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US5426412A
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Infrared detecting device and infrared detecting element for use in the device
Assignee: Panasonic Electric Works Co Ltd
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Filing: 1993-10-26
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Granted: 1995-06-20
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Expires: 2013-10-26
Abstract
Abstract An infrared detecting arrangement includes an infrared detecting element having a heat insulating film and an infrared detector which are disposed between an interior space of a hermetically sealed casing for the element and a cavity formed within a substrate of the element and communicating through a ventilator with the interior space.
Inventors
- 👤 Shigeaki Tomonari
- 👤 Jun Sakai
- 👤 Kouichi Aizawa
- 👤 Keizi Kakite
- 👤 Takayoshi Awai
- 👤 Takuro Nakamura
- 👤 Takuro Ishida
- 👤 Tsutomu Ichihara
- 👤 Hitoshi Yoshida
- 👤 Shigenari Takami
- 👤 Sadayuki Sumi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 12:31
CPC Classifications
G; G01; G01J; G01J5/00; G01J5/02; G01J5/04; G01J5/041; G01J5/045; G01J5/10; G01J5/20; H; H01; H01C; H01C7/00; H01C7/02; H01C7/021; G01J2005/103
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
117 words
An infrared detecting device comprising a hermetically sealed casing and an infrared detecting element accommodated in said casing, wherein the infrared detecting element comprises a substrate having a cavity defined therein, a heat insulation film provided on the substrate, an infrared detector provided on the heat insulation film to be disposed between interior space of the casing and the cavity in the substrate, and means for communicating interior space of the cavity defined in the substrate with the interior space of the casing, said communicating means being provided for maintaining a pressure difference between the interior space of the cavity in the substrate and the interior space of the casing to be less than a predetermined value.
Claim 2
Dependent Claim
117 words
An infrared detecting device comprising a hermetically sealed casing and an infrared detecting element accommodated in said casing, wherein the infrared detecting element comprises a substrate having a cavity defined therein, a heat insulation film provided on the substrate, an infrared detector provided on the heat insulation film to be disposed between interior space of the casing and the cavity in the substrate, and means for communicating interior space of the cavity defined in the substrate with the interior space of the casing, said communicating means being provided for maintaining a pressure difference between the interior space of the cavity in the substrate and the interior space of the casing to be less than a predetermined value.
Claim 3
Dependent Claim
25 words
The device according to claim 1, wherein the hermetically sealed casing is charged with gaseous matter other than air and having a low thermal conductivity.
Claim 4
Dependent Claim
21 words
The device according to claim 1, where in the interior space of the hermetically sealed casing is in a vacuumed state.
Claim 5
Dependent Claim
31 words
The device according to claim 1, wherein the infrared detector includes a thermistor and means covering the thermistor for absorbing infrared light, said infrared absorbing means consisting essentially of silicon oxynitride.
Claim 6
Dependent Claim
69 words
An infrared detecting element comprising a substrate having therein a cavity, a heat insulation film provided on the substrate, and an infrared detector provided on the heat insulation film at a position corresponding to the cavity in the substrate, said infrared detector including a thermistor, a set of electrodes connected to the thermistor, and a covering infrared absorbing film provided on the thermistor and consisting essentially of silicon oxynitride.
Claim 7
Dependent Claim
69 words
An infrared detecting element comprising a substrate having therein a cavity, a heat insulation film provided on the substrate, and an infrared detector provided on the heat insulation film at a position corresponding to the cavity in the substrate, said infrared detector including a thermistor, a set of electrodes connected to the thermistor, and a covering infrared absorbing film provided on the thermistor and consisting essentially of silicon oxynitride.
Claim 8
Dependent Claim
14 words
The element according to claim 5, wherein the thermistor consists of amorphous silicon carbide.
Claim 9
Dependent Claim
15 words
The element according to claim 5, wherein the infrared detector is rounded at corner parts.
Claim 10
Dependent Claim
17 words
The element according to claim 5, wherein the covering infrared absorbing film is divided by partition slits.
Claim 11
Dependent Claim
38 words
The element according to claim 5, wherein the infrared detector is divided into parts, at least two of the divided parts are provided on the heat insulation film at a position corresponding to the cavity in the substrate.
Claim 12
Dependent Claim
30 words
A thermistor comprising an amorphous alloy semiconductor thin film, and a pair of upper and lower single element semiconductor thin films holding between them said amorphous alloy semiconductor thin film.
Claim 13
Dependent Claim
30 words
A thermistor comprising an amorphous alloy semiconductor thin film, and a pair of upper and lower single element semiconductor thin films holding between them said amorphous alloy semiconductor thin film.
Claim 14
Dependent Claim
26 words
The thermistor according to claim 10, wherein said single element semiconductor thin films are of a conduction type opposite to the amorphous alloy semiconductor thin film.
Claim 15
Dependent Claim
29 words
The thermistor according to claim 10, wherein a buffer layer is provided between said amorphous alloy semiconductor thin film and said upper and lower single element semiconductor thin films.
Claim 16
Dependent Claim
21 words
The thermistor according to claim 10, wherein said upper side single element semiconductor thin film is omitted at both side portions.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-06-19 | 1998-12-19 | 1999-06-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-06-19 | 2002-12-19 | 2003-06-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-06-19 | 2006-12-19 | 2007-06-20 | $7700.00 | Window Closed / Lapsed |