Alignment method usable in a step-and-repeat type exposure apparatus for either global or dye-by-dye alignment

Claim 2

An alignment method usable with a first object having a pattern, a second object having different shot areas, and a projection optical system effective to expose the shot areas of the second object to the pattern of the first object in a step-and-repeat manner, said method aligning in sequence the shot areas of the second object with respect to a projection region upon which the pattern of the first object is projected by the projection optical system, and comprising the steps of: moving the second object in at least one of an X direction and a Y direction before start of the step-and-repeat exposures and making a first measurement, by use of the projection optical system, of a positional error of each of at least two shot areas of the second object with respect to said projection region; rotationally moving the second object in a θ direction in accordance with the first measurement to determine the position of the second object with respect to the θ direction; moving again the second object in at least one of the X direction and the Y direction after determination of the position of the second object with respect to the θ direction and making a second measurement, by use of the projection optical system, of a positional error of each of at least two shot areas of the second object with respect to said projection region; generating and storing information concerning the correct layout position of the shot areas of the second object on the basis of the second measurement; and controlling the movement of the second object in at least one of the X direction and the Y direction at the time of the step-and-repeat exposures, in accordance with the stored information, so as to align in sequence the shot areas of the second object with respect to said projection region.

Claim 3

A method according to claim 1, wherein the first object is rotationally moved in the θ direction in accordance with the first measurement so that positional errors, in the θ direction, of the shot areas of the second object with respect to the pattern of the first object being projected upon said projection region are reduced on the average, whereby the position of the first object with respect to the θ direction is determined.

Claim 4

A method according to claim 1, wherein the information produced in said generating and storing step is generated on the basis of the second measurement and an offset value set in accordance with the designation made at a console.

Claim 5

A method according to claim 1, wherein the first measurement is repeated where a calculated value obtained in accordance with the first measurement is out of a tolerance and after the second object is rotationally moved in the θ direction and wherein the second measurement is effected after the calculated value comes within the tolerance.

Claim 6

A method according to claim 1, wherein said second measurement is repeated where a calculated value obtained in accordance with the second measurement is out of a tolerance and wherein the step-and-repeat exposures of the second object start after the calculated value comes within the tolerance.

Claim 7

An alignment method usable with a first object having a pattern, a second object having different shot areas, and a projection optical system effective to expose the shot areas of the second object to the pattern of the first object in a step-and-repeat manner, said method aligning in sequence the shot areas of the second object with respect to a projection region upon which the pattern of the first object is projected by the projection optical system, and comprising the steps of: moving the second object in at least one of an X direction and a Y direction before start of the step-and-repeat exposures and making a measurement, by use of the projection optical system, of a positional error of each of plural shot areas of the second object with respect to said projection region; producing information concerning variance of positional errors of said plural shot areas on the basis of the measurement and then excluding an extraordinary error from the positional errors by use of the information; and rotationally moving at least one of the first and second objects in a θ direction in accordance with the remainder of the positional errors, not having been excluded, to determine the position of at least one of the first and second objects with respect to the θ direction for the step-and-repeat exposures.

Claim 8

An alignment method usable with a first object having a pattern, a second object having different shot areas, and a projection optical system effective to expose the shot areas of the second object to the pattern of the first object in a step-and-repeat manner, said method aligning in sequence the shot areas of the second object with respect to a projection region upon which the pattern of the first object is projected by the projection optical system, and comprising the steps of: moving the second object in at least one of an X direction and a Y direction before start of the step-and-repeat exposures and making a measurement, by use of the projection optical system, of a positional error of each of plural shot areas of the second object with respect to said projection region; producing information concerning variance of positional errors of said plural shot areas on the basis of the measurement and then excluding an extraordinary error from the positional errors by use of the information; and rotationally moving at least one of the first and second objects in a θ direction in accordance with the remainder of the positional errors, not having been excluded, to determine the position of at least one of the first and second objects with respect to the θ direction for the step-and-repeat exposures.

Claim 9

A method according to claim 6, wherein the measurement is repeated when the number of the excluded positional errors is not less than a predetermined number.

Claim 10

An alignment method usable with a first object having a pattern, a second object having different shot areas, and a projection optical system effective to expose the shot areas of the second object to the pattern of the first object in a step-and-repeat manner, said method aligning in sequence the shot areas of the second object with respect to a projection region upon which the pattern of the first object is projected by said projection optical system, and comprising the steps of: extracting plural shot areas from the shot areas of the second object while satisfying (i) a first condition according to which an outermost circumferential shot area is excluded, (ii) a second condition according to which the following relations are satisfied: V(Sx)≈V(Sy), V(θx)≈V(θy) and V(βx)≈V(βy) wherein Sx and Sy are translational components, in X and Y directions, of positional errors which will be detected with respect to those shot areas when they are selected as the subject of measurement, θx and θy are rotational components of the positional errors, βx and βy are expansion coefficients, and V denotes variance, and (iii) a third condition according to which the total of the variances concerning the translational components, the rotational components and the expansion coefficients is made a minimum; and moving the second object before start of the stop-and-repeat exposures and detecting a positional error, by use of the projection optical system and with respect to said projection region, of a shot area extracted from the shot areas of the second object so as to determine the position of at least one of the first and second objects for the step-and-repeat exposures.

Claim 11

An alignment method usable with a first object having a pattern, a second object having different shot areas, and a projection optical system effective to expose the shot areas of the second object to the pattern of the first object in a step-and-repeat manner, said method aligning in sequence the shot areas of the second object with respect to a projection region upon which the pattern of the first object is projected by said projection optical system, and comprising the steps of: extracting plural shot areas from the shot areas of the second object while satisfying (i) a first condition according to which an outermost circumferential shot area is excluded, (ii) a second condition according to which the following relations are satisfied: V(Sx)≈V(Sy), V(θx)≈V(θy) and V(βx)≈V(βy) wherein Sx and Sy are translational components, in X and Y directions, of positional errors which will be detected with respect to those shot areas when they are selected as the subject of measurement, θx and θy are rotational components of the positional errors, βx and βy are expansion coefficients, and V denotes variance, and (iii) a third condition according to which the total of the variances concerning the translational components, the rotational components and the expansion coefficients is made a minimum; and moving the second object before start of the stop-and-repeat exposures and detecting a positional error, by use of the projection optical system and with respect to said projection region, of a shot area extracted from the shot areas of the second object so as to determine the position of at least one of the first and second objects for the step-and-repeat exposures.

Claim 12

A method according to claim 8, wherein a shot area of the second object which is in the neighborhood of the center of the second object is not extracted as the subject of measurement.

Claim 13

A method according to claim 8, wherein, where the i-th coordinate on the second object is denoted by (x i , y i ) and where i is any one of 1 to N, the extraction is made so as to approximately satisfy the following relations: ##EQU3## and also to minimize W' which is given by the following equation: ##EQU4##

Claim 14

An alignment method usable with a first object having a pattern, a second object having different shot areas, and a projection optical system usable to expose the shot areas of the second object to the pattern of the first object in a step-and-repeat manner, said method aligning in sequence the shot areas of the second object with respect to a projection region upon which the pattern of the first object is projected by said projection optical system, and comprising the steps of: moving the second object in at least one of an X direction and a Y direction before start of the step-and-repeat exposures and making a first measurement of a positional error, by use of the projection optical system and with respect to the first object, of each of plural shot areas when it is placed at said projection region; rotationally moving at least one of the first and second objects in a θ direction in accordance with the first measurement to determine the position of at least one of the first and second objects with respect to the θ direction; moving again the second object in at least one of the X direction and the Y direction after determination of the position of said at least one of the first and second objects with respect to the θ direction and making a second measurement of a positional error, by use of the projection optical system and with respect to the first object, of each of plural shot areas when it is placed at said projection region; generating and storing information concerning the correct layout positions of the shot areas on the second object in accordance with the second measurement; and controlling the movement of the second object in at least one of the X direction and the Y direction for the step-and-repeat exposures, in accordance with the generated and stored information, so as to bring one by one by the shot areas of the second object to said projection region, and effecting a third measurement for detecting a positional error, with respect to the first object, of such a shot area that has been brought to said projection region and, thereafter, controlling the movement of the first object in at least one of the X direction and the Y direction in accordance with the third measurement.

Claim 15

An alignment method usable with a first object having a pattern, a second object having different shot areas, and a projection optical system usable to expose the shot areas of the second object to the pattern of the first object in a step-and-repeat manner, said method aligning in sequence the shot areas of the second object with respect to a projection region upon which the pattern of the first object is projected by said projection optical system, and comprising the steps of: moving the second object in at least one of an X direction and a Y direction before start of the step-and-repeat exposures and making a first measurement of a positional error, by use of the projection optical system and with respect to the first object, of each of plural shot areas when it is placed at said projection region; rotationally moving at least one of the first and second objects in a θ direction in accordance with the first measurement to determine the position of at least one of the first and second objects with respect to the θ direction; moving again the second object in at least one of the X direction and the Y direction after determination of the position of said at least one of the first and second objects with respect to the θ direction and making a second measurement of a positional error, by use of the projection optical system and with respect to the first object, of each of plural shot areas when it is placed at said projection region; generating and storing information concerning the correct layout positions of the shot areas on the second object in accordance with the second measurement; and controlling the movement of the second object in at least one of the X direction and the Y direction for the step-and-repeat exposures, in accordance with the generated and stored information, so as to bring one by one by the shot areas of the second object to said projection region, and effecting a third measurement for detecting a positional error, with respect to the first object, of such a shot area that has been brought to said projection region and, thereafter, controlling the movement of the first object in at least one of the X direction and the Y direction in accordance with the third measurement.

Claim 16

A method according to claim 11, wherein whether or not the third measurement is to be executed is determined in accordance with the second measurement.

Claim 17

An alignment method, usable with a first object having a pattern and a second object having different shot areas, for aligning in sequence the shot areas of the second object with respect to the first object, said method comprising the steps of: moving the second object in at least one of an X direction and a Y direction before start of step-and-repeat exposures and making a first measurement of a positional error of each of at least two shot areas of the second object with respect to the first object; rotationally moving the second object in a θ direction in accordance with the first measurement to determine the position of the second object with respect to the θ direction; moving again the second object in at least one of the X direction and the Y direction after determination of the position of the second object with respect to the θ direction and effecting a second measurement of a positional error with respect to the first object; generating and storing information concerning the correct layout positions of the shot areas of the second object on the basis of the second measurement; and controlling the movement of the second object in at least one of the X direction and the Y direction at the time of the step-and-repeat exposures, in accordance with the generated and stored information, so as to align in sequence the shot areas of the second object with respect to the first object.

Claim 18

An alignment method, usable with a first object having a pattern and a second object having different shot areas, for aligning in sequence the shot areas of the second object with respect to the first object, said method comprising the steps of: moving the second object in at least one of an X direction and a Y direction before start of step-and-repeat exposures and making a first measurement of a positional error of each of at least two shot areas of the second object with respect to the first object; rotationally moving the second object in a θ direction in accordance with the first measurement to determine the position of the second object with respect to the θ direction; moving again the second object in at least one of the X direction and the Y direction after determination of the position of the second object with respect to the θ direction and effecting a second measurement of a positional error with respect to the first object; generating and storing information concerning the correct layout positions of the shot areas of the second object on the basis of the second measurement; and controlling the movement of the second object in at least one of the X direction and the Y direction at the time of the step-and-repeat exposures, in accordance with the generated and stored information, so as to align in sequence the shot areas of the second object with respect to the first object.