Patent US4403346A successfully refreshed from Google Patents.
Patent US5449433A successfully refreshed from Google Patents.
US5449433A
Expired / Lapsed
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Use of a high density plasma source having an electrostatic shield for anisotropic polysilicon etching over topography
Assignee: Micron Technology Inc
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Filing: 1994-02-14
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Granted: 1995-09-12
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Expires: 2014-02-14
Abstract
Abstract A method for etching structures having topography, which structures are comprised of polysilicon disposed over an oxide, by placing an electrostatic shield on a high density source etcher while etching the structures. The etch involves the removal of the polysilicon which overhangs the oxide structure below it, thereby substantially eliminating conductive stringers.
Inventors
- 👤 Kevin G. Donohoe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 15:43
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; H01J37/321; H10; H10P; H10P50/00; H10P50/20; H10P50/26; H10P50/264; H10P50/266; H10P50/267; H10P50/268; H01J2237/00; H01J2237/32; H01J2237/33; H01J2237/334; H01J2237/3343; H01J2237/3345
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
88 words
A method for etching a stack comprising polysilicon disposed over oxide while minimizing residual deposits during etch, said method comprising the following steps of: disposing a wafer in a high density reactor, said wafer having a topography comprising a layer of polysilicon disposed over a layer of oxide, said topography having a re-entrant profile, said reactor having an electrostatic shield; and creating a plasma in said reactor, thereby etching said polysilicon layer obscured by said re-entrant profile, said etching comprises an anisotropic etch followed by an isotropic etch.
Claim 2
Independent Claim
88 words
A method for etching a stack comprising polysilicon disposed over oxide while minimizing residual deposits during etch, said method comprising the following steps of: disposing a wafer in a high density reactor, said wafer having a topography comprising a layer of polysilicon disposed over a layer of oxide, said topography having a re-entrant profile, said reactor having an electrostatic shield; and creating a plasma in said reactor, thereby etching said polysilicon layer obscured by said re-entrant profile, said etching comprises an anisotropic etch followed by an isotropic etch.
Claim 3
Dependent Claim
11 words
The method according to claim 1, wherein said plasma comprises chlorine.
Claim 4
Dependent Claim
12 words
The method according to claim 2, wherein said plasma further comprises fluorine.
Claim 5
Dependent Claim
13 words
The method according to claim 3, wherein said electrostatic shield comprises a conductor.
Claim 6
Dependent Claim
11 words
The method according to claim 4, wherein said conductor comprises copper.
Claim 7
Dependent Claim
98 words
A process for minimizing residue from a reactor when etching layers in the reactor, said process comprising the following steps of: positioning a wafer in a source reactor, said wafer having features disposed thereon, said features being covered by a dielectric layer and a polysilicon layer, said covered feature having a retrograde profile, said source reactor comprising a bell jar, said bell jar comprising a dielectric, a shield is disposed over said bell jar; creating a plasma in said reactor; anisotropically etching said polysilicon layer; and isotropically etching any of said polysilicon layer obscured by said retrograde profile.
Claim 8
Dependent Claim
98 words
A process for minimizing residue from a reactor when etching layers in the reactor, said process comprising the following steps of: positioning a wafer in a source reactor, said wafer having features disposed thereon, said features being covered by a dielectric layer and a polysilicon layer, said covered feature having a retrograde profile, said source reactor comprising a bell jar, said bell jar comprising a dielectric, a shield is disposed over said bell jar; creating a plasma in said reactor; anisotropically etching said polysilicon layer; and isotropically etching any of said polysilicon layer obscured by said retrograde profile.
Claim 9
Dependent Claim
11 words
The process according to claim 6, wherein said plasma comprises chlorine.
Claim 10
Dependent Claim
11 words
The process according to claim 7, wherein said plasma comprises fluorine.
Claim 11
Dependent Claim
18 words
The process according to claim 8, wherein said bell jar comprises at least one of alumina and quartz.
Claim 12
Dependent Claim
13 words
The process according to claim 9, wherein said shield is an electrostatic shield.
Claim 13
Dependent Claim
19 words
The process according to claim 10, wherein said shield substantially prohibits capacitive coupling of said plasma with said reactor.
Claim 14
Dependent Claim
17 words
The process according to claim 11, wherein said ions further bombard said wafer, thereby etching said wafer.
Claim 15
Independent Claim
94 words
A method for etching relatively closely spaced features, said method comprising the following steps of: disposing a substrate in a reactor, said substrate having closely spaced features disposed thereon, said features being covered by a dielectric, polysilicon being layered superjacent said dielectric, said features having a re-entrant profile; creating an atmosphere in said reactor, said atmosphere comprising halogen ions; substantially preventing capacitive coupling between said atmosphere and said reactor; and selectively removing portions of said polysilicon layer obscured by said re-entrant profile, said selective removal comprising an anisotropic etch followed by an isotropic etch.
Claim 16
Independent Claim
94 words
A method for etching relatively closely spaced features, said method comprising the following steps of: disposing a substrate in a reactor, said substrate having closely spaced features disposed thereon, said features being covered by a dielectric, polysilicon being layered superjacent said dielectric, said features having a re-entrant profile; creating an atmosphere in said reactor, said atmosphere comprising halogen ions; substantially preventing capacitive coupling between said atmosphere and said reactor; and selectively removing portions of said polysilicon layer obscured by said re-entrant profile, said selective removal comprising an anisotropic etch followed by an isotropic etch.
Claim 17
Dependent Claim
20 words
The process according to claim 13, wherein said capacitive coupling is substantially prevented by a shield, said shield being conductive.
Claim 18
Dependent Claim
42 words
The process according to claim 14, wherein said reactor is a high density source reactor having a bell jar and magnets located outside said bell jar, said conductive shield being located outside said bell jar between said bell jar and said magnets.
Claim 19
Dependent Claim
25 words
The process according to claim 15, wherein said conductive shield is an electrostatic shield having at least one of a cylindrical and a hemispherical shape.
Claim 20
Dependent Claim
26 words
The process according to claim 16, wherein said conductive shield is comprised of copper, said conductive shield having voids in said cylinder, said voids being elongated.
Claim 21
Dependent Claim
14 words
The process according to claim 17, wherein said halogen ions comprise chlorine and fluorine.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-09-11 | 1999-03-13 | 1999-09-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-09-11 | 2003-03-13 | 2003-09-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-09-11 | 2007-03-13 | 2007-09-12 | $7700.00 | Window Closed / Lapsed |