Patent US5455421A successfully refreshed from Google Patents.
US5455421A
Expired / Lapsed
US
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Infrared detector using a resonant optical cavity for enhanced absorption
Assignee: Massachusetts Institute of Technology
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Filing: 1985-08-13
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Granted: 1995-10-03
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Expires: 2005-08-13
Abstract
Abstract A photodetector for detecting optical irradiation at a predetermined wavelength is provided with an integral, resonant optical cavity by forming a plurality of layers of material on a metallic reflector backing, the total optical thickness of those layers being an odd multiple of one-quarter of the predetermined wavelength. One of those layers is an active (i.e. optically-absorptive) semiconductor material. When the materials are deposited, that absorbing layer is formed at a level in the cavity including a region of peak optical field. As a result of the enhanced absorption provided by the resonant structure, the active layer may be very thin (i.e., less than one-tenth of a wavelength thick), yielding many beneficial results.
Inventors
- 👤 David L. Spears
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 19:22
CPC Classifications
G; G01; G01J; G01J1/00; G01J1/02; G01J3/00; G01J3/12; G01J3/26; G01J5/00; G01J5/02; G01J5/08; G01J5/0853; H; H10; H10F; H10F77/00; H10F77/40; H10F77/413
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
196 words
A photodetector for detecting optical radiation in a band centered about a predetermined wavelength, comprising: a. an optical cavity having a metallic reflector at a first end thereof and being open to receive optical radiation at a second, opposite end thereof, the total optical distance between the first and second ends of the cavity being an odd multiple of one-quarter of said predetermined wavelength, such that when the first end of the cavity is optically irradiated with energy within said band by a source outside the cavity, optical standing waves are produced in the cavity with the optical field intensity of such standing waves varying with distance from the reflector and having at least one peak of intensity within the cavity; b. a layer of semiconductor material, termed the "active layer", which is optically absorptive at said predetermined wavelength and which is disposed within the cavity at a location including a region of peak optical intensity; and c. first and second electrodes electrically coupled to the active layer for connecting the detector to apparatus for sensing changes in the detector resulting from the incidence on the open end of the cavity of radiation in said band.
Claim 2
Dependent Claim
196 words
A photodetector for detecting optical radiation in a band centered about a predetermined wavelength, comprising: a. an optical cavity having a metallic reflector at a first end thereof and being open to receive optical radiation at a second, opposite end thereof, the total optical distance between the first and second ends of the cavity being an odd multiple of one-quarter of said predetermined wavelength, such that when the first end of the cavity is optically irradiated with energy within said band by a source outside the cavity, optical standing waves are produced in the cavity with the optical field intensity of such standing waves varying with distance from the reflector and having at least one peak of intensity within the cavity; b. a layer of semiconductor material, termed the "active layer", which is optically absorptive at said predetermined wavelength and which is disposed within the cavity at a location including a region of peak optical intensity; and c. first and second electrodes electrically coupled to the active layer for connecting the detector to apparatus for sensing changes in the detector resulting from the incidence on the open end of the cavity of radiation in said band.
Claim 3
Dependent Claim
36 words
The photodetector of claim 1 wherein the thickness of the active layer is approximately equal to the predetermined wavelength divided by four times the index of refraction of the semiconductor material of which it is composed.
Claim 4
Dependent Claim
33 words
The photodetector of claim 2 further including d. an optically transparent, relatively highly conductive semiconductor layer disposed between and contacting on one side the metallic reflector and on another side the active layer.
Claim 5
Dependent Claim
72 words
The photodetector of claim 2 further including e. a first, optically transparent, relatively highly conductive semiconductor layer, termed the first contacting layer, disposed between and contacting on one side the metallic reflector and on another side the active layer; and f. a second, optically transparent, relatively highly conductive semiconductor layer, termed the second contacting layer, disposed between the open end of the cavity and the active layer and contacting the active layer.
Claim 6
Dependent Claim
29 words
The photodetector of claim 4 wherein the first electrode is operatively connected to the first contacting layer and the second electrode is operatively connected to the second contacting layer.
Claim 7
Dependent Claim
33 words
The photodetector of claim 2 further including g. a first layer of optically transparent dielectric material disposed between and contacting on one side the metallic reflector and on another side the active layer.
Claim 8
Dependent Claim
21 words
The photodetector of claim 6 wherein the first and second electrodes are operatively connected to opposite sides of the active layer.
Claim 9
Dependent Claim
30 words
The photodetector of claim 7 further including h. an optically transparent, electrically dielectric layer disposed on the active layer, between the active layer and the open end of the cavity.
Claim 10
Dependent Claim
19 words
The photodetector of claim 1 wherein the thickness of the active layer is substantially less than its absorption length.
Claim 11
Dependent Claim
32 words
The photodetector of claim 9 wherein the thickness of the active layer is approximately equal to the predetermined wavelength divided by four times the index of refraction of the active semiconductor material.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-10-02 | 1999-04-03 | 1999-10-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-10-02 | 2003-04-03 | 2003-10-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-10-02 | 2007-04-03 | 2007-10-03 | $7700.00 | Window Closed / Lapsed |