US5223039A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Illuminating apparatus and photo-excited process apparatus using same
Assignee: Canon Inc
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Filing: 1992-03-19
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Granted: 1993-06-29
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Expires: 2012-03-19
Abstract
Abstract An illuminating apparatus includes a light source section; an integrator section for spreading out and making uniform light generated from the light source; and a collimator lens for making the light which is spread out and made uniform by the integrator section a parallel light flux, wherein the integrator section is formed of a reflecting member for reflecting light generated from the light source section toward the collimator lens. A photo-excited process apparatus includes a pressure reduceable vacuum chamber; an exhaust device connected to the vacuum chamber; a gas supplying device for supplying gas used in a photo-excited process into the vacuum chamber; and an illuminating device for applying light to the gas, wherein the illuminating device includes a light source section, an integrator section for spreading out and making uniform light generated from the light source section, and a collimator lens for making light which is spread out and made uniform a parallel light flux, and the integrator section is formed of a reflecting member for reflecting the light generated from the light source section toward the collimator lens.
Inventors
- 👤 Nobumasa Suzuki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:56
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/48; C23C16/482
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
69 words
An illuminating apparatus, comprising: a light source section; an integrator section for spreading out and making uniform light generated from the light source; and a collimator lens for making the light which is spread out and made uniform by the integrator section a parallel light flux, wherein the integrator section is formed of a reflecting member for reflecting light generated from the light source section toward the collimator lens.
Claim 2
Dependent Claim
69 words
An illuminating apparatus, comprising: a light source section; an integrator section for spreading out and making uniform light generated from the light source; and a collimator lens for making the light which is spread out and made uniform by the integrator section a parallel light flux, wherein the integrator section is formed of a reflecting member for reflecting light generated from the light source section toward the collimator lens.
Claim 3
Dependent Claim
51 words
An illuminating apparatus according to claim 1, wherein the integrator section comprises a plurality of elements each having a reflection surface which has a spreading function, and wherein each of the elements is arranged in such a manner that the reflection surfaces of respective elements are arrayed in a periodic manner.
Claim 4
Dependent Claim
30 words
An illuminating apparatus according to claim 2, wherein the integrator section comprises optical elements in which parts of spherical surfaces having radiuses of 5 to 100 mm are periodically arranged.
Claim 5
Dependent Claim
19 words
An illuminating apparatus according to claim 3, wherein the reflection surfaces of the optical elements are formed by deposition.
Claim 6
Dependent Claim
17 words
An illuminating apparatus according to claim 4, wherein materials used in said deposition are composed of Al.
Claim 7
Dependent Claim
109 words
A photo-excited process apparatus, comprising: a pressure reduceable vacuum chamber; exhaust means connected to the vacuum chamber; gas supplying means for supplying gas used in a photo-excited process into the vacuum chamber; and illuminating means for applying light to the gas, wherein the illuminating means comprises a light source section, an integrator section for spreading out and making uniform light generated from the light source section, and a collimator lens for making light which is spread out and made uniform a parallel light flux, and wherein the integrator section is formed of a reflecting member for reflecting the light generated from the light source section toward the collimator lens.
Claim 8
Dependent Claim
109 words
A photo-excited process apparatus, comprising: a pressure reduceable vacuum chamber; exhaust means connected to the vacuum chamber; gas supplying means for supplying gas used in a photo-excited process into the vacuum chamber; and illuminating means for applying light to the gas, wherein the illuminating means comprises a light source section, an integrator section for spreading out and making uniform light generated from the light source section, and a collimator lens for making light which is spread out and made uniform a parallel light flux, and wherein the integrator section is formed of a reflecting member for reflecting the light generated from the light source section toward the collimator lens.
Claim 9
Dependent Claim
53 words
A photo-excited process apparatus according to claim 6, wherein the integrator section is formed of a plurality of elements each having a reflection surface which has a spreading function, and each of the elements is arranged in such a manner that the reflection surfaces of respective elements are arrayed in a periodic manner.
Claim 10
Dependent Claim
31 words
A photo-excited process apparatus according to claim 7, wherein the integrator section comprises optical elements in which parts of spherical surfaces having radiuses of 5 to 100 mm are periodically arranged.
Claim 11
Dependent Claim
20 words
A photo-excited process apparatus according to claim 8, wherein the spherical surfaces of the optical elements are formed by deposition.
Claim 12
Dependent Claim
18 words
A photo-excited process apparatus according to claim 9, wherein materials used in said deposition are made of Al.
References Cited (Backward Citations)
GB204538A
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US4202605A
Cited
US4289380A
Cited
JPS60128264A
Cited
JPS63216974A
Cited
JPH01306567A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-06-28 | 1996-12-28 | 1997-06-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-06-28 | 2000-12-28 | 2001-06-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-06-28 | 2004-12-28 | 2005-06-29 | $7700.00 | Window Closed / Lapsed |