US5426558A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Anti-stick electrostatic chuck for a low pressure environment
Assignee: Varian Semiconductor Equipment Associates Inc
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Filing: 1994-03-14
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Granted: 1995-06-20
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Expires: 2014-03-14
Abstract
Abstract An electrostatic chuck for releasably holding a workpiece comprising a substrate formed by a pair of dielectric elements, each being a single crystal, with at least one electrode embedded therebetween, and a voltage source coupled to each electrode. The chuck is preferably fabricated from two substantially planar dielectric members sandwiched around a brazing compound which become electrodes after the assembly is heated and then cooled.
Inventors
- 👤 Arthur Sherman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 21:19
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/72; H10P72/722; Y; Y10; Y10S; Y10S269/00; Y10S269/903; Y10T; Y10T279/00; Y10T279/23
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
145 words
An electrostatic chuck for holding an electrically conductive workpiece on the chuck in a low pressure environment, said chuck comprising: a substrate comprising first and second dielectric plates, said first dielectric plate having an upper and lower surface, said upper surface having at least one recess formed thereon, said first dielectric plate forming a single crystal; at least one electrode, said electrode placed within said recess of said first dielectric plate; said second dielectric plate having an upper surface for supporting the workpiece and a lower surface, said second dielectric plate forming a single crystal, said second dielectric plate mounted by its lower surface contiguously and coextensively to the upper surface of said first dielectric plate; a voltage source for applying a voltage to at least one of said electrodes; and means for coupling at least one of said conductive electrodes to said voltage source.
Claim 2
Dependent Claim
145 words
An electrostatic chuck for holding an electrically conductive workpiece on the chuck in a low pressure environment, said chuck comprising: a substrate comprising first and second dielectric plates, said first dielectric plate having an upper and lower surface, said upper surface having at least one recess formed thereon, said first dielectric plate forming a single crystal; at least one electrode, said electrode placed within said recess of said first dielectric plate; said second dielectric plate having an upper surface for supporting the workpiece and a lower surface, said second dielectric plate forming a single crystal, said second dielectric plate mounted by its lower surface contiguously and coextensively to the upper surface of said first dielectric plate; a voltage source for applying a voltage to at least one of said electrodes; and means for coupling at least one of said conductive electrodes to said voltage source.
Claim 3
Dependent Claim
17 words
The chuck of claim 1, wherein said first dielectric plate is thicker than said second dielectric plate.
Claim 4
Dependent Claim
40 words
The chuck of claim 2, wherein said first dielectric plate further comprises at least one opening extending through the lower surface of said first plate into said recess for accommodating said means for coupling said electrode to said voltage source.
Claim 5
Dependent Claim
23 words
The chuck of claim 1 wherein the substrate is fabricated of a material from the group of materials comprising quartz and magnesium oxide.
Claim 6
Dependent Claim
23 words
The chuck of claim 1 wherein a single electrically conductive electrode is embedded in the substrate, and the workpiece is coupled to ground.
Claim 7
Dependent Claim
35 words
The chuck of claim 1 wherein there are two electrically conductive electrodes embedded within the substrate: a first electrode coupled to a voltage of +V and a second electrode coupled to a voltage of -V.
References Cited (Backward Citations)
US4480284A
Cited
US4667110A
Cited
US5103367A
Cited
US5151845A
Cited
US5166856A
Cited
US5155652A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-06-19 | 1998-12-19 | 1999-06-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-06-19 | 2002-12-19 | 2003-06-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-06-19 | 2006-12-19 | 2007-06-20 | $7700.00 | Window Closed / Lapsed |