US5449910A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Infrared radiation imaging array with compound sensors forming each pixel
Assignee: Honeywell Inc
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Filing: 1993-11-17
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Granted: 1995-09-12
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Expires: 2013-11-17
Abstract
Abstract An infrared imaging array of thermoelectric sensors has a plurality of electrically connected microbridge subsensors comprising each sensor of the array. Each subsensor consists of a short span microbridge lying across a relatively small pit. The use of many of such subsensors for each sensor rather than a single large area microbridge sensor for a single pixel allows each pixel to be made large enough to give good sensitivity in either vacuum or gas-filled designs, and at the same time avoid the reduced fabrication yield which results when sensors span large pits.
Inventors
- 👤 Roland A. Wood
- 👤 Robert E. Higashi
- 👤 Michael L. Rhodes
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 08:50
CPC Classifications
H; H10; H10N; H10N19/00
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
161 words
An infrared radiation sensing array comprising a) a substrate having on a first surface, a plurality of pixel areas, a plurality of pixel areas arranged in an array; b) within each pixel area, a sensor comprising a plurality of infrared sensitive microbridge subsensors arranged in a sub-array, each subsensor spanning an underlying pit and having first and second output terminals across which appears a voltage responsive to presence of infrared radiation impinging on a radiation-responsive surface of the subsensor, at least one of said subsensors within a pixel area having its radiation-responsive surface facing away from the pit within the pixel area; c) within each pixel area, a plurality of subsensor conductors electrically connecting the subsensors in that pixel area together in a predetermined manner which provides a composite signal to which each subsensor contributes electrical energy; and d) a plurality of sensor output conductors, each one associated with a single sensor, and carrying the composite signal produced by that sensor.
Claim 2
Dependent Claim
161 words
An infrared radiation sensing array comprising a) a substrate having on a first surface, a plurality of pixel areas, a plurality of pixel areas arranged in an array; b) within each pixel area, a sensor comprising a plurality of infrared sensitive microbridge subsensors arranged in a sub-array, each subsensor spanning an underlying pit and having first and second output terminals across which appears a voltage responsive to presence of infrared radiation impinging on a radiation-responsive surface of the subsensor, at least one of said subsensors within a pixel area having its radiation-responsive surface facing away from the pit within the pixel area; c) within each pixel area, a plurality of subsensor conductors electrically connecting the subsensors in that pixel area together in a predetermined manner which provides a composite signal to which each subsensor contributes electrical energy; and d) a plurality of sensor output conductors, each one associated with a single sensor, and carrying the composite signal produced by that sensor.
Claim 3
Dependent Claim
27 words
The array of claim 1, wherein the conductors within a pixel area connect at least two subsensors within that pixel area in series connection with each other.
Claim 4
Dependent Claim
48 words
The array of claim 2, wherein each subsensor includes a sensing junction and a reference junction, and wherein the conductors forming the series connection between two subsensors are integral with the elements forming the reference junction of one series-connected subsensor and the sensing junction of another series-connected subsensor.
Claim 5
Dependent Claim
29 words
The array of claim 1, wherein the conductors within a pixel area connect at least some of the subsensors within that pixel area in parallel connection with each other.
Claim 6
Dependent Claim
15 words
The array of claim 1, including a signal processor connected to the sensor output conductors.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-09-11 | 1999-03-13 | 1999-09-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-09-11 | 2003-03-13 | 2003-09-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-09-11 | 2007-03-13 | 2007-09-12 | $7700.00 | Window Closed / Lapsed |