Method and apparatus for obtaining three-dimensional information of samples using computer tomography

Claim 1

A method for obtaining three-dimensional information of a sample, comprising the steps of: i) irradiating a laser beam, which has been formed into the shape of a conical beam, to a sample, ii) displacing the laser beam with respect to said sample such that the laser beam may helically scan said sample, iii) selecting the laser beam having passed through said sample to the same direction as the direction, along which the laser beam impinging upon said sample propagates conically, from the laser beam, which has scanned said sample and which has been radiated out of said sample, said selection being carried out by using an image forming lens and a pinhole, iv) detecting a two-dimensional intensity distribution of the laser beam, which has passed through said sample and which has been selected, and v) obtaining three-dimensional information representing the form and/or structure of said sample from said detected two-dimensional intensity distribution by using a computed tomography technique.

Claim 2

A method for obtaining three-dimensional information of a sample, comprising the steps of: i) irradiating a laser beam, which has been formed into the shape of a conical beam, to a sample, ii) displacing the laser beam with respect to said sample such that the laser beam may helically scan said sample, iii) selecting the laser beam having passed through said sample to the same direction as the direction, along which the laser beam impinging upon said sample propagates conically, from the laser beam, which has scanned said sample and which has been radiated out of said sample, said selection being carried out by using an image forming lens and a pinhole, iv) detecting a two-dimensional intensity distribution of the laser beam, which has passed through said sample and which has been selected, and v) obtaining three-dimensional information representing the form and/or structure of said sample from said detected two-dimensional intensity distribution by using a computed tomography technique.

Claim 4

An apparatus for obtaining three-dimensional information of a sample, comprising: i) a laser beam source, ii) an optical means for forming the laser beam, which has been produced by said laser beam source, into the shape of a conical beam, iii) a scanning means, which irradiates the laser beam formed into the shape of the conical beam to a sample such that the laser beam may impinge as a surface beam upon said sample, and which displaces the laser beam with respect to said sample such that the laser beam may helically scan said sample, iv) an optical direction selecting means, which condenses the laser beam having passed through said sample, and which allows a small spot formed by the condensed laser beam to pass therethrough, v) a two-dimensional intensity detecting means, which detects a two-dimensional intensity distribution of the laser beam selected by said optical direction selecting means, and vi) a measurement processing means, which carries out a measurement processing operation in order to obtain three-dimensional information representing the form and/or structure of said sample from the detected intensity distribution of the laser beam by using a computed tomography technique.

Claim 5

An apparatus for obtaining three-dimensional information of a sample, comprising: i) a laser beam source, ii) an optical means for forming the laser beam, which has been produced by said laser beam source, into the shape of a conical beam, iii) a scanning means, which irradiates the laser beam formed into the shape of the conical beam to a sample such that the laser beam may impinge as a surface beam upon said sample, and which displaces the laser beam with respect to said sample such that the laser beam may helically scan said sample, iv) an optical direction selecting means, which condenses the laser beam having passed through said sample, and which allows a small spot formed by the condensed laser beam to pass therethrough, v) a two-dimensional intensity detecting means, which detects a two-dimensional intensity distribution of the laser beam selected by said optical direction selecting means, and vi) a measurement processing means, which carries out a measurement processing operation in order to obtain three-dimensional information representing the form and/or structure of said sample from the detected intensity distribution of the laser beam by using a computed tomography technique.

Claim 8

A method for obtaining three-dimensional information of a sample, comprising the steps of: i) irradiating a laser beam, which has been formed into the shape of a conical beam, to a sample, ii) displacing the laser beam with respect to said sample such that the laser beam may helically scan said sample, iii) matching a wave front of the laser beam, which has scanned said sample and has passed through said sample, with a wave front of a laser beam having a frequency slightly different from the frequency of the laser beam, which has scanned said sample and has passed through said sample, a wavefront-matched laser beam being thereby obtained, iv) two-dimensionally detecting the wavefront-matched laser beam with an optical heterodyne detection technique, a beat signal being thereby detected, v) measuring the intensity of the laser beam, which has passed through said sample, from said beat signal, and vi) obtaining three-dimensional information representing the form and/or structure of said sample from the intensity of the laser beam, which has passed through said sample, by using a computed tomography technique.

Claim 9

A method for obtaining three-dimensional information of a sample, comprising the steps of: i) irradiating a laser beam, which has been formed into the shape of a conical beam, to a sample, ii) displacing the laser beam with respect to said sample such that the laser beam may helically scan said sample, iii) matching a wave front of the laser beam, which has scanned said sample and has passed through said sample, with a wave front of a laser beam having a frequency slightly different from the frequency of the laser beam, which has scanned said sample and has passed through said sample, a wavefront-matched laser beam being thereby obtained, iv) two-dimensionally detecting the wavefront-matched laser beam with an optical heterodyne detection technique, a beat signal being thereby detected, v) measuring the intensity of the laser beam, which has passed through said sample, from said beat signal, and vi) obtaining three-dimensional information representing the form and/or structure of said sample from the intensity of the laser beam, which has passed through said sample, by using a computed tomography technique.

Claim 11

A method for obtaining three-dimensional information of a sample, comprising the steps of: i) matching a wave front of a first laser beam with a wave front of a second laser beam having a frequency slightly different from the frequency of the first laser beam, a wavefront-matched laser beam being thereby obtained, ii) forming the wavefront-matched laser beam into the shape of a conical beam, iii) splitting an optical path of the laser beam, which has been formed into the shape of a conical beam, into an optical path of a laser beam, which has the same frequency as the frequency of the first laser beam, and an optical path of a laser beam, which has the same frequency as the frequency of the second laser beam, iv) irradiating either one of the two laser beams, which respectively travel along the two split optical paths, to a sample, v) displacing the laser beam, which is irradiated to said sample, with respect to said sample such that the laser beam may helically scan said sample, vi) matching a wave front of the laser beam, which has scanned said sample and has passed through said sample, with a wave front of the other laser beam obtained by splitting the optical path, a wavefront-matched laser beam being thereby obtained from the laser beam having scanned said sample and the other laser beam, vii) two-dimensionally detecting the wavefront-matched laser beam, which has thus been obtained from the laser beam having scanned said sample and the other laser beam, with an optical heterodyne detection technique, a beat signal being thereby detected, viii) measuring the intensity of the laser beam, which has passed through said sample, from said beat signal, and ix) obtaining three-dimensional information representing the form and/or structure of said sample from the intensity of the laser beam, which has passed through said sample, by using a computed tomography technique.

Claim 12

A method for obtaining three-dimensional information of a sample, comprising the steps of: i) matching a wave front of a first laser beam with a wave front of a second laser beam having a frequency slightly different from the frequency of the first laser beam, a wavefront-matched laser beam being thereby obtained, ii) forming the wavefront-matched laser beam into the shape of a conical beam, iii) splitting an optical path of the laser beam, which has been formed into the shape of a conical beam, into an optical path of a laser beam, which has the same frequency as the frequency of the first laser beam, and an optical path of a laser beam, which has the same frequency as the frequency of the second laser beam, iv) irradiating either one of the two laser beams, which respectively travel along the two split optical paths, to a sample, v) displacing the laser beam, which is irradiated to said sample, with respect to said sample such that the laser beam may helically scan said sample, vi) matching a wave front of the laser beam, which has scanned said sample and has passed through said sample, with a wave front of the other laser beam obtained by splitting the optical path, a wavefront-matched laser beam being thereby obtained from the laser beam having scanned said sample and the other laser beam, vii) two-dimensionally detecting the wavefront-matched laser beam, which has thus been obtained from the laser beam having scanned said sample and the other laser beam, with an optical heterodyne detection technique, a beat signal being thereby detected, viii) measuring the intensity of the laser beam, which has passed through said sample, from said beat signal, and ix) obtaining three-dimensional information representing the form and/or structure of said sample from the intensity of the laser beam, which has passed through said sample, by using a computed tomography technique.

Claim 14

An apparatus for obtaining three-dimensional information of a sample, comprising: i) a laser beam source for producing a laser beam having a single frequency, ii) an optical path splitting means, which is located in an optical path of the laser beam having been produced by said laser beam source and which splits the optical path of the laser beam into two optical paths, iii) a frequency converting means, which converts the frequency of at least either one of laser beams respectively traveling along the two split optical paths into a different frequency such that the frequency of the laser beam traveling along one of the two split optical paths and the frequency of the laser beam traveling along the other optical path may become slightly different from each other, iv) optical means for forming the laser beams, which travel along the two split optical paths, respectively into the shapes of conical beams, v) a scanning means, which irradiates either one of the two laser beams formed into the shapes of the conical beams to a sample such that the laser beam may impinge as a surface beam upon said sample, and which displaces the laser beam with respect to said sample such that the laser beam may helically scan said sample, vi) a wavefront matching means for matching a wave front of the laser beam, which has been irradiated to said sample and has passed through said sample, with a wave front of the other laser beam formed into the shape of the conical beam, a wavefront-matched laser beam being thereby obtained, vii) a two-dimensional intensity detecting means, which is located in a plane intersecting approximately perpendicularly to the direction of travel of the wavefront-matched laser beam obtained from said wavefront matching means, and which two-dimensionally detects the optical intensity repeatedly becoming high and low at a frequency equal to the difference between the frequencies of the laser beams subjected to the wavefront matching, and viii) a measurement processing means, which detects the intensity of the laser beam having passed through said sample from the laser beam intensity detected by said two-dimensional intensity detecting means, and which carries out a measurement processing operation in order to obtain three-dimensional information representing the form and/or structure of said sample by using a computed tomography technique.

Claim 15

An apparatus for obtaining three-dimensional information of a sample, comprising: i) a laser beam source for producing a laser beam having a single frequency, ii) an optical path splitting means, which is located in an optical path of the laser beam having been produced by said laser beam source and which splits the optical path of the laser beam into two optical paths, iii) a frequency converting means, which converts the frequency of at least either one of laser beams respectively traveling along the two split optical paths into a different frequency such that the frequency of the laser beam traveling along one of the two split optical paths and the frequency of the laser beam traveling along the other optical path may become slightly different from each other, iv) optical means for forming the laser beams, which travel along the two split optical paths, respectively into the shapes of conical beams, v) a scanning means, which irradiates either one of the two laser beams formed into the shapes of the conical beams to a sample such that the laser beam may impinge as a surface beam upon said sample, and which displaces the laser beam with respect to said sample such that the laser beam may helically scan said sample, vi) a wavefront matching means for matching a wave front of the laser beam, which has been irradiated to said sample and has passed through said sample, with a wave front of the other laser beam formed into the shape of the conical beam, a wavefront-matched laser beam being thereby obtained, vii) a two-dimensional intensity detecting means, which is located in a plane intersecting approximately perpendicularly to the direction of travel of the wavefront-matched laser beam obtained from said wavefront matching means, and which two-dimensionally detects the optical intensity repeatedly becoming high and low at a frequency equal to the difference between the frequencies of the laser beams subjected to the wavefront matching, and viii) a measurement processing means, which detects the intensity of the laser beam having passed through said sample from the laser beam intensity detected by said two-dimensional intensity detecting means, and which carries out a measurement processing operation in order to obtain three-dimensional information representing the form and/or structure of said sample by using a computed tomography technique.

Claim 18

An apparatus for obtaining three-dimensional information of a sample, comprising: i) a laser beam source for producing a laser beam having a single frequency, ii) a first optical path splitting means, which is located in an optical path of the laser beam having been produced by said laser beam source and which splits the optical path of the laser beam produced by said laser beam source into a first laser beam traveling along a first optical path and a second laser beam traveling along a second optical path, iii) a frequency converting means, which converts the frequency of at least one of said first and second laser beams respectively traveling along the first and second optical paths into a different frequency such that the frequency of the first laser beam traveling along the first optical path and the frequency of the second laser beam traveling along the second optical path may become slightly different from each other, iv) a first wavefront matching means for matching a wave front of the laser beam, the frequency of which has been converted, with a wave front of the laser beam which travels along one of the first and second optical paths, a wavefront-matched laser beam being thereby obtained, v) an optical means for forming the wavefront-matched laser beam, which has been obtained from said first wavefront matching means, into the shape of a conical beam, vi) a second optical path splitting means for splitting the optical path of the laser beam, which has been formed into the shape of the conical beam, into a third optical path of a third laser beam formed from one of the first and second laser beams having slightly different frequencies and a fourth optical path of a fourth laser beam formed from the other of the first and second laser beams, vii) a scanning means, which irradiates one of the third and fourth laser beams to a sample such that the laser beam may impinge as a surface beam upon said sample, and which displaces said one of the third and fourth laser beams with respect to said sample such that said one of the third and fourth laser beams may helically scan said sample, viii) a second wavefront matching means for matching a wave front of the laser beam, which has been irradiated to said sample and has passed through said sample, with a wave front of the laser beam traveling along the other of the third and fourth optical paths split by said second optical path splitting means, a wavefront-matched laser beam being thereby obtained, ix) a two-dimensional intensity detecting means, which is located in a plane intersecting approximately perpendicularly to the direction of travel of the wavefront-matched laser beam obtained from said second wavefront matching means, and which two-dimensionally detects the optical intensity repeatedly becoming high and low at a frequency equal to the difference between the frequencies of the laser beams subjected to the wavefront matching in said second wavefront matching means, and x) a measurement processing means, which detects the intensity of the laser beam having passed through said sample from the laser beam intensity detected by said two-dimensional intensity detecting means, and which carries out a measurement processing operation in order to obtain three-dimensional information of said sample by using a computed tomography technique.

Claim 19

An apparatus for obtaining three-dimensional information of a sample, comprising: i) a laser beam source for producing a laser beam having a single frequency, ii) a first optical path splitting means, which is located in an optical path of the laser beam having been produced by said laser beam source and which splits the optical path of the laser beam produced by said laser beam source into a first laser beam traveling along a first optical path and a second laser beam traveling along a second optical path, iii) a frequency converting means, which converts the frequency of at least one of said first and second laser beams respectively traveling along the first and second optical paths into a different frequency such that the frequency of the first laser beam traveling along the first optical path and the frequency of the second laser beam traveling along the second optical path may become slightly different from each other, iv) a first wavefront matching means for matching a wave front of the laser beam, the frequency of which has been converted, with a wave front of the laser beam which travels along one of the first and second optical paths, a wavefront-matched laser beam being thereby obtained, v) an optical means for forming the wavefront-matched laser beam, which has been obtained from said first wavefront matching means, into the shape of a conical beam, vi) a second optical path splitting means for splitting the optical path of the laser beam, which has been formed into the shape of the conical beam, into a third optical path of a third laser beam formed from one of the first and second laser beams having slightly different frequencies and a fourth optical path of a fourth laser beam formed from the other of the first and second laser beams, vii) a scanning means, which irradiates one of the third and fourth laser beams to a sample such that the laser beam may impinge as a surface beam upon said sample, and which displaces said one of the third and fourth laser beams with respect to said sample such that said one of the third and fourth laser beams may helically scan said sample, viii) a second wavefront matching means for matching a wave front of the laser beam, which has been irradiated to said sample and has passed through said sample, with a wave front of the laser beam traveling along the other of the third and fourth optical paths split by said second optical path splitting means, a wavefront-matched laser beam being thereby obtained, ix) a two-dimensional intensity detecting means, which is located in a plane intersecting approximately perpendicularly to the direction of travel of the wavefront-matched laser beam obtained from said second wavefront matching means, and which two-dimensionally detects the optical intensity repeatedly becoming high and low at a frequency equal to the difference between the frequencies of the laser beams subjected to the wavefront matching in said second wavefront matching means, and x) a measurement processing means, which detects the intensity of the laser beam having passed through said sample from the laser beam intensity detected by said two-dimensional intensity detecting means, and which carries out a measurement processing operation in order to obtain three-dimensional information of said sample by using a computed tomography technique.

Claim 23

A method for obtaining three-dimensional information of a sample, comprising the steps of: i) carrying out a measurement operation on each of at least two laser beams having different frequencies, said measurement operation comprising the steps of: a) forming a laser beam, which has a certain frequency, into the shape of a conical beam, b) irradiating the laser beam, which has been formed into the shape of the conical beam, to a sample, c) displacing the laser beam with respect to said sample such that the laser beam may helically scan said sample, d) selecting the laser beam having passed through said sample to the same direction as the direction, along which the laser beam impinging upon said sample propagates conically, from the laser beam, which has scanned said sample and which has been radiated out of said sample, said selection being carried out by using an image forming lens and a pinhole, and e) detecting a two-dimensional intensity distribution of the laser beam, which has passed through said sample and which has been selected, and ii) obtaining three-dimensional information representing constituents and/or functions of said sample from the two-dimensional intensity distributions of at least two of the selected laser beams having different frequencies, which distributions have been detected by the measurement operations, by using a computed tomography technique.

Claim 24

A method for obtaining three-dimensional information of a sample, comprising the steps of: i) carrying out a measurement operation on each of at least two laser beams having different frequencies, said measurement operation comprising the steps of: a) forming a laser beam, which has a certain frequency, into the shape of a conical beam, b) irradiating the laser beam, which has been formed into the shape of the conical beam, to a sample, c) displacing the laser beam with respect to said sample such that the laser beam may helically scan said sample, d) selecting the laser beam having passed through said sample to the same direction as the direction, along which the laser beam impinging upon said sample propagates conically, from the laser beam, which has scanned said sample and which has been radiated out of said sample, said selection being carried out by using an image forming lens and a pinhole, and e) detecting a two-dimensional intensity distribution of the laser beam, which has passed through said sample and which has been selected, and ii) obtaining three-dimensional information representing constituents and/or functions of said sample from the two-dimensional intensity distributions of at least two of the selected laser beams having different frequencies, which distributions have been detected by the measurement operations, by using a computed tomography technique.

Claim 26

An apparatus for obtaining three-dimensional information of a sample, comprising: i) a laser beam source capable of producing at least two laser beams having different frequencies, ii) an optical means for forming a laser beam, which has been produced by said laser beam source, into the shape of a conical beam, iii) a scanning means, which irradiates the laser beam formed into the shape of the conical beam to a sample such that the laser beam may impinge as a surface beam upon said sample, and which displaces the laser beam with respect to said sample such that the laser beam may helically scan said sample, iv) an optical direction selecting means for selecting laser beams, by condensing the laser beam having passed through said sample, and for allowing a small spot formed by the condensed laser beam to pass therethrough, v) a two-dimensional intensity detecting means, which detects a two-dimensional intensity distribution of the laser beam selected by said optical direction selecting means, said two-dimensional intensity distribution being projected from said small spot, and vi) a measurement processing means, which calculates values concerning constituents and/or functions of said sample from the two-dimensional intensity distributions of at least two of the selected laser beams having different frequencies, said two-dimensional intensity distributions being obtained when at least two laser beams are respectively irradiated to said sample, and which thereby obtains three-dimensional information representing constituents and/or functions of said sample.

Claim 27

An apparatus for obtaining three-dimensional information of a sample, comprising: i) a laser beam source capable of producing at least two laser beams having different frequencies, ii) an optical means for forming a laser beam, which has been produced by said laser beam source, into the shape of a conical beam, iii) a scanning means, which irradiates the laser beam formed into the shape of the conical beam to a sample such that the laser beam may impinge as a surface beam upon said sample, and which displaces the laser beam with respect to said sample such that the laser beam may helically scan said sample, iv) an optical direction selecting means for selecting laser beams, by condensing the laser beam having passed through said sample, and for allowing a small spot formed by the condensed laser beam to pass therethrough, v) a two-dimensional intensity detecting means, which detects a two-dimensional intensity distribution of the laser beam selected by said optical direction selecting means, said two-dimensional intensity distribution being projected from said small spot, and vi) a measurement processing means, which calculates values concerning constituents and/or functions of said sample from the two-dimensional intensity distributions of at least two of the selected laser beams having different frequencies, said two-dimensional intensity distributions being obtained when at least two laser beams are respectively irradiated to said sample, and which thereby obtains three-dimensional information representing constituents and/or functions of said sample.

Claim 30

A method for obtaining three-dimensional information of a sample, comprising the steps of: i) carrying out a measurement operation on each of at least two laser beams having different frequencies, said measurement operation comprising the steps of: a) forming a laser beam, which has a certain frequency, into the shape of a conical beam, b) irradiating the laser beam, which has been formed into the shape of the conical beam, to a sample, c) displacing the laser beam with respect to said sample such that the laser beam may helically scan said sample, d) matching a wave front of the laser beam, which has scanned said sample and has passed through said sample, with a wave front of a laser beam having a frequency slightly different from the frequency of the laser beam, which has scanned said sample and has passed through said sample, a wavefront-matched laser beam being thereby obtained, e) two-dimensionally detecting the wavefront-matched laser beam with an optical heterodyne detection technique, a beat signal being thereby detected, and f) measuring the intensity of the laser beam, which has passed through said sample, from said beat signal, and ii) obtaining three-dimensional information representing constituents and/or functions of said sample from two-dimensional intensity distributions for at least two of the laser beams which have scanned said sample and have passed through said sample having different frequencies, which distributions have been detected by the measurement operations, by using a computed tomography technique.

Claim 31

A method for obtaining three-dimensional information of a sample, comprising the steps of: i) carrying out a measurement operation on each of at least two laser beams having different frequencies, said measurement operation comprising the steps of: a) forming a laser beam, which has a certain frequency, into the shape of a conical beam, b) irradiating the laser beam, which has been formed into the shape of the conical beam, to a sample, c) displacing the laser beam with respect to said sample such that the laser beam may helically scan said sample, d) matching a wave front of the laser beam, which has scanned said sample and has passed through said sample, with a wave front of a laser beam having a frequency slightly different from the frequency of the laser beam, which has scanned said sample and has passed through said sample, a wavefront-matched laser beam being thereby obtained, e) two-dimensionally detecting the wavefront-matched laser beam with an optical heterodyne detection technique, a beat signal being thereby detected, and f) measuring the intensity of the laser beam, which has passed through said sample, from said beat signal, and ii) obtaining three-dimensional information representing constituents and/or functions of said sample from two-dimensional intensity distributions for at least two of the laser beams which have scanned said sample and have passed through said sample having different frequencies, which distributions have been detected by the measurement operations, by using a computed tomography technique.

Claim 33

An apparatus for obtaining three-dimensional information of a sample, comprising: i) a laser beam source capable of producing at least two laser beams having different frequencies, ii) an optical path splitting means, which is located in an optical path of a laser beam having been produced by said laser beam source and which splits the optical path of the laser beam into two optical paths, iii) a frequency converting means, which converts the frequency of at least either one of laser beams respectively traveling along the two split optical paths into a different frequency such that the frequency of the laser beam traveling along one of the two split optical paths and the frequency of the laser beam traveling along the other optical path may become slightly different from each other, iv) optical means for forming the laser beams, which travel along the two split optical paths, respectively into the shapes of conical bemas, v) a scanning means, which irradiates either one of the two laser beams formed into the shapes of the conical beams to a sample such that the laser beam may impinge as a surface beam upon said sample, and which displaces the laser beam with respect to said sample such that the laser beam may helically scan said sample, vi) a wavefront matching means for matching a wave front of the laser beam, which has been irradiated to said sample and has passed through said sample, with a wave front of the other laser beam formed into the shape of the conical beam, a wavefront-matched laser beam being thereby obtained; vii) a two-dimensional intensity detecting means, which is located in a plane intersecting approximately perpendicularly to the direction of travel of the wavefront-matched laser beam obtained from said wavefront matching means, and which two-dimensionally detects the optical intensity repeatedly becoming high and low at a frequency equal to the difference between the frequencies of the laser beams subjected to the wavefront matching, and viii) a measurement processing means, which detects the intensity of the laser beam having passed through said sample from the laser beam intensity detected by said two-dimensional intensity detecting means, and which calculates values concerning constituents and/or functions of said sample from two-dimensional intensity distributions of at least two of the laser beams having passed through said sample having different frequencies, said dimensional intensity distributions being obtained when at least two laser beams are respectively irradiated to said sample, said measurement processing means thereby obtaining three-dimensional information representing constituents and/or functions of said sample by using a computed tomography technique.

Claim 34

An apparatus for obtaining three-dimensional information of a sample, comprising: i) a laser beam source capable of producing at least two laser beams having different frequencies, ii) an optical path splitting means, which is located in an optical path of a laser beam having been produced by said laser beam source and which splits the optical path of the laser beam into two optical paths, iii) a frequency converting means, which converts the frequency of at least either one of laser beams respectively traveling along the two split optical paths into a different frequency such that the frequency of the laser beam traveling along one of the two split optical paths and the frequency of the laser beam traveling along the other optical path may become slightly different from each other, iv) optical means for forming the laser beams, which travel along the two split optical paths, respectively into the shapes of conical bemas, v) a scanning means, which irradiates either one of the two laser beams formed into the shapes of the conical beams to a sample such that the laser beam may impinge as a surface beam upon said sample, and which displaces the laser beam with respect to said sample such that the laser beam may helically scan said sample, vi) a wavefront matching means for matching a wave front of the laser beam, which has been irradiated to said sample and has passed through said sample, with a wave front of the other laser beam formed into the shape of the conical beam, a wavefront-matched laser beam being thereby obtained; vii) a two-dimensional intensity detecting means, which is located in a plane intersecting approximately perpendicularly to the direction of travel of the wavefront-matched laser beam obtained from said wavefront matching means, and which two-dimensionally detects the optical intensity repeatedly becoming high and low at a frequency equal to the difference between the frequencies of the laser beams subjected to the wavefront matching, and viii) a measurement processing means, which detects the intensity of the laser beam having passed through said sample from the laser beam intensity detected by said two-dimensional intensity detecting means, and which calculates values concerning constituents and/or functions of said sample from two-dimensional intensity distributions of at least two of the laser beams having passed through said sample having different frequencies, said dimensional intensity distributions being obtained when at least two laser beams are respectively irradiated to said sample, said measurement processing means thereby obtaining three-dimensional information representing constituents and/or functions of said sample by using a computed tomography technique.

Claim 37

An apparatus for obtaining three-dimensional information of a sample, comprising: i) a laser beam source capable of producing at least two laser beams having different frequencies, ii) a first optical path splitting means, which is located in an optical path of a laser beam having been produced by said laser beam source and which splits the optical path of the laser beam into two optical paths, iii) a frequency converting means, which converts the frequency of at least either one of laser beams respectively traveling along the two split optical paths into a different frequency such that the frequency of the laser beam traveling along one of the two split optical paths and the frequency of the laser beam traveling along the other optical path may become slightly different from each other, iv) a first wavefront matching means for matching a wave front of the laser beam, the frequency of which has been converted, with a wave front of the laser beam, which travels along one of the two split optical paths, a wavefront-matched laser beam being thereby obtained, v) an optical means for forming the wavefront-matched laser beam, which has been obtained from said first wavefront matching means, into the shape of a conical beam, vi) a second optical path splitting means for splitting the optical path of the laser beam, which has been formed into the shape of the conical beam, into an optical path of one of the two laser beams having slightly different frequencies and an optical path of the other laser beam, vii) a scanning means, which irradiates the laser beam, that travels along either one of the two optical paths split by said second optical path splitting means, to a sample such that the laser beam may impinge as a surface beam upon said sample, and which displaces the laser beam with respect to said sample such that the laser beam may helically scan said sample, viii) a second wavefront matching means for matching a wave front of the laser beam, which has been irradiated to said sample and has passed through said sample, with a wave front of the laser beam traveling along the other of the two optical paths split by said second optical path splitting means, a wavefront-matched laser beam being thereby obtained, ix) a two-dimensional intensity detecting means, which is located in a plane intersecting approximately perpendicularly to the direction of travel of the wavefront-matched laser beam obtained from said second wavefront matching means, and which two-dimensionally detects the optical intensity repeatedly becoming high and low at a frequency equal to the difference between the frequencies of the laser beams subjected to the wavefront matching in said second wavefront matching means, and x) a measurement processing means, which detects the intensity of the laser beam having passed through said sample from the laser beam intensity detected by said two-dimensional intensity detecting means, and which calculates values concerning constituents and/or functions of said sample from two-dimensional intensity distributions of at least two laser beams having different frequencies, said two-dimensional intensity distributions being obtained when at least two laser beams are respectively irradiated to said sample, said measurement processing means thereby obtaining three-dimensional information representing constituents and/or functions of said sample by using a computed tomography technique.

Claim 38

An apparatus for obtaining three-dimensional information of a sample, comprising: i) a laser beam source capable of producing at least two laser beams having different frequencies, ii) a first optical path splitting means, which is located in an optical path of a laser beam having been produced by said laser beam source and which splits the optical path of the laser beam into two optical paths, iii) a frequency converting means, which converts the frequency of at least either one of laser beams respectively traveling along the two split optical paths into a different frequency such that the frequency of the laser beam traveling along one of the two split optical paths and the frequency of the laser beam traveling along the other optical path may become slightly different from each other, iv) a first wavefront matching means for matching a wave front of the laser beam, the frequency of which has been converted, with a wave front of the laser beam, which travels along one of the two split optical paths, a wavefront-matched laser beam being thereby obtained, v) an optical means for forming the wavefront-matched laser beam, which has been obtained from said first wavefront matching means, into the shape of a conical beam, vi) a second optical path splitting means for splitting the optical path of the laser beam, which has been formed into the shape of the conical beam, into an optical path of one of the two laser beams having slightly different frequencies and an optical path of the other laser beam, vii) a scanning means, which irradiates the laser beam, that travels along either one of the two optical paths split by said second optical path splitting means, to a sample such that the laser beam may impinge as a surface beam upon said sample, and which displaces the laser beam with respect to said sample such that the laser beam may helically scan said sample, viii) a second wavefront matching means for matching a wave front of the laser beam, which has been irradiated to said sample and has passed through said sample, with a wave front of the laser beam traveling along the other of the two optical paths split by said second optical path splitting means, a wavefront-matched laser beam being thereby obtained, ix) a two-dimensional intensity detecting means, which is located in a plane intersecting approximately perpendicularly to the direction of travel of the wavefront-matched laser beam obtained from said second wavefront matching means, and which two-dimensionally detects the optical intensity repeatedly becoming high and low at a frequency equal to the difference between the frequencies of the laser beams subjected to the wavefront matching in said second wavefront matching means, and x) a measurement processing means, which detects the intensity of the laser beam having passed through said sample from the laser beam intensity detected by said two-dimensional intensity detecting means, and which calculates values concerning constituents and/or functions of said sample from two-dimensional intensity distributions of at least two laser beams having different frequencies, said two-dimensional intensity distributions being obtained when at least two laser beams are respectively irradiated to said sample, said measurement processing means thereby obtaining three-dimensional information representing constituents and/or functions of said sample by using a computed tomography technique.

Claim 42

A method for obtaining three-dimensional information of a sample, wherein a beam of an electromagnetic wave is irradiated to a sample, the beam of the electromagnetic wave is displaced with respect to said sample such that the beam of the electromagnetic wave may helically scan said sample, the intensity of the beam of the electromagnetic wave having passed through said sample is detected, and three-dimensional information of said sample is obtained from the detected intensity of the beam of the electromagnetic wave, the method for obtaining three-dimensional information of a sample comprising the steps of: i) irradiating a plurality of beams of the electromagnetic wave from a plurality of electromagnetic wave irradiating means to said sample, the plurality of said electromagnetic wave irradiating means being located in equally spaced relation to one another around said sample such that they helically surround said sample at least over 360 degrees around said sample, and ii) detecting intensities of the plurality of the beams of the electromagnetic wave, which have passed through said sample, by using a plurality of electromagnetic wave detecting means, each of which is located at a position that is capable of detecting one of the beams of the electromagnetic wave having passed through said sample.

Claim 43

A method for obtaining three-dimensional information of a sample, wherein a beam of an electromagnetic wave is irradiated to a sample, the beam of the electromagnetic wave is displaced with respect to said sample such that the beam of the electromagnetic wave may helically scan said sample, the intensity of the beam of the electromagnetic wave having passed through said sample is detected, and three-dimensional information of said sample is obtained from the detected intensity of the beam of the electromagnetic wave, the method for obtaining three-dimensional information of a sample comprising the steps of: i) irradiating a plurality of beams of the electromagnetic wave from a plurality of electromagnetic wave irradiating means to said sample, the plurality of said electromagnetic wave irradiating means being located in equally spaced relation to one another around said sample such that they helically surround said sample at least over 360 degrees around said sample, and ii) detecting intensities of the plurality of the beams of the electromagnetic wave, which have passed through said sample, by using a plurality of electromagnetic wave detecting means, each of which is located at a position that is capable of detecting one of the beams of the electromagnetic wave having passed through said sample.

Claim 47

An apparatus for obtaining three-dimensional information of a sample, wherein a beam of an electromagnetic wave is irradiated to a sample, the beam of the electromagnetic wave is displaced with respect to said sample such that the beam of the electromagnetic wave may helically scan said sample, the intensity of the beam of the electromagnetic wave having passed through said sample is detected, and three-dimensional information of said sample is obtained from the detected intensity of the beam of the electromagnetic wave, the apparatus for obtaining three-dimensional information of a sample comprising: i) at least a single electromagnetic wave producing means, ii) a plurality of electromagnetic wave irradiating means, which are located in equally spaced relation to one another around said sample such that they helically surround said sample at least over 360 degrees around said sample, and each of which receives a beam of the electromagnetic wave having been produced by said electromagnetic wave producing means and irradiates the beam of the electromagnetic wave to said sample, and iii) a plurality of electromagnetic wave detecting means, each of which detects the intensity of one of the beams of the electromagnetic wave having passed through said sample.

Claim 48

An apparatus for obtaining three-dimensional information of a sample, wherein a beam of an electromagnetic wave is irradiated to a sample, the beam of the electromagnetic wave is displaced with respect to said sample such that the beam of the electromagnetic wave may helically scan said sample, the intensity of the beam of the electromagnetic wave having passed through said sample is detected, and three-dimensional information of said sample is obtained from the detected intensity of the beam of the electromagnetic wave, the apparatus for obtaining three-dimensional information of a sample comprising: i) at least a single electromagnetic wave producing means, ii) a plurality of electromagnetic wave irradiating means, which are located in equally spaced relation to one another around said sample such that they helically surround said sample at least over 360 degrees around said sample, and each of which receives a beam of the electromagnetic wave having been produced by said electromagnetic wave producing means and irradiates the beam of the electromagnetic wave to said sample, and iii) a plurality of electromagnetic wave detecting means, each of which detects the intensity of one of the beams of the electromagnetic wave having passed through said sample.