way, an insulating film having a low effective dielectric constant is formed in a simple process, resulting in a high speed semiconductor device having a small capacitance between wirings.
A method for producing an interlayer insulating film comprising: applying a mixture of a main constituent of an interlayer insulating film and solid particles comprising a material different from the main constituent to a wafer where the interlayer insulating film is to be formed and solidifying the main constituent; and selectively etching the solid particles with an etchant that etches the solid particles but does not etch the main constituent.
Claim 2
Independent Claim
70 words
A method for producing an interlayer insulating film comprising: applying a mixture of a main constituent of an interlayer insulating film and solid particles comprising a material different from the main constituent to a wafer where the interlayer insulating film is to be formed and solidifying the main constituent; and selectively etching the solid particles with an etchant that etches the solid particles but does not etch the main constituent.
Claim 3
Dependent Claim
27 words
The method of claim 1 wherein the main constituent is a vitreous material including SiO 2 wherein solidifying the main constituent comprises vitrification of the main constituent.
Claim 4
Dependent Claim
32 words
The method of claim 2 wherein the solid particles are selected from the group consisting of aluminum and tantalum and the etchant is selected from the group consisting of NaOH and KOH.
Claim 5
Dependent Claim
25 words
The method of claim 1 wherein the main constituent is an organic material chosen from the group consisting of polytetrafluoroethylene, polyimide resin, and polyamide resin.
Claim 6
Dependent Claim
40 words
The method of claim 1 including forming a first insulating film that is not etched by the etchant on the wafer where the interlayer insulating film is to be disposed and thereafter applying the mixture to the first insulating film.