US5454902A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Production of clean, well-ordered CdTe surfaces using laser ablation
Assignee: The AT&T MVPD Group LLC
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Filing: 1992-09-24
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Granted: 1995-10-03
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Expires: 2012-09-24
Abstract
Abstract Chemically-etched and or sputtered CdTe surfaces are exposed to UV excimer laser radiation at a fluence ranging from about 15 to 75 mJ/cm 2 , followed by either a low temperature (<300° C.) thermal anneal or exposure of the CdTe surface to UV excimer laser radiation at a fluence lower than the threshold fluence. This procedure provides clean, stoichiometric, and well-ordered CdTe surfaces.
Inventors
- 👤 Jennifer J. Zinck
- 👤 Peter D. Brewer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 15:44
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/02; C23C16/0254; C23C16/0263; C23C16/0227; C30; C30B; C30B29/00; C30B29/10; C30B29/46; C30B29/48; C30B33/00; Y; Y10; Y10S; Y10S438/00; Y10S438/94; Y10S438/98
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
153 words
A method for producing clean, stoichiometric, and well-ordered CdTe surfaces, comprising: (a) providing a CdTe substrate having a surface region that has been exposed to at least one of chemical etching and sputter-cleaning to cause damage in said surface region; (b) removing said damage by exposing said substrate to ultraviolet radiation at a fluence ranging from about 15 mJ/cm 2 , which removes about 0.1 Å of damaged layer per pulse, to about 75 mJ/cm 2 , which removes about 20 Å of damaged layer per pulse; (c) treating said surface to provide a stoichiometric CdTe surface that evidences long range crystalline symmetry by performing either one of the following steps: (1) exposing said CdTe surface to ultraviolet radiation at a fluence lower than the threshold fluence for creating a non-stoichiometric film, or (2) thermally annealing said CdTe surface at a temperature less than about 300° C. until any excess tellurium is removed.
Claim 2
Independent Claim
153 words
A method for producing clean, stoichiometric, and well-ordered CdTe surfaces, comprising: (a) providing a CdTe substrate having a surface region that has been exposed to at least one of chemical etching and sputter-cleaning to cause damage in said surface region; (b) removing said damage by exposing said substrate to ultraviolet radiation at a fluence ranging from about 15 mJ/cm 2 , which removes about 0.1 Å of damaged layer per pulse, to about 75 mJ/cm 2 , which removes about 20 Å of damaged layer per pulse; (c) treating said surface to provide a stoichiometric CdTe surface that evidences long range crystalline symmetry by performing either one of the following steps: (1) exposing said CdTe surface to ultraviolet radiation at a fluence lower than the threshold fluence for creating a non-stoichiometric film, or (2) thermally annealing said CdTe surface at a temperature less than about 300° C. until any excess tellurium is removed.
Claim 3
Dependent Claim
25 words
The method of claim 1 wherein said CdTe surface is chemically etched in a solution consisting essentially of bromine in either ethylene glycol or methanol.
Claim 4
Dependent Claim
22 words
The method of claim 2 wherein the concentration of bromine in either ethylene glycol or methanol is at most about 1/16% weight/weight.
Claim 5
Dependent Claim
46 words
The method of claim 1 wherein said sputter-cleaning is performed employing argon ions at an energy of about 50 to 100 eV, using a beam current density of less than about 100 μA/cm 2 for a period of time ranging from about 1 to 5 minutes.
Claim 6
Dependent Claim
28 words
The method of claim 1 wherein said UV radiation is provided by a source comprising an excimer laser operating in the range of about 193 to 248 nm.
Claim 7
Dependent Claim
19 words
The method of claim 5 wherein said UV excimer laser is a KrF laser operating at about 248 nm.
Claim 8
Dependent Claim
28 words
The method of claim 6 wherein said damage is removed by exposing said surface to UV radiation at a fluence of at least about 60 mJ/cm 2 .
Claim 9
Dependent Claim
28 words
The method of claim 1 wherein said damage is removed by exposing said surface to UV radiation at a fluence of less than about 40 mJ/cm 2 .
Claim 10
Dependent Claim
23 words
The method of claim 6 wherein said CdTe surface is exposed to said UV excimer laser for about 100 to several thousand pulses.
Claim 11
Dependent Claim
20 words
The method of claim 6 wherein said threshold fluence for creating a non-stoichiometric film is about 40 mJ/cm 2 .
Claim 12
Dependent Claim
25 words
The method of claim 10 wherein said step of treating said surface is performed at a fluence of at least about 15 mJ/cm 2 .
Claim 13
Dependent Claim
23 words
The method of claim 11 wherein said CdTe surface is exposed to said UV excimer laser for about 100 to several thousand pulses.
Claim 14
Dependent Claim
33 words
The method of claim 1 wherein said CdTe surface is exposed to said temperature for a period of time ranging from about 30 seconds to 5 minutes and then cooled to room temperature.
Claim 15
Dependent Claim
15 words
The method of claim 13 wherein said annealing temperature is less than about 200° C.
Claim 16
Dependent Claim
16 words
The method of claim 1 wherein said CdTe surface is first chemically etched and then sputter-cleaned.
Claim 17
Independent Claim
172 words
A method for producing clean, stoichiometric, and well-ordered CdTe surfaces, comprising: (a) providing a CdTe substrate having a surface region that has been exposed to at least one of chemical etching and sputter-cleaning to cause damage in said surface region; (b) removing said damage by exposing said substrate to ultraviolet radiation from an excimer laser operating in the range of about 193 to 248 nm at a fluence ranging from about 15 mJ/cm 2 , which removes about 0.1 Å of damaged layer per pulse, to about 75 mJ/cm 2 , which removes about 20 Å of damaged layer per pulse; and (c) treating said surface to provide a stoichiometric CdTe surface that evidences long range crystalline symmetry by performing either one of the following steps: (1) exposing said CdTe surface to ultraviolet radiation from said excimer laser at a fluence from about 15 to less than 40 mJ/cm 2 , or (2) thermally annealing said CdTe surface at a temperature less than about 300° C. until any excess tellurium is removed.
Claim 18
Independent Claim
172 words
A method for producing clean, stoichiometric, and well-ordered CdTe surfaces, comprising: (a) providing a CdTe substrate having a surface region that has been exposed to at least one of chemical etching and sputter-cleaning to cause damage in said surface region; (b) removing said damage by exposing said substrate to ultraviolet radiation from an excimer laser operating in the range of about 193 to 248 nm at a fluence ranging from about 15 mJ/cm 2 , which removes about 0.1 Å of damaged layer per pulse, to about 75 mJ/cm 2 , which removes about 20 Å of damaged layer per pulse; and (c) treating said surface to provide a stoichiometric CdTe surface that evidences long range crystalline symmetry by performing either one of the following steps: (1) exposing said CdTe surface to ultraviolet radiation from said excimer laser at a fluence from about 15 to less than 40 mJ/cm 2 , or (2) thermally annealing said CdTe surface at a temperature less than about 300° C. until any excess tellurium is removed.
Claim 19
Dependent Claim
37 words
The method of claim 16 wherein said CdTe surface is chemically etched in a solution consisting essentially of bromine and ethylene glycol, in which the concentration of bromine in ethylene glycol is at most about 1/16% weight/weight.
Claim 20
Dependent Claim
19 words
The method of claim 16 wherein said UV excimer laser is a KrF laser operating at about 248 nm.
Claim 21
Dependent Claim
27 words
The method of claim 16 wherein said CdTe surface is exposed to said UV excimer laser at a fluence of at least about 60 mJ/cm 2 .
Claim 22
Dependent Claim
26 words
The method of claim 16 wherein said CdTe surface is exposed in step (c1) to said UV excimer laser for about 100 to several thousand pulses.
Claim 23
Dependent Claim
33 words
The method of claim 16 wherein said CdTe surface is exposed to said temperature for a period of time ranging from about 30 seconds to 5 minutes and then cooled to room temperature.
Claim 24
Dependent Claim
15 words
The method of claim 21 wherein said annealing temperature is less than about 200° C.
Claim 25
Dependent Claim
16 words
The method of claim 16 wherein said CdTe surface is first chemically etched and then sputter-cleaned.
Claim 26
Dependent Claim
46 words
The method of claim 16 wherein said sputter-cleaning is performed employing argon ions at an energy of about 50 to 100 eV, using a beam current density of less than about 100 μA/cm 2 for a period of time ranging from about 1 to 3 minutes.
References Cited (Backward Citations)
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| 3.5 Years (Year 4) | 1998-10-02 | 1999-04-03 | 1999-10-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-10-02 | 2003-04-03 | 2003-10-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-10-02 | 2007-04-03 | 2007-10-03 | $7700.00 | Window Closed / Lapsed |