Semiconductor processing apparatus

Claim 2

A semiconductor processing apparatus for processing a substrate while being optically heated, said substrate having a main surface to be processed and a rear surface reverse to said main surface, comprising: a processing chamber; supporting means, provided in said processing chamber, for supporting said substrate; means for substantially partitioning an interior of said processing chamber into first and second spaces, said main surface of said substrate being exposed in said first space; means for introducing a process gas for processing said main surface of said substrate into said first space; exhausting means, connected to said first space, for setting said processing chamber to a vacuum atmosphere; means for supplying inactive gas to said second space such that said second space has a pressure higher than that of said first space; a light source, provided outside said processing chamber so as to be opposite to said rear surface of said substrate, for emitting light for heating said substrate, said light source comprising a plurality of lamps arranged on a rotatable table; a power supply for supplying electrical power to said light source so as to emit said light; a window plate, provided to be opposite to said light source, and forming a part of a wall of said processing chamber, said window plate transmitting said light emitted from said light source to pass therethrough; detecting means for detecting energy of transmitted light having passed through said window plate, said detecting means having a detection terminal provided between said window plate and said substrate in said second space; comparing means for comparing an observed value of energy of said transmitted light detected by said detecting means with a reference value representing energy of said transmitted light in an initial state of said window plate; and controlling means for estimating a state of said window plate from a comparative result between the observed value and the reference value obtained by said comparing means, and selectively stopping the power supply to said light source from said power source.

Claim 3

The apparatus according to claim 1, wherein said supporting means comprises a susceptor having a supporting surface and a rear surface, which is a reverse side of the supporting surface, and said supporting surface of said susceptor substantially entirely contacts said rear surface of said substrate, and said transmitted light is directly radiated on said rear surface of said susceptor.

Claim 4

The apparatus according to claim 1, wherein said supporting means supports said pins substrate such that said rear surface of said substrate is exposed to said second space, and said transmitted light is directly radiated on said rear surface of said substrate.

Claim 5

The apparatus according to claim 1, further comprising a sub-chamber housing said lamps and means for introducing cooling gas for suppressing overheat of said window plate into said sub-chamber.

Claim 6

The apparatus according to claim 4, wherein said process gas is a gas for forming a film on said main surface of said substrate.

Claim 7

The apparatus according to claim 5, wherein said comparing means compares an observed temperature rise curve obtained from said observed value with a reference temperature rise curve obtained from said reference value, for obtaining said comparative result.

Claim 8

A CVD apparatus for forming a film on a main surface of a substrate to be processed while being optically heated, said substrate having a main surface and a rear surface, said CVD apparatus comprising: a processing chamber; exhausting means for setting said processing chamber to a vacuum atmosphere; supporting means, provided in said processing chamber, for supporting said substrate; means for introducing process gas for forming said film on said main surface into said processing chamber; a light source, provided outside said processing chamber, for emitting light for heating said substrate; a power supply for supplying electrical power to said light source so as to emit said light; a window plate, provided to be opposite to said light source, and forming a part of a wall of said processing chamber, said window plate transmitting said light emitted from said light source to pass therethrough; detecting means for detecting energy of transmitted light having passed through said window plate, said detecting means having a detection terminal provided between said window plate and said substrate in said processing chamber; comparing means for comparing an observed value of energy of said transmitted light detected by said detecting means with a reference value representing energy of said transmitted light in an initial state of said window plate; and controlling means for estimating a state of said window plate from a comparative result between the observed value and the reference value obtained by said comparing means, and selectively stopping the power supply to said light source from said power source, wherein said window plate and said light source are arranged opposite to said rear surface of said substrate, wherein said processing chamber comprises partitioning means for substantially partitioning the interior into first and second spaces, said main surface of said substrate being exposed in said first space, said detecting terminal of said detecting means being arranged in said second space, said means for introducing process gas and said exhausting means being directly connected to said first space, and said apparatus further comprises means for supplying inactive gas into said second space such that said second space has a pressure higher than that of said first space, and wherein said light source comprises a plurality of light source members arranged on a rotatable table.

Claim 9

A CVD apparatus for forming a film on a main surface of a substrate to be processed while being optically heated, said substrate having a main surface and a rear surface, said CVD apparatus comprising: a processing chamber; exhausting means for setting said processing chamber to a vacuum atmosphere; supporting means, provided in said processing chamber, for supporting said substrate; means for introducing process gas for forming said film on said main surface into said processing chamber; a light source, provided outside said processing chamber, for emitting light for heating said substrate; a power supply for supplying electrical power to said light source so as to emit said light; a window plate, provided to be opposite to said light source, and forming a part of a wall of said processing chamber, said window plate transmitting said light emitted from said light source to pass therethrough; detecting means for detecting energy of transmitted light having passed through said window plate, said detecting means having a detection terminal provided between said window plate and said substrate in said processing chamber; comparing means for comparing an observed value of energy of said transmitted light detected by said detecting means with a reference value representing energy of said transmitted light in an initial state of said window plate; and controlling means for estimating a state of said window plate from a comparative result between the observed value and the reference value obtained by said comparing means, and selectively stopping the power supply to said light source from said power source, wherein said window plate and said light source are arranged opposite to said rear surface of said substrate, wherein said processing chamber comprises partitioning means for substantially partitioning the interior into first and second spaces, said main surface of said substrate being exposed in said first space, said detecting terminal of said detecting means being arranged in said second space, said means for introducing process gas and said exhausting means being directly connected to said first space, and said apparatus further comprises means for supplying inactive gas into said second space such that said second space has a pressure higher than that of said first space, and wherein said light source comprises a plurality of light source members arranged on a rotatable table.

Claim 10

The apparatus according to claim 7, wherein said comparing means compares an observed temperature rise curve obtained from said observed value with a reference temperature rise curve obtained from said reference value, for obtaining said comparative result.

Claim 11

The apparatus according to claim 7, wherein said light source members are oriented to different directions to share different-radiations zones to said substrate.

Claim 12

The apparatus according to claim 9 wherein outputs to said light source members can be controlled for each of said radiation zones.

Claim 13

The apparatus according to claim 10, wherein said detecting means comprises a plurality of detection members arranged to correspond to said radiation zones.

Claim 14

A semiconductor processing method of processing a substrate while being optically heated, said substrate having a main surface to be processed and a rear surface reverse to said main surface, by using an apparatus comprising a processing chamber, supporting means, provided in said processing chamber, for supporting said substrate, means for substantially partitioning an interior of said processing chamber into first and second spaces, said main surface of said substrate being exposed in said first space, means for introducing a process gas for processing said main surface of said substrate into said first space, exhausting means, connected to said first space, for setting said processing chamber to a vacuum atmosphere, means for supplying inactive gas to said second space such that said second space has a pressure higher than that of said first space, a light source, provided outside said processing chamber so as to be opposite to said rear surface of said substrate, for emitting light for heating said substrate, said light source comprising a plurality of lamps arranged on a rotatable table, a power supply for supplying electrical power to said light source so as to emit said light, and a window plate, provided to be opposite to said light source, and forming a part of a wall of said processing chamber, said window plate transmitting said light emitted from said light source to pass therethrough, said method comprising the steps of: detecting energy of transmitted light having passed through said window plate by detecting means having a detection terminal provided between said window plate and said substrate in said second space; comparing by comparing means an observed value of energy of said transmitted light detected by said detecting means with a reference value representing energy of said transmitted light in an initial state of said window plate; and estimating by controlling means a state of said window plate from a comparative result between the observed value and the reference value obtained by said comparing means, and selectively stopping by said controlling means the power supply to said light source from said power source.

Claim 15

A semiconductor processing method of processing a substrate while being optically heated, said substrate having a main surface to be processed and a rear surface reverse to said main surface, by using an apparatus comprising a processing chamber, supporting means, provided in said processing chamber, for supporting said substrate, means for substantially partitioning an interior of said processing chamber into first and second spaces, said main surface of said substrate being exposed in said first space, means for introducing a process gas for processing said main surface of said substrate into said first space, exhausting means, connected to said first space, for setting said processing chamber to a vacuum atmosphere, means for supplying inactive gas to said second space such that said second space has a pressure higher than that of said first space, a light source, provided outside said processing chamber so as to be opposite to said rear surface of said substrate, for emitting light for heating said substrate, said light source comprising a plurality of lamps arranged on a rotatable table, a power supply for supplying electrical power to said light source so as to emit said light, and a window plate, provided to be opposite to said light source, and forming a part of a wall of said processing chamber, said window plate transmitting said light emitted from said light source to pass therethrough, said method comprising the steps of: detecting energy of transmitted light having passed through said window plate by detecting means having a detection terminal provided between said window plate and said substrate in said second space; comparing by comparing means an observed value of energy of said transmitted light detected by said detecting means with a reference value representing energy of said transmitted light in an initial state of said window plate; and estimating by controlling means a state of said window plate from a comparative result between the observed value and the reference value obtained by said comparing means, and selectively stopping by said controlling means the power supply to said light source from said power source.

Claim 16

The method according to claim 12, wherein said supporting means comprises a susceptor having a supporting surface and a rear surface which is a reverse side of the supporting surface, and said supporting surface of said susceptor substantially entirely contacts said rear surface of said substrate, and said transmitted light is directly radiated on said rear surface of said susceptor.

Claim 17

The method according to claim 12, wherein said supporting means supports said substrate such that said rear surface of said substrate is exposed to said second space, and said transmitted light is directly radiated on said rear surface of said substrate.

Claim 18

The method according to claim 12, wherein said apparatus further comprises a sub-chamber housing said lamps and means for introducing cooling gas for suppressing overheat of said window plate into said sub-chamber.

Claim 19

The method according to claim 15, wherein said process gas is a gas for forming a film on said main surface of said substrate.

Claim 20

The method according to claim 16, wherein said comparing means compares an observed temperature rise curve obtained from said observed value with a reference temperature rise curve obtained from said reference value, for obtaining said comparative result.