US5440394A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Length-measuring device and exposure apparatus
Assignee: Canon Inc
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Filing: 1994-02-09
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Granted: 1995-08-08
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Expires: 2014-02-09
Abstract
Abstract A length measuring device for performing length measurement and an exposure apparatus for performing an exposure operation on a first object having a plurality of alignment patterns thereon, includes an alignment detector for detecting the relative positional relation between the first object and a second object having a plurality of reference alignment patterns used for aligning the first object therewith, and for detecting an alignment condition between the alignment patterns of the first and second objects, a movement device for moving the first and second objects relative to each other, a measurement device for measuring the amount of movement of the movement device, and a length measurement device for performing measurement of the space between the plurality of alignment patterns formed on the first object. The length measurement device performs length measurement on the basis of successive alignment conditions detected by successive alignment condition detection operations of the alignment detector between the plurality of reference alignment patterns on the second object and the plurality of alignment patterns on the first object, as well as the amount of movement of the movement device measured by the measurement device during the successive alignment condition detection operations of the alignment detector.
Inventors
- 👤 Noriyuki Nose
- 👤 Kenji Saito
- 👤 Mitsuaki Amemiya
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 08:03
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70605; G03F7/70616; G03F7/70633; G03F9/00; G03F9/70; G03F9/7003; G03F9/7023; G03F9/7049
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
202 words
A length measuring device for performing length measurement on a first object which is an object to be detected, said first object having a plurality of alignment patterns thereon; said device comprising: alignment detection means for detecting the relative positional relation between the first object and a second object having a plurality of reference alignment patterns used for aligning the first object therewith, said alignment detection means detecting an alignment condition between the alignment patterns of the first and second objects; movement means for moving the first and second objects relative to each other; measurement means for measuring the amount of movement of said movement means; and length measurement means for performing measurement of the space between the plurality of alignment patterns formed on the first object, said length measurement means performing length measurement on the basis of successive alignment conditions detected by successive alignment condition detection operations of said alignment detection means between the plurality of reference alignment patterns on the second object and the plurality of alignment patterns on the first object, as well as the amount of movement of said movement means measured by said measurement means during the successive alignment condition detection operations of said alignment detection means.
Claim 2
Dependent Claim
202 words
A length measuring device for performing length measurement on a first object which is an object to be detected, said first object having a plurality of alignment patterns thereon; said device comprising: alignment detection means for detecting the relative positional relation between the first object and a second object having a plurality of reference alignment patterns used for aligning the first object therewith, said alignment detection means detecting an alignment condition between the alignment patterns of the first and second objects; movement means for moving the first and second objects relative to each other; measurement means for measuring the amount of movement of said movement means; and length measurement means for performing measurement of the space between the plurality of alignment patterns formed on the first object, said length measurement means performing length measurement on the basis of successive alignment conditions detected by successive alignment condition detection operations of said alignment detection means between the plurality of reference alignment patterns on the second object and the plurality of alignment patterns on the first object, as well as the amount of movement of said movement means measured by said measurement means during the successive alignment condition detection operations of said alignment detection means.
Claim 3
Dependent Claim
78 words
The length measuring device according to claim 1, wherein said alignment detection means includes a light source for generating inspection rays of light, and a photo detection element for detecting the inspection rays of light which have passed through at least one alignment pattern on the first object and at least one reference alignment pattern on the second object, said alignment detection means optically detecting the alignment condition between the alignment patterns of the first and second objects.
Claim 4
Dependent Claim
34 words
The length measuring device according to claim 2, wherein said alignment detection means detects the alignment condition from a position on said photo detection element on which the inspection rays of light are incident.
Claim 5
Dependent Claim
34 words
The length measuring device according to claim 2, wherein said alignment detection means detects the alignment condition from the intensity of light of the inspection rays of light incident on said photo detection element.
Claim 6
Dependent Claim
250 words
An exposure apparatus for performing an exposure operation on a first object which is an object to be detected, the first object having a plurality of alignment patterns thereon; said apparatus comprising: alignment detection means for detecting the relative positional relation between the first object and a second object having a plurality of reference alignment patterns used for aligning the first object therewith, said alignment detection means detecting an alignment condition between the alignment patterns on the first and second objects; movement means for moving the first and second objects relative to each other, said movement means performing movement of the first and second objects such that the first and second objects are aligned with each other on the basis of the result of detection by said alignment detection means, wherein an exposure operation is conducted on the aligned first and second objects; measurement means for measuring the amount of movement of said movement means; and length measurement means for performing measurement of the space between the plurality of patterns formed on the first object, said length measurement means performing length measurement on the basis of successive alignment conditions detected by successive alignment condition detection operations of said alignment detection means between the plurality of reference alignment patterns on the second object and the plurality of alignment patterns on the first object, as well as the amount of movement of said movement means measured by said measurement means during the successive alignment condition detection operations of said alignment detection means.
Claim 7
Dependent Claim
250 words
An exposure apparatus for performing an exposure operation on a first object which is an object to be detected, the first object having a plurality of alignment patterns thereon; said apparatus comprising: alignment detection means for detecting the relative positional relation between the first object and a second object having a plurality of reference alignment patterns used for aligning the first object therewith, said alignment detection means detecting an alignment condition between the alignment patterns on the first and second objects; movement means for moving the first and second objects relative to each other, said movement means performing movement of the first and second objects such that the first and second objects are aligned with each other on the basis of the result of detection by said alignment detection means, wherein an exposure operation is conducted on the aligned first and second objects; measurement means for measuring the amount of movement of said movement means; and length measurement means for performing measurement of the space between the plurality of patterns formed on the first object, said length measurement means performing length measurement on the basis of successive alignment conditions detected by successive alignment condition detection operations of said alignment detection means between the plurality of reference alignment patterns on the second object and the plurality of alignment patterns on the first object, as well as the amount of movement of said movement means measured by said measurement means during the successive alignment condition detection operations of said alignment detection means.
Claim 8
Dependent Claim
77 words
The exposure apparatus according to claim 5, wherein said alignment detection means includes a light source for generating inspection rays of light, and a photo detection element for detecting the inspection rays of light which have passed through at least one alignment patterns on the first object and at least one reference alignment pattern on the second object, said alignment detection means optically detecting the alignment condition between the alignment patterns of the first and second objects.
Claim 9
Dependent Claim
33 words
The exposure apparatus according to claim 6, wherein said alignment detection means detects the alignment condition from a position on said photo detection element on which the inspection rays of light are incident.
Claim 10
Dependent Claim
33 words
The exposure apparatus according to claim 6, wherein said alignment detection means detects the alignment condition from the intensity of light of the inspection rays of light incident on said photo detection element.
Claim 11
Dependent Claim
204 words
A length measuring device for performing length measurement on a first object which is an object to be detected, said first object having a plurality of alignment patterns, said device comprising: an alignment detection optical system for detecting the relative positional relation between the first object and a second object having reference alignment patterns used for aligning the first object therewith, said alignment detection optical system optically detecting an alignment condition between the alignment patterns of the first and second objects; a stage for moving the first and second objects relative to each other; a measuring unit for measuring the amount of movement of said stage; and a length measuring unit for performing measurement of the space between the plurality of alignment patterns formed on the first object, said length measuring unit performing length measurement on the basis of successive alignment conditions detected by successive alignment condition detection operations of said alignment detection optical system between the plurality of reference alignment patterns on the second object and the plurality of alignment patterns on the first object, as well as the amount of movement of said stage measured by said measuring unit during the successive alignment condition detection operations of said alignment detection optical system.
Claim 12
Dependent Claim
204 words
A length measuring device for performing length measurement on a first object which is an object to be detected, said first object having a plurality of alignment patterns, said device comprising: an alignment detection optical system for detecting the relative positional relation between the first object and a second object having reference alignment patterns used for aligning the first object therewith, said alignment detection optical system optically detecting an alignment condition between the alignment patterns of the first and second objects; a stage for moving the first and second objects relative to each other; a measuring unit for measuring the amount of movement of said stage; and a length measuring unit for performing measurement of the space between the plurality of alignment patterns formed on the first object, said length measuring unit performing length measurement on the basis of successive alignment conditions detected by successive alignment condition detection operations of said alignment detection optical system between the plurality of reference alignment patterns on the second object and the plurality of alignment patterns on the first object, as well as the amount of movement of said stage measured by said measuring unit during the successive alignment condition detection operations of said alignment detection optical system.
Claim 13
Dependent Claim
205 words
A length measuring apparatus for performing measurement of a space between a plurality of alignment marks on a first object, the plurality of alignment marks comprising at least one pattern, said apparatus comprising: alignment detection means for detecting the relative positional relation between the first object and a second object having reference alignment mark, which comprises at least one pattern, used for aligning the first object therewith, said alignment detection means detecting an alignment condition between the plurality of alignment marks and the reference alignment mark; movement means for moving the first and second objects relative to each other; measurement means for measuring the amount of movement of said movement means; and length measurement means for performing measurement of the space between the plurality of alignment marks formed on the first object, said length measurement means performing length measurement on the basis of successive alignment conditions detected by successive alignment condition detection operations of said alignment detection means between the reference alignment mark on the second object and the plurality of alignment marks on the first object, as well as the amount of movement of said movement means measured by said measurement means during the successive alignment condition detection operations of said alignment detection means.
Claim 14
Dependent Claim
205 words
A length measuring apparatus for performing measurement of a space between a plurality of alignment marks on a first object, the plurality of alignment marks comprising at least one pattern, said apparatus comprising: alignment detection means for detecting the relative positional relation between the first object and a second object having reference alignment mark, which comprises at least one pattern, used for aligning the first object therewith, said alignment detection means detecting an alignment condition between the plurality of alignment marks and the reference alignment mark; movement means for moving the first and second objects relative to each other; measurement means for measuring the amount of movement of said movement means; and length measurement means for performing measurement of the space between the plurality of alignment marks formed on the first object, said length measurement means performing length measurement on the basis of successive alignment conditions detected by successive alignment condition detection operations of said alignment detection means between the reference alignment mark on the second object and the plurality of alignment marks on the first object, as well as the amount of movement of said movement means measured by said measurement means during the successive alignment condition detection operations of said alignment detection means.
Claim 15
Dependent Claim
75 words
The length measuring apparatus according to claim 10, wherein said alignment detection means includes a light source for generating inspection rays of light, and a photo detection element for detecting the inspection rays of light which have passed through the at least one pattern and at least one alignment pattern of the reference alignment mark, said alignment detection means optically detecting the alignment condition between the at least one pattern and the reference alignment mark.
Claim 16
Dependent Claim
34 words
The length measuring apparatus according to claim 11, wherein said alignment detection means detects the alignment condition from a position on said photo detection element on which the inspection rays of light are incident.
Claim 17
Dependent Claim
34 words
The length measuring apparatus according to claim 11, wherein said alignment detection means detects the alignment condition from the intensity of light of the inspection rays of light incident on said photo detection element.
Claim 18
Dependent Claim
248 words
An exposure apparatus for performing an exposure operation on a first object which has a plurality of alignment marks thereon, the plurality of alignment marks comprising at least one pattern, said apparatus comprising; alignment detection means for detecting the relative positional relation between the first object and a second object having a reference alignment mark, which comprises at least one pattern, used for aligning the first object therewith, said alignment detection means detecting an alignment condition between the plurality of alignment marks and the reference alignment mark; movement means for moving the first and second object relative to each other, said movement means performing movement of the first and second objects such that the first and second objects are aligned with each other on the basis of the result of the detection by said alignment detection means, wherein an exposure operation is conducted on the aligned first and second objects; measurement means for measuring the amount of movement of said movement means; and length measurement means for performing measurement of the space between the plurality of alignment marks formed on the first object, said length measurement means performing length measurement on the basis of successive alignment conditions detected by successive alignment condition detection operations of said alignment detection means between the reference alignment mark and the plurality of alignment marks, as well as the amount of movement of said movement means measured by said measurement means during the successive alignment condition detection operations of said alignment detection means.
Claim 19
Dependent Claim
248 words
An exposure apparatus for performing an exposure operation on a first object which has a plurality of alignment marks thereon, the plurality of alignment marks comprising at least one pattern, said apparatus comprising; alignment detection means for detecting the relative positional relation between the first object and a second object having a reference alignment mark, which comprises at least one pattern, used for aligning the first object therewith, said alignment detection means detecting an alignment condition between the plurality of alignment marks and the reference alignment mark; movement means for moving the first and second object relative to each other, said movement means performing movement of the first and second objects such that the first and second objects are aligned with each other on the basis of the result of the detection by said alignment detection means, wherein an exposure operation is conducted on the aligned first and second objects; measurement means for measuring the amount of movement of said movement means; and length measurement means for performing measurement of the space between the plurality of alignment marks formed on the first object, said length measurement means performing length measurement on the basis of successive alignment conditions detected by successive alignment condition detection operations of said alignment detection means between the reference alignment mark and the plurality of alignment marks, as well as the amount of movement of said movement means measured by said measurement means during the successive alignment condition detection operations of said alignment detection means.
Claim 20
Dependent Claim
73 words
The exposure apparatus according to claim 14, wherein said alignment detection means includes a light source for generating inspection rays of light, and a photo detecting element for detecting the inspection rays of light which have passed through the at least one pattern and at least one pattern of the reference alignment mark, said alignment detection means optically detecting the alignment condition between the at least one pattern and the reference alignment mark.
Claim 21
Dependent Claim
33 words
The exposure apparatus according to claim 15, wherein said alignment detection means detects the alignment condition from a position on said photo detection element on which the inspection rays of light are incident.
Claim 22
Dependent Claim
33 words
The exposure apparatus according to claim 15, wherein said alignment detection means detects the alignment condition from the intensity of light of the inspection rays of light incident on said photo detection means.
References Cited (Backward Citations)
WO1986004158A1
Cited
JPS6338102A
Cited
US4918320A
Cited
US4877359A
Cited
JPS6489323A
Cited
JPH01101630A
Cited
JPH01108741A
Cited
JPH01191421A
Cited
JPH01200620A
Cited
US5028797A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-08-07 | 1999-02-06 | 1999-08-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-08-07 | 2003-02-06 | 2003-08-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-08-07 | 2007-02-06 | 2007-08-08 | $7700.00 | Window Closed / Lapsed |