US5433787A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for forming deposited film including light transmissive diffusion plate
Assignee: Canon Inc
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Filing: 1992-12-09
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Granted: 1995-07-18
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Expires: 2012-12-09
Abstract
Abstract A deposited film-forming apparatus comprises a reaction chamber, a supporting member provided in the reaction chamber for holding a substrate, a plasma generating chamber adjacent to the reaction chamber with interposition of a light-transmissive perforated diffusion plate wherein at least a part of the plasma generating chamber is made of a light-transmissive member, a plasma-generation means for generating plasma in the plasma generating chamber, a first gas-introduction means for introducing a gas into the reaction chamber, a second gas-introduction means for introducing another gas into the plasma generating chamber, an evacuation means for evacuating the reaction chamber and the plasma generating chamber, and a light source provided outside the plasma generating chamber for irradiating light to the substrate held on the supporting member through the plasma generating chamber and the perforated diffusion plate, wherein the perforated diffusion plate has a light-scattering diffusion face at least at the side of the reaction chamber.
Inventors
- 👤 Nobumasa Suzuki
- 👤 Senichi Hayashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:41
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45563; C23C16/45565; C23C16/48; C23C16/482; C23C16/50; C23C16/517
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
176 words
A deposited film-forming apparatus comprising: a reaction chamber; 2 a supporting member provided in the reaction chamber for holding a substrate; a plasma generating chamber adjacent to the reaction chamber, where at least a part of the plasma generating chamber is made of a light transmissive member; a light transmissive perforated diffusion plate provided between the reaction chamber and the plasma generating chamber to permit the reaction chamber and plasma generating chambers to communicate with each other; a plasma-generation means for generating plasma in the plasma generating chamber; a first gas-introduction means for introducing a gas into the reaction chamber; a second gas-introduction means for introducing another gas into the plasma generating chamber; an evacuation means for evacuating the reaction chamber and the plasma generating chamber; and a light source provided outside the plasma generating chamber for irradiating light to the substrate held on the supporting member through the plasma generating chamber and the perforated diffusion plate, wherein the perforated diffusion plate has a light-scattering diffusion face at least at the side of the reaction chamber.
Claim 2
Dependent Claim
176 words
A deposited film-forming apparatus comprising: a reaction chamber; 2 a supporting member provided in the reaction chamber for holding a substrate; a plasma generating chamber adjacent to the reaction chamber, where at least a part of the plasma generating chamber is made of a light transmissive member; a light transmissive perforated diffusion plate provided between the reaction chamber and the plasma generating chamber to permit the reaction chamber and plasma generating chambers to communicate with each other; a plasma-generation means for generating plasma in the plasma generating chamber; a first gas-introduction means for introducing a gas into the reaction chamber; a second gas-introduction means for introducing another gas into the plasma generating chamber; an evacuation means for evacuating the reaction chamber and the plasma generating chamber; and a light source provided outside the plasma generating chamber for irradiating light to the substrate held on the supporting member through the plasma generating chamber and the perforated diffusion plate, wherein the perforated diffusion plate has a light-scattering diffusion face at least at the side of the reaction chamber.
Claim 3
Dependent Claim
26 words
A deposited film-forming apparatus according to claim 1, wherein the plasma generating chamber is cylindrical and the side wall thereof is constructed from a quartz tube.
Claim 4
Dependent Claim
58 words
A deposited film-forming apparatus according to claim 1, wherein the perforated diffusion plate has through-holes which are not larger than 3 mm in diameter, and wherein the number of holes is selected so that the opening area ratio of the through-holes is from about 1% to about 5%, based on the whole area of the perforated diffusion plate.
Claim 5
Dependent Claim
29 words
A deposited film-forming apparatus according to claim 1, wherein the plasma generation means applies a high frequency or a microwave power to the inside of the plasma generating chamber.
Claim 6
Dependent Claim
146 words
A deposited film-forming apparatus comprising: a reaction chamber; a supporting member provided in the reaction chamber for holding a substrate; a purge chamber adjacent to the reaction chamber, at least a part of the purge chamber being made of a light-transmissive member; a light-transmissive perforated diffusion plate having at least one light-scattering face provided between the reaction chamber and the purge chamber to permit the reaction and purge chambers to communicate with each other; a first gas-introduction means provided inside the perforated diffusion plate for introducing a depositable gas into the reaction chamber; a second gas-introduction means for introducing non-depositable gas into the purge chamber; an evacuation means for evacuating the reaction chamber and the purge chamber; and a light source provided outside the purge chamber for irradiating light to the substrate held on the supporting member through the purge chamber and the perforated diffusion plate.
Claim 7
Dependent Claim
146 words
A deposited film-forming apparatus comprising: a reaction chamber; a supporting member provided in the reaction chamber for holding a substrate; a purge chamber adjacent to the reaction chamber, at least a part of the purge chamber being made of a light-transmissive member; a light-transmissive perforated diffusion plate having at least one light-scattering face provided between the reaction chamber and the purge chamber to permit the reaction and purge chambers to communicate with each other; a first gas-introduction means provided inside the perforated diffusion plate for introducing a depositable gas into the reaction chamber; a second gas-introduction means for introducing non-depositable gas into the purge chamber; an evacuation means for evacuating the reaction chamber and the purge chamber; and a light source provided outside the purge chamber for irradiating light to the substrate held on the supporting member through the purge chamber and the perforated diffusion plate.
Claim 8
Dependent Claim
150 words
A deposited film-forming apparatus comprising: a reaction chamber; a supporting member provided in the reaction chamber for holding a substrate; a plasma generating chamber adjacent to the reaction chamber, at least a part of the plasma generating chamber being made of a light-transmissive member; least one light-scattering face provided between the reaction chamber and the plasma generating chamber to permit the reaction and plasma generating chambers to communicate with each other; a plasma generation means for generating plasma in the plasma generating chamber; a gas introduction means provided inside the perforated diffusion plate for introducing a gas into the reaction chamber or the plasma generating chamber; an evacuation means for evacuating the reaction chamber and the plasma generating chamber and a light source provided outside the plasma generating chamber for irradiating light to the substrate held on the supporting member through the plasma generating chamber and the perforated diffusion plate.
Claim 9
Dependent Claim
150 words
A deposited film-forming apparatus comprising: a reaction chamber; a supporting member provided in the reaction chamber for holding a substrate; a plasma generating chamber adjacent to the reaction chamber, at least a part of the plasma generating chamber being made of a light-transmissive member; least one light-scattering face provided between the reaction chamber and the plasma generating chamber to permit the reaction and plasma generating chambers to communicate with each other; a plasma generation means for generating plasma in the plasma generating chamber; a gas introduction means provided inside the perforated diffusion plate for introducing a gas into the reaction chamber or the plasma generating chamber; an evacuation means for evacuating the reaction chamber and the plasma generating chamber and a light source provided outside the plasma generating chamber for irradiating light to the substrate held on the supporting member through the plasma generating chamber and the perforated diffusion plate.
Claim 10
Dependent Claim
29 words
A deposited film-forming apparatus according to claim 6, wherein the plasma generation means applies a high frequency or a microwave power to the inside of the plasma generating chamber.
Claim 11
Dependent Claim
173 words
A deposited film-forming apparatus comprising: a reaction chamber; a supporting member provided in the reaction chamber for holding a substrate; a light-transmissive perforated diffusion plate; a plasma generating chamber adjacent to the reaction chamber with interposition of the perforated diffusion plate wherein at least a part of the plasma generating chamber is made of a light-transmissive member; a plasma generation means for generating plasma in the plasma generating chamber; a first gas-introduction means for introducing a depositable gas to the central portion of the substrate in the reaction chamber; a second gas-introduction means provided separated from the first gas-introduction means for introducing the depositable gas to the periphery of the substrate in the reaction chamber; a third gas-introduction means for introducing a non-depositable gas into the plasma generating chamber; an evacuation means for evacuating the reaction chamber and the plasma generating chamber; and a light source provided outside the plasma generating chamber for irradiating light to the substrate held on the supporting member through the plasma generating chamber and the perforated diffusion plate.
Claim 12
Dependent Claim
173 words
A deposited film-forming apparatus comprising: a reaction chamber; a supporting member provided in the reaction chamber for holding a substrate; a light-transmissive perforated diffusion plate; a plasma generating chamber adjacent to the reaction chamber with interposition of the perforated diffusion plate wherein at least a part of the plasma generating chamber is made of a light-transmissive member; a plasma generation means for generating plasma in the plasma generating chamber; a first gas-introduction means for introducing a depositable gas to the central portion of the substrate in the reaction chamber; a second gas-introduction means provided separated from the first gas-introduction means for introducing the depositable gas to the periphery of the substrate in the reaction chamber; a third gas-introduction means for introducing a non-depositable gas into the plasma generating chamber; an evacuation means for evacuating the reaction chamber and the plasma generating chamber; and a light source provided outside the plasma generating chamber for irradiating light to the substrate held on the supporting member through the plasma generating chamber and the perforated diffusion plate.
Claim 13
Dependent Claim
29 words
A deposited film-forming apparatus according to claim 8, wherein the plasma generation means applies a high frequency or a microwave power to the inside of the plasma generating chamber.
Claim 14
Dependent Claim
36 words
A deposited film-forming apparatus according to claim 8, wherein the first gas-introduction means comprises a light-transmissive transparent tube having through-holes on the side-wall thereat, which will not form shadows on the substrate or condense the light.
Claim 15
Dependent Claim
17 words
A deposited film-forming apparatus according to claim 8, wherein the first gas-introduction means has a rectangular cross-section.
Claim 16
Dependent Claim
154 words
A deposited film-forming apparatus comprising: a reaction chamber; a supporting member provided in the reaction chamber for holding a substrate; a plasma generating chamber adjacent to the reaction chamber, at least a part of the plasma generating chamber being made of a light-transmissive member; a light-transmissive perforated diffusion plate having at least one light-scattering face provided between the reaction chamber and the plasma generating chamber to permit the reaction and plasma generating chambers to communicate with each other; a plasma generation means for generating plasma in the plasma generating chamber; an evacuation means for evacuating the reaction chamber and the plasma generating chamber; a light source provided outside the plasma generating chamber for irradiating light to the substrate held on the supporting member through the plasma generating chamber and the perforated diffusion plate; and gas introduction means for introducing a gas into at least one of the reaction chamber and the plasma generating chamber.
Claim 17
Dependent Claim
154 words
A deposited film-forming apparatus comprising: a reaction chamber; a supporting member provided in the reaction chamber for holding a substrate; a plasma generating chamber adjacent to the reaction chamber, at least a part of the plasma generating chamber being made of a light-transmissive member; a light-transmissive perforated diffusion plate having at least one light-scattering face provided between the reaction chamber and the plasma generating chamber to permit the reaction and plasma generating chambers to communicate with each other; a plasma generation means for generating plasma in the plasma generating chamber; an evacuation means for evacuating the reaction chamber and the plasma generating chamber; a light source provided outside the plasma generating chamber for irradiating light to the substrate held on the supporting member through the plasma generating chamber and the perforated diffusion plate; and gas introduction means for introducing a gas into at least one of the reaction chamber and the plasma generating chamber.
Claim 18
Dependent Claim
29 words
A deposited film-forming apparatus according to claim 12, wherein the plasma generation means applies a high frequency or a microwave power to the inside of the plasma generating chamber.
References Cited (Backward Citations)
US4811684A
Cited
JPS6231125A
Cited
US4919077A
Cited
JPH0210834A
Cited
JPH02122077A
Cited
US4989544A
Cited
US5223039A
Cited
US5304250A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-07-17 | 1999-01-16 | 1999-07-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-07-17 | 2003-01-16 | 2003-07-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-07-17 | 2007-01-16 | 2007-07-18 | $7700.00 | Window Closed / Lapsed |