Patent US5439753A successfully refreshed from Google Patents.
US5439753A
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Electron emissive film
Assignee: Motorola Solutions Inc
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Filing: 1994-10-03
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Granted: 1995-08-08
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Expires: 2014-10-03
Abstract
Abstract A method for making an electron emissive film is provided. A substrate and a reaction chamber having a temperature and a pressure is provided. The temperature and the pressure are adjusted to a desired temperature and a desired pressure. A substrate is place into the reaction chamber with hydrocarbon gas being flowed into the chamber. A plasma is ignited in the reaction chamber so as to form a tetrahedral shaped compound in the reaction chamber which aids in deposition of an electron emissive material on the substrate.
Inventors
- 👤 Stephen P. Rogers
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 01:26
CPC Classifications
H; H01; H01J; H01J1/00; H01J1/02; H01J1/30; C; C23; C23C; C23C16/00; C23C16/22; C23C16/26; C23C16/02; C23C16/44; C23C16/50; C30; C30B; C30B25/00; C30B25/02; C30B25/10; C30B25/105; Y; Y10; Y10S; Y10S427/00; Y10S427/103
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
92 words
A method for making an electron emissive film comprising the steps of: providing a substrate; providing a plasma reactor having a reaction chamber, the reaction chamber having a temperature and a pressure, wherein the temperature and the pressure are adjustably controlled to a desired temperature and a desired pressure; placing the substrate in the reaction chamber; flowing gases that include a hydrocarbon gas into the reaction chamber; igniting a plasma in the plasma reactor; forming a tetrahedral shaped compound in the plasma reactor; and depositing an electron emissive film on the substrate.
Claim 2
Independent Claim
92 words
A method for making an electron emissive film comprising the steps of: providing a substrate; providing a plasma reactor having a reaction chamber, the reaction chamber having a temperature and a pressure, wherein the temperature and the pressure are adjustably controlled to a desired temperature and a desired pressure; placing the substrate in the reaction chamber; flowing gases that include a hydrocarbon gas into the reaction chamber; igniting a plasma in the plasma reactor; forming a tetrahedral shaped compound in the plasma reactor; and depositing an electron emissive film on the substrate.
Claim 3
Dependent Claim
31 words
A method for making an electron emissive film as claimed in claim 1 where, in the step of providing the reaction chamber, the reaction chamber is a parallel plate reaction chamber.
Claim 4
Dependent Claim
26 words
A method for making an electron emissive film as claimed in claim 1 where, in the step of providing the substrate, the substrate is a dielectric.
Claim 5
Dependent Claim
27 words
A method for making an electron emissive diamond film as claimed in claim 1 where, in the step of providing a substrate, the substrate is a conductor.
Claim 6
Dependent Claim
60 words
A method for making an electron emissive film as claimed in claim 1 where, in the step of flowing the hydrocarbon gas, the hydrocarbon gas is selected from a group comprising: methane, ethane, propane, butane, trimethyl gallium, triethyl gallium, trimethyl indium, triethyl indium, tetramethyl germanium, tetraethyl germanium, tetramethyl tin, tetraethyl tin, trimethyl boron, triethyl boron, trimethyl aluminum, and triethyl aluminum.
Claim 7
Dependent Claim
48 words
A method for making an electron emissive film as claimed in claim 1 where, in the step of forming a tetrahedral compound in the reaction chamber, the tetrahedral compound is formed by introducing a trace amount of material from a group consisting of: gallium, indium, tin, and germanium.
Claim 8
Dependent Claim
40 words
A method for making an electron emissive film as claimed in claim 1 where, in the step of providing the plasma reactor with the reaction chamber, the desired temperature is adjusted to a range from 0.0 to 600.0 degrees Celsius.
Claim 9
Dependent Claim
29 words
A method for making an electron emissive film as claimed in claim 7 wherein the desired temperature is adjusted to a preferable range from 0.0 to 80.0 degrees Celsius.
Claim 10
Dependent Claim
27 words
A method for making an electron emissive film as claimed in claim 8 wherein the desired temperature is adjusted to a nominal temperature of 20.0 degrees Celsius.
Claim 11
Dependent Claim
40 words
A method for making an electron emissive film as claimed in claim 1 where, in the step of providing the plasma reactor with the reaction chamber, the desired pressure is adjusted within a range from 1.0 millitorr to 5.0 torr.
Claim 12
Dependent Claim
29 words
A method for making an electron emissive film as claimed in claim 10 wherein the desired pressure is adjusted to a preferable range from 12.0 millitorr to 100.0 millitorr.
Claim 13
Dependent Claim
29 words
A method for making an electron emissive film as claimed in claim 11 where in the desired pressure is adjusted to a nominal range from 15.0 to 20.0 millitorr.
Claim 14
Independent Claim
145 words
A method for making an electron emissive material comprising the steps of: providing a substrate; providing a plasma chemical vapor deposition system having a reaction chamber, the plasma chemical vapor deposition system including a susceptor in the reaction chamber for holding the substrate, a temperature controlling system to adjust the substrate to a desired temperature ranging from 10.0 to 80.0 degrees Celsius, and a pressure controlling system to adjust the reaction chamber to a desired pressure ranging from 10.0 millitorr to 100.0 millitorr; placing the substrate on the susceptor of the reaction chamber; flowing a hydrocarbon gas, a hydrogen gas, and an argon gas into the reaction chamber; generating a plasma in the reaction chamber of the plasma chemical vapor deposition system to form a tetrahedral shaped compound that seeds the reaction chamber and the substrate; and depositing an electron emissive film on the substrate.
Claim 15
Independent Claim
145 words
A method for making an electron emissive material comprising the steps of: providing a substrate; providing a plasma chemical vapor deposition system having a reaction chamber, the plasma chemical vapor deposition system including a susceptor in the reaction chamber for holding the substrate, a temperature controlling system to adjust the substrate to a desired temperature ranging from 10.0 to 80.0 degrees Celsius, and a pressure controlling system to adjust the reaction chamber to a desired pressure ranging from 10.0 millitorr to 100.0 millitorr; placing the substrate on the susceptor of the reaction chamber; flowing a hydrocarbon gas, a hydrogen gas, and an argon gas into the reaction chamber; generating a plasma in the reaction chamber of the plasma chemical vapor deposition system to form a tetrahedral shaped compound that seeds the reaction chamber and the substrate; and depositing an electron emissive film on the substrate.
Claim 16
Dependent Claim
26 words
A method for making an electron emissive material as claimed in claim 13 where, in the step of providing a substrate, the substrate is a dielectric.
Claim 17
Dependent Claim
27 words
A method for making an electron emissive material layer as claimed in claim 13 where, in the step of providing a substrate, the substrate is a conductor.
Claim 18
Dependent Claim
27 words
A method for making an electron emissive material layer as claimed in claim 13 where, in the step of providing a substrate, the substrate is a semiconductor.
Claim 19
Dependent Claim
62 words
A method for making an electron emissive material layer as claimed in claim 13 where, in the step of flowing a hydrocarbon gas, the hydrocarbon gas is selected from a group comprising of methane, ethane, propane, butane, trimethyl gallium, triethyl gallium, trimethyl indium, triethyl indium, tetramethyl germanium, tetraethyl germanium, tetramethyl tin, tetraethyl tin, trimethyl boron, triethyl boron, trimethyl aluminum, and triethyl aluminum.
Claim 20
Dependent Claim
48 words
A method for making an electron emissive material layer as claimed in claim 13 where, in the step of generating a plasma in the reaction chamber, the tetrahedral shaped compound is formed by having a trace amount of material from a group comprising gallium, indium, tin, and geranium.
Claim 21
Dependent Claim
26 words
A method for making an electron emissive diamond like material layer as claimed in claim 13 wherein the desired temperature is adjusted to 20.0 degrees Celsius.
Claim 22
Dependent Claim
30 words
A method for making an electron emissive diamond like material layer as claimed in claim 13 wherein the desired pressure is adjusted to a range from 15.0 to 20 millitorr.
Claim 23
Independent Claim
159 words
A method for making an electron emissive material comprising the steps of: providing a substrate having a surface with a layer adhered thereto; providing a plasma chemical vapor deposition system having a reaction chamber, the plasma chemical vapor deposition system including a susceptor in the reaction chamber for holding the substrate, a temperature controlling system to adjust the substrate to a desired temperature ranging from 10.0 to 80.0 degrees Celsius, and a pressure controlling system to adjust the reaction chamber to a desired pressure ranging from 10.0 millitorr to 100.0 millitorr; placing the substrate in the reaction chamber of the plasma chemical vapor deposition system; flowing a hydrocarbon gas into the reaction chamber; generating a plasma in the reaction chamber of the plasma chemical vapor deposition system; inducing a tetrahedral conformational compound from the layer on the surface of the substrate so as to seed the surface of the substrate; and depositing an electron emissive material on the substrate.
Claim 24
Independent Claim
159 words
A method for making an electron emissive material comprising the steps of: providing a substrate having a surface with a layer adhered thereto; providing a plasma chemical vapor deposition system having a reaction chamber, the plasma chemical vapor deposition system including a susceptor in the reaction chamber for holding the substrate, a temperature controlling system to adjust the substrate to a desired temperature ranging from 10.0 to 80.0 degrees Celsius, and a pressure controlling system to adjust the reaction chamber to a desired pressure ranging from 10.0 millitorr to 100.0 millitorr; placing the substrate in the reaction chamber of the plasma chemical vapor deposition system; flowing a hydrocarbon gas into the reaction chamber; generating a plasma in the reaction chamber of the plasma chemical vapor deposition system; inducing a tetrahedral conformational compound from the layer on the surface of the substrate so as to seed the surface of the substrate; and depositing an electron emissive material on the substrate.
Claim 25
Dependent Claim
28 words
An electron emissive film comprising: a substrate having a surface; and an electron emissive film having disjoint small domains of carbon with sp3 bonding disposed on the substrate.
Claim 26
Dependent Claim
28 words
An electron emissive film comprising: a substrate having a surface; and an electron emissive film having disjoint small domains of carbon with sp3 bonding disposed on the substrate.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-08-07 | 1999-02-06 | 1999-08-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-08-07 | 2003-02-06 | 2003-08-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-08-07 | 2007-02-06 | 2007-08-08 | $7700.00 | Window Closed / Lapsed |