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Protective electronic coatings using filled polysilazanes

Assignee: Dow Silicones Corp
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Filing: 1994-04-01
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Granted: 1995-07-25
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Expires: 2014-04-01
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Abstract

Abstract The present invention relates to a method of forming protective coatings on electronic substrates and the substrates coated thereby. The method comprises applying a coating comprising a polysilazane and a filler on a substrate and heating the coated substrate at a temperature sufficient to convert the polysilazane to a ceramic.

Inventors

  • 👤 Loren A. Haluska
  • 👤 Keith W. Michael

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 23:09
CPC Classifications
H; H10; H10W; H10W74/00; H10W74/40; H10W74/43; C; C04; C04B; C04B35/00; C04B35/622; C04B35/62222; C23; C23C; C23C24/00; C23C24/08; C23C26/00; H10P; H10P14/00; H10P14/60; H10W42/00; H10W42/40; H10P14/63; H10P14/6326; H10P14/6342

Claims Analysis

Total Claims: 19
Claim 1
Independent Claim 47 words
A method of forming a protective coating on an electronic substrate comprising: applying a coating composition comprising effective filler forming amounts of a polysilazane and a filler onto an electronic substrate; and heating the coated substrate at a temperature sufficient to convert the polysilazane into a ceramic.
Claim 2
Independent Claim 47 words
A method of forming a protective coating on an electronic substrate comprising: applying a coating composition comprising effective filler forming amounts of a polysilazane and a filler onto an electronic substrate; and heating the coated substrate at a temperature sufficient to convert the polysilazane into a ceramic.
Claim 3
Dependent Claim 39 words
The method of claim 1 wherein the coating composition is applied to the substrate by a process which comprises coating the substrate with a liquid mixture comprising a solvent, the polysilazane and the filler and then evaporating the solvent.
Claim 4
Dependent Claim 26 words
The method of claim 2 wherein said liquid mixture is coated onto the substrate by spray coating, dip coating, flow coating, spin coating or silk screening.
Claim 5
Dependent Claim 32 words
The method of claim 2 wherein the coated substrate is heated at a temperature in the range of between about 50° C. and about 800° C. for less than about 3 hours.
Claim 6
Dependent Claim 41 words
The method of claim 2 wherein the coated substrate is heated in an environment containing one or more compounds selected from the group consisting of air, O 2 , oxygen plasma, an inert gas, ammonia, amines, moisture, and N 2 O.
Claim 7
Dependent Claim 20 words
The method of claim 1 wherein the coating composition also contains a material which modifies the surface of the filler.
Claim 8
Dependent Claim 14 words
The method of claim 1 wherein the coating composition also contains a suspending agent.
Claim 9
Dependent Claim 23 words
The method of claim 1 wherein the filler is in a form selected from the group consisting of powders, particles, flakes and microballoons.
Claim 10
Dependent Claim 17 words
The method of claim 1 wherein the filler has a particle size less than about 500 micrometers.
Claim 11
Dependent Claim 23 words
The method of claim 1 wherein the filler is present in the coating composition in an amount less than about 90 weight percent.
Claim 12
Dependent Claim 16 words
The method of claim 1 wherein the ceramic coating has a dielectric constant less than 8.
Claim 13
Dependent Claim 16 words
The method of claim 1 wherein the ceramic coating has a dielectric constant greater than 12.
Claim 14
Dependent Claim 26 words
The method of claim 1 wherein the filler is selected from the group consisting of the oxides, nitrides, borides and carbides of a metal or non-metal.
Claim 15
Dependent Claim 24 words
The method of claim 12 wherein the filler is selected from the group consisting of the titanate, niobate or tungstate salts of a metal.
Claim 16
Dependent Claim 12 words
The method of claim 1 wherein the filler is a radiopaque filler.
Claim 17
Dependent Claim 13 words
The method of claim 1 wherein the filler is an optically opaque filler.
Claim 18
Dependent Claim 12 words
The method of claim 1 wherein the filler is a tamperproof filler.
Claim 19
Dependent Claim 9 words
The substrate coated by the method of claim 1.

References Cited (Backward Citations)

US5176941A Cited
JPH01221466A Cited
JPH0352287A Cited
JPH03250082A Cited
WO1993002472A1 Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1998-07-24 1999-01-23 1999-07-25 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2002-07-24 2003-01-23 2003-07-25 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2006-07-24 2007-01-23 2007-07-25 $7700.00 Window Closed / Lapsed

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