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US5468541A
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Thin film delamination test chip
Assignee: United Microelectronics Corp
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Filing: 1993-09-07
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Granted: 1995-11-21
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Expires: 2013-09-07
Abstract
Abstract A delamination test chip comprises a semiconductor substrate and a plurality of layers stacked on the substrate. The delamination test chip is included in a die with one or more other chips. The die is packaged and subjected to environmental stress. The test chip includes an arrangement of conducting films and vias which enable the detection of a delamination and enable the identification of the particular layer at which the delamination occurs.
Inventors
- 👤 Chen-Chung Hsu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 20:15
CPC Classifications
H; H10; H10P; H10P74/00; H10P74/27; H10P74/277; Y; Y10; Y10S; Y10S428/00; Y10S428/901; Y10T; Y10T428/00; Y10T428/12; Y10T428/12493; Y10T428/12528; Y10T428/24; Y10T428/24802; Y10T428/24917; Y10T428/24926
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
65 words
A delamination test structure comprising: a substrate, a plurality of thin films stacked on said substrate, a plurality of conductive films and vias incorporated in said thin films, and a plurality of conductive paths formed from said plurality of conductive films and vias, said plurality of conductive paths detecting a delamination in said thin films and detecting at which specific thin film the delamination occurs.
Claim 2
Dependent Claim
65 words
A delamination test structure comprising: a substrate, a plurality of thin films stacked on said substrate, a plurality of conductive films and vias incorporated in said thin films, and a plurality of conductive paths formed from said plurality of conductive films and vias, said plurality of conductive paths detecting a delamination in said thin films and detecting at which specific thin film the delamination occurs.
Claim 3
Dependent Claim
14 words
The delamination test structure of claim 1 wherein said substrate is a semiconductor substrate.
Claim 4
Dependent Claim
89 words
The delamination test structure of claim 1 wherein each one of said plurality of conductive paths extends from a contact in an upper one of said thin films down to a particular thin film in said stack of thin films and back to another contact in said uppermost thin film, so that when a delamination occurs, the resistance of any path extending below said delamination will be altered, but the resistance of any path which is above said delamination will not be altered as a result of the delamination.
References Cited (Backward Citations)
US4988674A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-11-20 | 1999-05-22 | 1999-11-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-11-20 | 2003-05-22 | 2003-11-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-11-20 | 2007-05-22 | 2007-11-21 | $7700.00 | Window Closed / Lapsed |