Patent US5436029A successfully refreshed from Google Patents.
US5436029A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Curing silicon hydride containing materials by exposure to nitrous oxide
Assignee: Dow Silicones Corp
•
Filing: 1992-12-21
•
Granted: 1995-07-25
•
Expires: 2012-12-21
Abstract
Abstract The present invention relates to a low temperature method of forming silica-containing ceramic coatings on substrates. The method involves applying a coating comprising a silicon hydride containing resin on a substrate and heating the coated substrate under an environment comprising nitrous oxide at a temperature sufficient to convert the resin to the silica-containing ceramic coating. This method is especially valuable for forming protective and dielectric coatings on electronic devices.
Inventors
- 👤 David S. Ballance
- 👤 Marie N. Eckstein
- 👤 Mark J. Loboda
- 👤 Keith W. Michael
- 👤 Liberty B. Shelton
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 07:24
CPC Classifications
H; H10; H10W; H10W99/00; C; C04; C04B; C04B41/00; C04B41/45; C04B41/4505; C04B41/455; C04B41/4554; C04B41/50; C04B41/5025; C04B41/5035; H10P; H10P14/00; H10P14/60; H10P14/65; H10P14/6516; H10P14/6529; H10W74/00; H10W74/40; H10W74/47; H10W74/476; C04B2111/00; C04B2111/00474; C04B2111/00844; H10P14/63; H10P14/6326; H10P14/6342; H10P14/66; H10P14/668; H10P14/6681; H10P14/6684; H10P14/6686; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
116 words
A method of forming a silica-containing ceramic coating on a substrate comprising: applying a coating comprising a silicon hydride resin of the structure (SiO 2 ) x (RSiO 3/2 ) y (R 2 SiO) z on the substrate, wherein R independently comprises hydrogen or a hydrocarbon of 1 to 20 carbon atoms, y is a mole fraction between about 0.05 and 1, and x and z are mole fractions between about 0 and about 0.95, with the proviso that at least about 20% of the R groups are hydrogen; and heating the coated substrate in an atmosphere comprising nitrous oxide at a temperature sufficient to convert the silicon hydride resin coating to a silica-containing ceramic coating.
Claim 2
Independent Claim
116 words
A method of forming a silica-containing ceramic coating on a substrate comprising: applying a coating comprising a silicon hydride resin of the structure (SiO 2 ) x (RSiO 3/2 ) y (R 2 SiO) z on the substrate, wherein R independently comprises hydrogen or a hydrocarbon of 1 to 20 carbon atoms, y is a mole fraction between about 0.05 and 1, and x and z are mole fractions between about 0 and about 0.95, with the proviso that at least about 20% of the R groups are hydrogen; and heating the coated substrate in an atmosphere comprising nitrous oxide at a temperature sufficient to convert the silicon hydride resin coating to a silica-containing ceramic coating.
Claim 3
Dependent Claim
14 words
The method of claim 1 wherein the silicon hydride resin comprises hydrogen silsesquioxane resin.
Claim 4
Dependent Claim
20 words
The method of claim 1 wherein the silicon hydride resin comprises (HSiO 3/2 ) y (H 2 SiO) z .
Claim 5
Dependent Claim
38 words
The method of claim 2 wherein-the hydrogen silsesquioxane resin is applied to the substrate by a process which comprises coating the substrate with a solution comprising a solvent and the hydrogen silsesquioxane resin and then evaporating the solvent.
Claim 6
Dependent Claim
12 words
The method of claim 4 wherein the substrate is an electronic device.
Claim 7
Dependent Claim
23 words
The method of claim 4 wherein said solution is coated onto the substrate by spray coating, dip coating, flow coating or spin coating.
Claim 8
Dependent Claim
33 words
The method of claim 1 wherein the coated substrate is heated at a temperature in the range of between about 100° C. and about 600° C. for between about 1 and 3 hours.
Claim 9
Dependent Claim
34 words
The method of claim 2 wherein the hydrogen silsesquioxane resin is fractionated into polymeric species such that at least 75% of the polymeric species have a molecular weight between about 1200 and about 100,000.
Claim 10
Dependent Claim
23 words
The method of claim 2 wherein the resin contains residual Si--OH and Si--OR' bonds, wherein R' comprises a hydrocarbon of 1-20 carbon atoms.
Claim 11
Dependent Claim
81 words
The method of claim 1 wherein the silicon hydride resin coating also contains modifying ceramic oxide precursors comprising a compound containing an element selected from the group consisting of titanium, zirconium, aluminum, tantalum, vanadium, niobium, boron and phosphorous wherein the compound contains at least one hydrolyzable substituent selected from the group consisting of alkoxy or acyloxy and the compound is present in an amount such that the silica containing ceramic coating contains 0.1 to 30 percent by weight modifying ceramic oxide.
Claim 12
Dependent Claim
36 words
The method of claim 1 wherein the silicon hydride resin coating also contains a platinum or rhodium catalyst in an amount of between about 5 and about 500 ppm platinum based on the weight of resin.
Claim 13
Dependent Claim
14 words
The method of claim 1 wherein the silicon hydride resin coating also contains fillers.
Claim 14
Dependent Claim
14 words
The method of claim 1 wherein the heating atmosphere also contains an inert gas.
Claim 15
Dependent Claim
15 words
The method of claim 1 wherein the heating atmosphere also contains an additional reactive gas.
Claim 16
Dependent Claim
13 words
The method of claim 1 wherein the heating atmosphere also contains water vapor.
Claim 17
Dependent Claim
28 words
The method of claim 1 wherein the coated substrate is first heated in an inert environment to allow the coating to flow and then in the nitrous oxide.
Claim 18
Dependent Claim
22 words
The method of claim 1 wherein the coated substrate is only exposed to the nitrous oxide during a portion of the heating.
References Cited (Backward Citations)
US3615272A
Cited
US4756977A
Cited
US4847162A
Cited
US4999397A
Cited
US5010159A
Cited
US5116637A
Cited
US5063267A
Cited
US5145723A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-07-24 | 1999-01-23 | 1999-07-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-07-24 | 2003-01-23 | 2003-07-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-07-24 | 2007-01-23 | 2007-07-25 | $7700.00 | Window Closed / Lapsed |