US5444207A — Plasma generating device and surface processing d…

Claim 1

Independent Claim 203 words

A plasma generating apparatus comprising: a vacuum container provided with a first electrode and a second electrode disposed opposite to said first electrode; gas feeding means for feeding a predetermined gas into said vacuum container; evacuating means for maintaining the inside of said container at a reduced pressure; electric field generating means for supplying electric power between said first and second electrodes to generate an electric field in a region between said first and second electrodes; and magnetic field generating means for generating a magnetic field in said vacuum container, said magnetic field generating means comprising a plurality of magnetic elements arranged in a circle around said container so as to form a ring, each of said magnetic elements having an axis directed to a center of said circle and a magnetization direction, wherein one of said magnetic elements is so disposed that the magnetization direction thereof coincides with the axis thereof, and each of said magnetic elements other than said one magnetic element is so disposed that an angle of the magnetization direction thereof relative to the magnetization direction of said one magnetic element is substantially twice an angle of the axis thereof relative to the axis of said one magnetic element.

Claim 2

Dependent Claim 203 words

A plasma generating apparatus comprising: a vacuum container provided with a first electrode and a second electrode disposed opposite to said first electrode; gas feeding means for feeding a predetermined gas into said vacuum container; evacuating means for maintaining the inside of said container at a reduced pressure; electric field generating means for supplying electric power between said first and second electrodes to generate an electric field in a region between said first and second electrodes; and magnetic field generating means for generating a magnetic field in said vacuum container, said magnetic field generating means comprising a plurality of magnetic elements arranged in a circle around said container so as to form a ring, each of said magnetic elements having an axis directed to a center of said circle and a magnetization direction, wherein one of said magnetic elements is so disposed that the magnetization direction thereof coincides with the axis thereof, and each of said magnetic elements other than said one magnetic element is so disposed that an angle of the magnetization direction thereof relative to the magnetization direction of said one magnetic element is substantially twice an angle of the axis thereof relative to the axis of said one magnetic element.

Claim 3

Dependent Claim 211 words

A surface processing apparatus comprising: a vacuum container provided with a first electrode and a second electrode disposed opposite to said first electrode for supporting thereon a substrate to be processed; gas feeding means for feeding a predetermined gas into said vacuum container; evacuating means for maintaining the inside of said container at a reduced pressure; electric field generating means for supplying electric power between said first and second electrodes to generate an electric field in a region between said first and second electrodes; and magnetic field generating means for generating a magnetic field in said vacuum container, said magnetic field generating means comprising a plurality of magnetic elements arranged in a circle around said container so as to form a ring, each of said magnetic elements having an axis directed to a center of said circle and a magnetization direction, wherein one of said magnetic elements is so disposed that the magnetization direction thereof coincides with the axis thereof, and each of said magnetic elements other than said one magnetic element is so disposed that an angle of the magnetization direction thereof relative to the magnetization direction of said one magnetic element is substantially twice an angle of the axis thereof relative to the axis of said one magnetic element.

Claim 4

Dependent Claim 211 words

A surface processing apparatus comprising: a vacuum container provided with a first electrode and a second electrode disposed opposite to said first electrode for supporting thereon a substrate to be processed; gas feeding means for feeding a predetermined gas into said vacuum container; evacuating means for maintaining the inside of said container at a reduced pressure; electric field generating means for supplying electric power between said first and second electrodes to generate an electric field in a region between said first and second electrodes; and magnetic field generating means for generating a magnetic field in said vacuum container, said magnetic field generating means comprising a plurality of magnetic elements arranged in a circle around said container so as to form a ring, each of said magnetic elements having an axis directed to a center of said circle and a magnetization direction, wherein one of said magnetic elements is so disposed that the magnetization direction thereof coincides with the axis thereof, and each of said magnetic elements other than said one magnetic element is so disposed that an angle of the magnetization direction thereof relative to the magnetization direction of said one magnetic element is substantially twice an angle of the axis thereof relative to the axis of said one magnetic element.

Claim 5

Dependent Claim 31 words

A surface processing apparatus according to claim 2, further comprising rotating means for rotating said magnetic field generating means around a central axis thereof relative to said substrate to be processed.

Claim 6

Dependent Claim 69 words

A surface processing apparatus according to claim 2, wherein said magnetic field generating means comprises a plurality of magnetic elements arranged around the other periphery of said container so as to form a ring in such a manner that directions of magnetization thereof differ from adjacent magnetic element by a predetermined phase making a 360 degree rotation along half the circumference of said ring, whereby a plasma is generated.

Claim 7

Dependent Claim 23 words

A surface processing apparatus according to claim 2, further comprising moving means for moving said magnetic field generating means along central axis thereof.

Claim 8

Dependent Claim 47 words

A surface processing apparatus according to claim 2, wherein said magnetic field generating means comprises at least two separate magnetic field generating sub-means disposed such as to have the same central axis, at least one of said magnetic field generating sub-means being movable along said central axis.

Claim 9

Dependent Claim 36 words

A surface processing apparatus according to claim 2, wherein said magnetic field generating means comprises at least two separate magnetic field generating sub-means disposed such that distance between said two magnetic field generating sub-means is adjustable.

Claim 10

Dependent Claim 41 words

A surface processing apparatus according to claim 6 or 7, wherein said magnetic field generating means comprises at least two separate magnetic field generating sub-means disposed such that the difference in phase between said two magnetic field generating sub-means is adjustable.

Claim 11

Dependent Claim 21 words

A surface processing apparatus according to claim 2, further comprising rotating means for rotating each of said plurality of magnetic elements.

Claim 12

Dependent Claim 29 words

A surface processing apparatus according to claim 2, further comprising electrode position setting means for moving said second electrode to change the distance between said first and second electrodes.

Claim 13

Dependent Claim 27 words

A surface processing apparatus according to claim 2, further comprising diameter changing means for changing the diameter of the ring formed by said plurality of magnet elements.

Claim 14

Dependent Claim 45 words

A surface processing apparatus according to claim 2, wherein at least one pair of opposing magnet elements have direction elements along a central axis of said ring, magnetic strengths of said direction elements are equal to each other with direction thereof opposite to each other.

Claim 15

Dependent Claim 22 words

A surface processing apparatus according to claim 2, further comprising a fence member provided around periphery of said substrate to be processed.

Claim 16

Dependent Claim 60 words

A surface processing apparatus according to claim 2, wherein magnetization strengths of said magnetic elements are adjusted in such a manner that the strength in a north-south direction of the magnetic field in said vacuum container around the peripheral portions of said substrate is equal to or greater than that of the magnetic field at the center of said substrate.

Claim 17

Dependent Claim 65 words

A surface processing apparatus according to claim 2, further comprising a plurality of complementary magnets provided in the vicinity of said ring in such a manner that the strength in a north-south direction of the magnetic field in said vacuum container around the peripheral portions of said substrate is equal to or greater than that of the magnetic field at the center of said substrate.

Claim 18

Dependent Claim 28 words

A surface processing apparatus according to claim 2, wherein the magnetic field in said vacuum container has a gradient of strength in an east-west direction of said ring.

Claim 19

Dependent Claim 46 words

A surface processing apparatus according to claim 2, further comprising a plurality of complementary magnets provided in the vicinity of said ring in such a manner that the magnetic field in said vacuum container has a gradient of strength in an east-west direction of said ring.

Claim 20

Dependent Claim 38 words

A surface processing apparatus according to claim 2, wherein at least one of said magnetic elements is displaceable so as to be able to adjust a strength of the magnetic field generated by the magnetic field generating means.

Claim 21

Dependent Claim 81 words

A surface processing apparatus according to claim 2, wherein at least one of said magnetic elements disposed in the vicinity of said one magnetic element and in the vicinity of a position rotated by 180 degrees from said one magnetic element has a magnetization direction such that an angle between the magnetization direction thereof and the magnetization direction of said one magnetic element is smaller than twice an angle between an axis thereof and the axis of said one magnetic element.

Claim 22

Dependent Claim 48 words

A surface processing apparatus according to claim 2, wherein said magnetic field generating means comprises three rings having the same structure and disposed coaxially one over another, an intermediate one of said rings being disposed by rotating 180 degrees relative to upper and lower ones of said rings.

Claim 23

Dependent Claim 130 words

A surface processing apparatus according to claim 2, wherein said plurality of magnetic elements include a second magnetic element disposed at a position 180 degrees from said one magnetic element, said position corresponding to an S pole of said magnetic field generating means while a position at which said one magnetic element is located corresponds to an N pole of said magnetic field generating means, the magnetic elements having lengths along a central axis of the magnetic field generating means which are successively decreased as the magnetic elements are disposed farther apart from a closer one of said one magnetic element and said second magnetic element, said one magnetic element and said second magnetic element having the same length, which is greater than the lengths of the remaining magnetic elements.

Claim 24

Dependent Claim 230 words

A surface processing apparatus comprising: a vacuum container provided with a plurality of reactive chambers; a first electrode provided in at least one of said reactive chambers; a second electrode provided opposite to said first electrode; gas feeding means for feeding a predetermined gas into said at least one reactive chamber; evacuating means for maintaining the inside of said at least one reactive chamber at a reduced pressure; electric field generating means for supplying electric power between said first and second electrodes to generate an electric field in a region between said first and second electrodes; and magnetic field generating means for generating a magnetic field in said at least one reactive chamber, said magnetic field generating means comprising a plurality of magnetic elements arranged in a circle around said at least one reactive chamber so as to form a ring, each of said magnetic elements having an axis directed to a center of said circle and a magnetization direction, wherein one of said magnetic elements is so disposed that the magnetization direction thereof coincides with the axis thereof, and each of said magnetic elements other than said one magnetic element is so disposed that an angle of the magnetization direction thereof relative to the magnetization direction of said one magnetic element is substantially twice an angle of the axis thereof relative to the axis of said one magnetic element.

Claim 25

Dependent Claim 230 words

A surface processing apparatus comprising: a vacuum container provided with a plurality of reactive chambers; a first electrode provided in at least one of said reactive chambers; a second electrode provided opposite to said first electrode; gas feeding means for feeding a predetermined gas into said at least one reactive chamber; evacuating means for maintaining the inside of said at least one reactive chamber at a reduced pressure; electric field generating means for supplying electric power between said first and second electrodes to generate an electric field in a region between said first and second electrodes; and magnetic field generating means for generating a magnetic field in said at least one reactive chamber, said magnetic field generating means comprising a plurality of magnetic elements arranged in a circle around said at least one reactive chamber so as to form a ring, each of said magnetic elements having an axis directed to a center of said circle and a magnetization direction, wherein one of said magnetic elements is so disposed that the magnetization direction thereof coincides with the axis thereof, and each of said magnetic elements other than said one magnetic element is so disposed that an angle of the magnetization direction thereof relative to the magnetization direction of said one magnetic element is substantially twice an angle of the axis thereof relative to the axis of said one magnetic element.

Claim 26

Dependent Claim 193 words

A surface processing method comprising the steps of: placing a substrate to be processed on a second electrode disposed opposite to a first electrode in a vacuum container; feeding a predetermined gas into said vacuum container; generating an electric field in a region between said first and second electrodes; and forming a uni-directional magnetic field substantially parallel to a surface of the substrate to be processed by means of a plurality of magnetic elements arranged in a circle around the vacuum container so as to form a ring, each of said magnetic elements having an axis directed to a center of said circle and a magnetization direction, wherein one of said magnetic elements is so disposed that the magnetization direction thereof coincides with the axis thereof, and each of said magnetic elements other than said one magnetic element is so disposed that an angle of the magnetization direction thereof relative to magnetization direction of said one magnetic element is substantially twice of an angle of the axis thereof relative to the axis of said one magnetic element, thereby to induce a plasma within the vacuum container to process the surface of the substrate.

Claim 27

Dependent Claim 193 words

A surface processing method comprising the steps of: placing a substrate to be processed on a second electrode disposed opposite to a first electrode in a vacuum container; feeding a predetermined gas into said vacuum container; generating an electric field in a region between said first and second electrodes; and forming a uni-directional magnetic field substantially parallel to a surface of the substrate to be processed by means of a plurality of magnetic elements arranged in a circle around the vacuum container so as to form a ring, each of said magnetic elements having an axis directed to a center of said circle and a magnetization direction, wherein one of said magnetic elements is so disposed that the magnetization direction thereof coincides with the axis thereof, and each of said magnetic elements other than said one magnetic element is so disposed that an angle of the magnetization direction thereof relative to magnetization direction of said one magnetic element is substantially twice of an angle of the axis thereof relative to the axis of said one magnetic element, thereby to induce a plasma within the vacuum container to process the surface of the substrate.

Claim 28

Dependent Claim 242 words

A plasma generating apparatus comprising: a vacuum container provided with a first electrode and a second electrode disposed opposite to said first electrode, for carrying thereon a substrate to be processed; gas feeding means for feeding a predetermined gas into said vacuum container; evacuating means for maintaining the inside of said container at a reduced pressure; electric field generating means for supplying electric power between said first and second electrodes to generate an electric field in a region between said first and second electrodes; magnetic field generating means for generating a magnetic field in said vacuum container, said magnetic field generating means comprising a plurality of magnetic elements arranged in a circle around said container so as to form a ring, each of said magnetic elements having an axis directed to a center of said circle and a magnetization direction, wherein one of said magnetic elements is so disposed that the magnetization direction thereof coincides with the axis thereof, and each of said magnetic elements other than said one magnetic element is so disposed that an angle of the magnetization direction thereof relative to the magnetization direction of said one magnetic element is substantially twice an angle of the axis thereof relative to the axis of said one magnetic element; and magnetic controlling means for adjusting a strength of the magnetic field generated by the magnetic field generating means by changing the magnetization direction of at least one of said magnetic elements.

Claim 29

Dependent Claim 242 words

A plasma generating apparatus comprising: a vacuum container provided with a first electrode and a second electrode disposed opposite to said first electrode, for carrying thereon a substrate to be processed; gas feeding means for feeding a predetermined gas into said vacuum container; evacuating means for maintaining the inside of said container at a reduced pressure; electric field generating means for supplying electric power between said first and second electrodes to generate an electric field in a region between said first and second electrodes; magnetic field generating means for generating a magnetic field in said vacuum container, said magnetic field generating means comprising a plurality of magnetic elements arranged in a circle around said container so as to form a ring, each of said magnetic elements having an axis directed to a center of said circle and a magnetization direction, wherein one of said magnetic elements is so disposed that the magnetization direction thereof coincides with the axis thereof, and each of said magnetic elements other than said one magnetic element is so disposed that an angle of the magnetization direction thereof relative to the magnetization direction of said one magnetic element is substantially twice an angle of the axis thereof relative to the axis of said one magnetic element; and magnetic controlling means for adjusting a strength of the magnetic field generated by the magnetic field generating means by changing the magnetization direction of at least one of said magnetic elements.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1998-08-21	1999-02-20	1999-08-22	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2002-08-21	2003-02-20	2003-08-22	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2006-08-21	2007-02-20	2007-08-22	$7700.00	Window Closed / Lapsed

Plasma generating device and surface processing device and method for processing wafers in a uniform magnetic field

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