Abstract An energy-saving photomask comprises: at least one first pattern region in which a light can penetrate through the photomask without diffraction; and a second pattern region in which a plurality of fine patterns are formed in such a way to serve as slits through which the light is diffracted to increase the energy of the light irradiated relative to the first pattern region and diffracted to an extent that it comes to have an insufficient energy for the development of all photosensitive film except below the first pattern region. By virtue of the auxiliary patterns, the energy of the light incident on the photosensitive film can be rich at the auxiliary patterns contributes intensity of light to the desired portions without seriously affecting other portions. Because of a reduction of processing time, the photomask prolongs the lifetime of a light lamp in the stepper, as well as allows usage of a stepper with low power.
A photomask comprising: at least one first pattern region through which light can penetrate without diffraction to a desired location of a photosensitive film suitable for development; and a second pattern region including a plurality of fine patterns formed to serve as openings for diffracting the light to provide increased light energy reaching the desired location beyond only irradiation as a result of the first pattern region, whereby the light energy from diffracting light is insufficient for development of the photosensitive film outside of the desired location.
Claim 2
Dependent Claim
87 words
A photomask comprising: at least one first pattern region through which light can penetrate without diffraction to a desired location of a photosensitive film suitable for development; and a second pattern region including a plurality of fine patterns formed to serve as openings for diffracting the light to provide increased light energy reaching the desired location beyond only irradiation as a result of the first pattern region, whereby the light energy from diffracting light is insufficient for development of the photosensitive film outside of the desired location.
Claim 3
Dependent Claim
32 words
The photomask of claim 1, wherein the fine patterns have a shortest distance therein longer than the wavelength of the light, and a longest distance shorter than three times of the wavelength.
Claim 4
Dependent Claim
24 words
The photomask of claim 1, wherein the first pattern region is formed in a size sufficient to determine the size of a contact hole.
Claim 5
Dependent Claim
34 words
The photomask of claim 1, wherein the first pattern region and the second pattern region each is formed either in a relief or in an intaglio which is independently coated with chrome or not.