Apparatus for mounting an absolute pressure sensor

Claim 2

Apparatus for mounting an absolute pressure sensor subassembly having a self-contained vacuum reference within a housing, comprising: said pressure sensor subassembly comprising a base having a first side, a second side and a central diaphragm with a top cap enclosing said vacuum reference at said central diaphragm and bonded to said first side; said housing having a cavity having a first surface and a second surface opposite said first surface; a plurality of leads extending from inside said cavity to outside said cavity; a passageway extending from inside said cavity to outside said cavity; electrical connection means between said sensor and said leads; and a self contained adhesive means located between said first surface and said top cap, said adhesive means resiliently holding said pressure sensor subassembly with said second side being unattached at said first surface.

Claim 3

Apparatus of claim 1 wherein said second side is spaced from said first surface.

Claim 4

Apparatus of claim 2 wherein said adhesive means is a drop of material which has a first volume when applied and a second smaller volume after curing.

Claim 5

Apparatus of claim 3 wherein said drop has a shape and said shape and said first volume are related to said spacing of said second side from said first surface.

Claim 6

Apparatus of claim 3 wherein said housing comprises a first portion having said first surface and a second portion having said second surface and said second portion is for complementary receipt on said first portion.

Claim 7

Apparatus of claim 5 further comprising means for holding said sensor subassembly in place while said electrical interconnection means are made.

Claim 8

Apparatus of claim 6 wherein said means for holding comprises sublimeable adhesive means between said first surface and said second side of said sensor subassembly.

Claim 9

Apparatus of claim 6 wherein said second portion includes said passageway.

Claim 10

Apparatus of claim 6 wherein said first portion includes said passageway at said first surface, said electrical connection means comprises wire bond means and a vacuum is applied to said passageway to hold said sensor subassembly in place while making said wire bond means.

Claim 11

Apparatus for mounting an absolute pressure sensor subassembly having a self-contained vacuum reference, comprising: a housing having a passageway for connection to an external pressure, said housing comprising a base and a cap, said base having a peripheral portion and a central portion, said cap having a central portion and a peripheral portion, said cap for complimentary receipt on said base; a plurality of conductive leads extending through said package, said leads having a plurality of internal end portions; said pressure sensor comprising a first semiconductor die and a second die, said second die bonded to said first die with said vacuum reference chamber located between said first die and said second die, said first die having a first side and a second side, said first side having a plurality of bonding pads; means for holding said pressure sensor in a first position with said second side at said passageway while electrical connections are made between a plurality of said bonding pads and a plurality of said internal end portions; and a self contained drop of adhesive secured to said central portion of said cap for contacting said pressure sensor when said cap is complementarily received on said base, and moving said pressure sensor to a second position with said second side spaced from said pressure port as said drop of adhesive cures, with said pressure sensor then supported only by said drop of adhesive and said electrical connections.

Claim 12

Apparatus for mounting an absolute pressure sensor subassembly having a self-contained vacuum reference, comprising: a housing having a passageway for connection to an external pressure, said housing comprising a base and a cap, said base having a peripheral portion and a central portion, said cap having a central portion and a peripheral portion, said cap for complimentary receipt on said base; a plurality of conductive leads extending through said package, said leads having a plurality of internal end portions; said pressure sensor comprising a first semiconductor die and a second die, said second die bonded to said first die with said vacuum reference chamber located between said first die and said second die, said first die having a first side and a second side, said first side having a plurality of bonding pads; means for holding said pressure sensor in a first position with said second side at said passageway while electrical connections are made between a plurality of said bonding pads and a plurality of said internal end portions; and a self contained drop of adhesive secured to said central portion of said cap for contacting said pressure sensor when said cap is complementarily received on said base, and moving said pressure sensor to a second position with said second side spaced from said pressure port as said drop of adhesive cures, with said pressure sensor then supported only by said drop of adhesive and said electrical connections.

Claim 13

Apparatus of claim 10 wherein said electrical connections are wire bonds.

Claim 14

Apparatus of claim 11 wherein said means for holding said pressure sensor in a first position with said second side at said pressure port comprises vacuum means.

Claim 15

Apparatus of claim 11 wherein said means for holding said pressure sensor in a first position with said second side at said pressure port comprises sublimeable adhesive means.

Claim 16

Apparatus for mounting an absolute pressure sensor having a self-contained vacuum reference within a housing, comprising: said housing having a base and a cap and a pressure port, said cap for complimentary receipt on said base; a plurality of conductive leads extending through said housing, said leads having a plurality of internal end portions; said pressure sensor comprising a first semiconductor die and a second die, said second die bonded to said first die with said vacuum reference chamber formed between said first die and said second die, said first die having a first side and a second side, said first side having a plurality of electrical connection means; a plurality of electrical interconnection means extending between said electrical connection means and said internal end portions, with said pressure sensor partially supported by said electrical interconnection means; a self contained adhesive means secured at said cap and secured at said second die for maintaining said pressure sensor in a spaced relationship with said base.

Claim 17

Apparatus for mounting an absolute pressure sensor having a self-contained vacuum reference within a housing, comprising: said housing having a base and a cap and a pressure port, said cap for complimentary receipt on said base; a plurality of conductive leads extending through said housing, said leads having a plurality of internal end portions; said pressure sensor comprising a first semiconductor die and a second die, said second die bonded to said first die with said vacuum reference chamber formed between said first die and said second die, said first die having a first side and a second side, said first side having a plurality of electrical connection means; a plurality of electrical interconnection means extending between said electrical connection means and said internal end portions, with said pressure sensor partially supported by said electrical interconnection means; a self contained adhesive means secured at said cap and secured at said second die for maintaining said pressure sensor in a spaced relationship with said base.

Claim 18

Apparatus of claim 14 wherein said first semiconductor die is silicon and said second die is of a material that can be etched and has a thermal expansion characteristic closely matched to a thermal expansion characteristic of said silicon.

Claim 19

Apparatus of claim 15 wherein said second die material is selected from the group consisting of sapphire, ruby, silicon, Pyrex and glass.