US5467415A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for making polarization independent silica optical circuits
Assignee: AT&T Inc
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Filing: 1994-04-22
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Granted: 1995-11-14
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Expires: 2014-04-22
Abstract
Abstract In accordance with the invention, a polarization independent optical device is fabricated by building the waveguide structure on a silicon substrate, adding a reinforcing layer of glass and removing regions of the silicon substrate underlying the waveguide structure. Alternatively, a reinforcing layer of glass can be added after the silicon in removed. Removal of the silicon underlying the waveguide structure eliminates polarization dependent spectral effects by eliminating the source of compressive strain, and the resulting glass reinforced structures are sufficiently robust for practical applications.
Inventors
- 👤 Herman M. Presby
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 09:10
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/13; G02B6/132; G02B6/126; G02B2006/12035; G02B2006/12038
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
45 words
A method for making an integrated optical device comprising the steps of: providing a substrate; forming an optical waveguide structure on a region of the substrate; forming a reinforcing layer over said waveguide structure; and removing said region of the substrate underlying said waveguide structure.
Claim 2
Independent Claim
45 words
A method for making an integrated optical device comprising the steps of: providing a substrate; forming an optical waveguide structure on a region of the substrate; forming a reinforcing layer over said waveguide structure; and removing said region of the substrate underlying said waveguide structure.
Claim 3
Dependent Claim
11 words
The method of claim 1 wherein said reinforcing layer comprises glass.
Claim 4
Dependent Claim
58 words
The method of claim 1 wherein said optical waveguide structure is formed by the steps of forming a layer of undercladding glass on said substrate, applying a layer of core glass on said undercladding glass, defining a pattern of waveguides in said layer of core glass, and applying a layer of overcladding glass on said pattern of waveguides.
Claim 5
Dependent Claim
22 words
The method of claim 1 wherein at least a portion of the thickness of said region of the substrate is removed mechanically.
Claim 6
Dependent Claim
22 words
The method of claim 1 wherein at least a portion of the thickness of said region of the substrate is removed chemically.
Claim 7
Dependent Claim
30 words
The method of claim 1 wherein said region of the substrate is removed by mechanically removing at least one-half the thickness in said region and chemically removing the remaining thickness.
Claim 8
Dependent Claim
18 words
The method of claim 1 wherein said glass reinforcing layer has a thickness of at least 20 micrometers.
Claim 9
Dependent Claim
10 words
The method of claim 1 wherein said substrate comprises silicon.
Claim 10
Dependent Claim
23 words
A product made by the process of claim 1 or 2 or 3 or 4 or 5 or 6 or 7 or 8.
Claim 11
Independent Claim
50 words
A method for making an integrated optical device comprising the steps of: providing a substrate; forming an optical waveguide structure on said substrate; forming a first reinforcing layer over said waveguide structure; removing said substrate; and forming a second reinforcing layer overlying the surface from which the substrate was removed.
Claim 12
Independent Claim
50 words
A method for making an integrated optical device comprising the steps of: providing a substrate; forming an optical waveguide structure on said substrate; forming a first reinforcing layer over said waveguide structure; removing said substrate; and forming a second reinforcing layer overlying the surface from which the substrate was removed.
Claim 13
Dependent Claim
12 words
The method of claim 10 wherein said first reinforcing layer is glass.
Claim 14
Dependent Claim
12 words
The method of claim 10 wherein said second reinforcing layer is glass.
Claim 15
Dependent Claim
13 words
A product made by the process of claim 10 or 11 or 12.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-11-13 | 1999-05-15 | 1999-11-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-11-13 | 2003-05-15 | 2003-11-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-11-13 | 2007-05-15 | 2007-11-14 | $7700.00 | Window Closed / Lapsed |