US5442184A
Expired / Lapsed
US
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System and method for semiconductor processing using polarized radiant energy
Assignee: Texas Instruments Inc
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Filing: 1993-12-10
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Granted: 1995-08-15
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Expires: 2013-12-10
Abstract
Abstract An optical lithography system (10) for exposing a layer (12) of radiation sensitive material on a semiconductor wafer (16) is provided. System (10) comprises a source of polarized radiant energy (18), a mask (20) and a lens (22). Radiant energy from a light source (28) is polarized in a predetermined orientation by polarization filter (30). Polarized radiant energy passes through mask (20) and exposes layer (12) in a predetermined pattern. Actuating member (32) may rotate polarization filter (30) to provide more than one orientation for the polarized radiant energy during a single exposure.
Inventors
- 👤 Shane R. Palmer
- 👤 Gong Chen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 00:38
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/7055; G03F7/70566
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
118 words
An optical lithography system for exposing a layer of radiation sensitive material on a semiconductor wafer, said system comprising: a source of polarized radiant energy, said radiant energy polarized in a predetermined orientation; a mask positionable between said source of radiant energy and the wafer, said mask including a plurality of slits, said slits having a length greater than the wavelength of said polarized radiant energy, said polarized radiant energy being positioned so that the direction of polarization of said polarized radiant energy is aligned with at least one of said slits; and a lens for focusing the polarized radiant energy transmitted through the mask on the wafer to expose the radiation sensitive material in a predetermined pattern.
Claim 2
Dependent Claim
118 words
An optical lithography system for exposing a layer of radiation sensitive material on a semiconductor wafer, said system comprising: a source of polarized radiant energy, said radiant energy polarized in a predetermined orientation; a mask positionable between said source of radiant energy and the wafer, said mask including a plurality of slits, said slits having a length greater than the wavelength of said polarized radiant energy, said polarized radiant energy being positioned so that the direction of polarization of said polarized radiant energy is aligned with at least one of said slits; and a lens for focusing the polarized radiant energy transmitted through the mask on the wafer to expose the radiation sensitive material in a predetermined pattern.
Claim 3
Dependent Claim
43 words
The system of claim 1, wherein said source of polarized radiant energy comprises: a source of uniform, unpolarized ultraviolet light; and a polarization filter positionable between said light source and said mask such that said unpolarized light is polarized in a predetermined orientation.
Claim 4
Dependent Claim
56 words
The system of claim 1, wherein said source of polarized radiation energy comprises: a source of uniform, unpolarized ultraviolet light; a polarization filter positionable between said light source and said mask for polarizing said unpolarized light; and an actuating member coupled to said filter for rotating said filter to vary the polarization of said polarized light.
Claim 5
Dependent Claim
71 words
The system of claim 1, wherein said source of polarized radiation energy comprises: a source of uniform, unpolarized ultraviolet light; a polarization filter having an edge, said filter positionable between said light source and said mask for polarizing said unpolarized light; a track coupled to said edge of said polarization filter; and a motor coupled to said track for rotating said polarization filter to vary the polarization of said polarized light.
Claim 6
Dependent Claim
38 words
The system of claim 1, wherein said source of polarized radiation energy comprises: a source of uniform, unpolarized ultraviolet light; and a dichroic polarization filter positionable between said light source and said mask for polarizing said unpolarized light.
Claim 7
Dependent Claim
39 words
The system of claim 1, wherein said source of polarized radiation energy comprises: a source of uniform, unpolarized ultraviolet light; and a half-wave plate polarization filter positionable between said light source and said mask for polarizing said unpolarized light.
Claim 8
Dependent Claim
43 words
The system of claim 1, wherein said source of polarized radiation energy comprises: a source of uniform, unpolarized ultraviolet light; and a polarization filter having a bi-refringent material, said filter positionable between said light source and said mask for polarizing said unpolarized light.
Claim 9
Dependent Claim
38 words
The system of claim 1, wherein said source of polarized radiation energy comprises: a source of uniform, unpolarized ultraviolet light; and a circular polarization filter positionable between said light source and said mask for polarizing said unpolarized light.
Claim 10
Dependent Claim
38 words
The system of claim 1, wherein said source of polarized radiation energy comprises: a source of uniform, unpolarized ultraviolet light; and an elliptical polarization filter positionable between said light source and said mask for polarizing said unpolarized light.
Claim 11
Dependent Claim
23 words
An optical lithography system as in claim 1, wherein said slits are arranged so that the length of said slits are in parallel.
Claim 12
Dependent Claim
114 words
An optical lithography system as in claim 1, wherein said slits include a first subset of said slits arranged so that the length of said first subset of slits are in parallel with each other and a second subset of slits arranged so that the length of said second subset of slits are in parallel with each other and not in parallel with said first subset of slits; and an actuator for changing the polarization of said source of polarized radiant energy to allow the direction of polarization of said source of polarized radiant energy to be aligned with the length of said first subset of slits and then said second subset of slits.
Claim 13
Dependent Claim
126 words
An optical lithography system for exposing a layer of radiation sensitive material on a semiconductor wafer, comprising: a source of uniform, unpolarized ultraviolet light; a polarization filter positionable between said light source and said mask such that said unpolarized light is polarized in a predetermined orientation to provide polarized light; a mask positionable between said light source and the wafer, said mask including a plurality of slits, said slits having a length greater than the wavelength of said polarized light, said polarized light being positioned so that the direction of polarization of said polarized light is aligned with at least one of said slits; and a lens for focusing said polarized light transmitted through the mask on the wafer to expose predetermined portions of the photoresist.
Claim 14
Dependent Claim
126 words
An optical lithography system for exposing a layer of radiation sensitive material on a semiconductor wafer, comprising: a source of uniform, unpolarized ultraviolet light; a polarization filter positionable between said light source and said mask such that said unpolarized light is polarized in a predetermined orientation to provide polarized light; a mask positionable between said light source and the wafer, said mask including a plurality of slits, said slits having a length greater than the wavelength of said polarized light, said polarized light being positioned so that the direction of polarization of said polarized light is aligned with at least one of said slits; and a lens for focusing said polarized light transmitted through the mask on the wafer to expose predetermined portions of the photoresist.
Claim 15
Dependent Claim
30 words
The system of claim 12, wherein said polarization filter further comprises an actuating member coupled to said filter for rotating said filter to vary the polarization of said polarized light.
Claim 16
Dependent Claim
47 words
The system of claim 12, wherein said polarization filter further comprises an edge, said system further comprising a track coupled to said edge of said polarization filter and a motor coupled to said track for rotating said polarization filter to vary the polarization of said polarized light.
Claim 17
Dependent Claim
14 words
The system of claim 12, wherein said polarization filter comprises a dichroic polarization filter.
Claim 18
Dependent Claim
15 words
The system of claim 12, wherein said polarization filter comprises a half-wave plate polarization filter.
Claim 19
Dependent Claim
17 words
The system of claim 12, wherein said polarization filter comprises a polarization filter having a bi-refringent material.
Claim 20
Dependent Claim
14 words
The system of claim 12, wherein said polarization filter comprises a circular polarization filter.
Claim 21
Dependent Claim
14 words
The system of claim 12, wherein said polarization filter .comprises an elliptical polarization filter.
Claim 22
Dependent Claim
23 words
An optical lithography system as in claim 12, wherein said slits are arranged so that the length of said slits are in parallel.
Claim 23
Dependent Claim
114 words
An optical lithography system as in claim 12, wherein said slits include a first subset of said slits arranged so that the length of said first subset of slits are in parallel with each other and a second subset of slits arranged so that the length of said second subset of slits are in parallel with each other and not in parallel with said first subset of slits; and an actuator for changing the polarization of said source of polarized radiant energy to allow the direction of polarization of said source of polarized radiant energy to be aligned with the length of said first subset of slits and then said second subset of slits.
Claim 24
Independent Claim
136 words
A method for exposing a layer of radiation sensitive material on a semiconductor wafer, comprising the steps of: positioning a mask between a source of a radiant energy and the wafer, said mask including a plurality of slit, said slits having a length greater than the wavelength of said radiant energy; positioning a polarization filter between the source of radiant energy and the mask such that unpolarized radiant energy passing through the filter is polarized in a predetermined orientation to provide polarized radiant energy, said polarized radiant energy being positioned so that the direction of polarization of said polarized light is aligned with at least one of said slits; and focusing the polarized radiant energy transmitted through the mask on the wafer using a lens to expose predetermined portions of the layer of radiation sensitive material.
Claim 25
Independent Claim
136 words
A method for exposing a layer of radiation sensitive material on a semiconductor wafer, comprising the steps of: positioning a mask between a source of a radiant energy and the wafer, said mask including a plurality of slit, said slits having a length greater than the wavelength of said radiant energy; positioning a polarization filter between the source of radiant energy and the mask such that unpolarized radiant energy passing through the filter is polarized in a predetermined orientation to provide polarized radiant energy, said polarized radiant energy being positioned so that the direction of polarization of said polarized light is aligned with at least one of said slits; and focusing the polarized radiant energy transmitted through the mask on the wafer using a lens to expose predetermined portions of the layer of radiation sensitive material.
Claim 26
Dependent Claim
41 words
The method of claim 22, and further comprising the step of rotating the polarization filter during the exposure of the layer of radiation sensitive material to align said orientation of polarization of said polarized radiant energy to all of said slits.
References Cited (Backward Citations)
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