Patent US4558812A successfully refreshed from Google Patents.
Patent US5425811A successfully refreshed from Google Patents.
US5425811A
Expired / Lapsed
US
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Apparatus for manufacturing a nitrogen containing compound thin film
Assignee: Toshiba Corp
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Filing: 1992-10-30
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Granted: 1995-06-20
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Expires: 2012-10-30
Abstract
Abstract An apparatus for forming a II-VI Group compound thin film containing nitrogen as an impurity, on a substrate, comprises a container for holding a substrate, a vapor source for supplying Zn vapor on a surface of the substrate, a vapor source for supplying Se vapor on the surface of the substrate, and a discharge tube into which a nitrogen gas is introduced, having three-divided internal portions, a high-pressure portion, a middle-pressure portion, and a low-pressure portion from the gas introduction side, and supplying excitation species derived from discharge plasma generated in the low-pressure portion onto the surface of the substrate. Zn vapor and Se vapor are alternately supplied, and supply of nitrogen excitation species is performed in synchronous with supply of Zn vapor.
Inventors
- 👤 Masao Mashita
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 07:44
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C30; C30B; C30B23/00; C30B23/02; C30B29/00; C30B29/10; C30B29/46; C30B29/48
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
137 words
An apparatus for forming a nitrogen-containing compound thin film on a substrate, comprising: a container for holding the substrate; means for supplying material vapor onto a surface of the substrate held in the container; and a discharge tube into which a gas containing at least nitrogen is introduced, having at least two-divided internal portions in both which discharge is carried out, a high-pressure portion on a gas introduction side and a low-pressure portion on a gas discharge side, and supplying excitation species derived from discharge plasma generated in the low-pressure portion onto a surface of said substrate, said discharge tube including a partition plate dividing said discharge tube such that an internal portion on one side of said partition plate has a pressure higher than that in an internal portion on another side of said partition plate.
Claim 2
Independent Claim
137 words
An apparatus for forming a nitrogen-containing compound thin film on a substrate, comprising: a container for holding the substrate; means for supplying material vapor onto a surface of the substrate held in the container; and a discharge tube into which a gas containing at least nitrogen is introduced, having at least two-divided internal portions in both which discharge is carried out, a high-pressure portion on a gas introduction side and a low-pressure portion on a gas discharge side, and supplying excitation species derived from discharge plasma generated in the low-pressure portion onto a surface of said substrate, said discharge tube including a partition plate dividing said discharge tube such that an internal portion on one side of said partition plate has a pressure higher than that in an internal portion on another side of said partition plate.
Claim 3
Dependent Claim
18 words
An apparatus according to claim 1, wherein the gas introduced into said discharge tube is a nitrogen gas.
Claim 4
Dependent Claim
19 words
An apparatus according to claim 1, wherein the gas introduced into said discharge tube is a nitrogen-containing compound gas.
Claim 5
Dependent Claim
34 words
An apparatus according to claim 1, wherein the gas introduced into said discharge tube is a mixture gas of one of nitrogen and nitrogen compound, and a non-nitrogen compound constituting a growing thin film.
Claim 6
Dependent Claim
23 words
An apparatus according to claim 1, wherein a pressure in the low pressure portion of said discharge tube is set to 0.07-1 mbar.
Claim 7
Dependent Claim
39 words
An apparatus according to claim 1, wherein said discharge tube has a middle pressure portion between the high and low pressure portions, and the pressure in the low pressure portion of said discharge tube is set to 0.07-1 mbar.
Claim 8
Dependent Claim
31 words
An apparatus according to claim 1, wherein an inner wall of said discharge tube is made of the same material as that contained in the compound thin film to be grown.
Claim 9
Dependent Claim
19 words
An apparatus according to claim 1, further comprising means for irradiating UV light on a surface of said substrate.
Claim 10
Independent Claim
116 words
An apparatus for forming a II-VI Group compound thin film containing nitrogen as an impurity, on a substrate, comprising: a container for holding the substrate; means for supplying II group material vapor and VI group material vapor alternately to a surface of the substrate held in the container; and a discharge tube into which a gas containing at least nitrogen is introduced, having at least two-divided internal portions, a high-pressure portion on a gas introduction side and a low-pressure portion on a gas discharge side, and means for supplying excitation species derived from discharge plasma generated in the low-pressure portion onto a surface of said substrate in synchronous with supply of said II group material vapor.
Claim 11
Independent Claim
116 words
An apparatus for forming a II-VI Group compound thin film containing nitrogen as an impurity, on a substrate, comprising: a container for holding the substrate; means for supplying II group material vapor and VI group material vapor alternately to a surface of the substrate held in the container; and a discharge tube into which a gas containing at least nitrogen is introduced, having at least two-divided internal portions, a high-pressure portion on a gas introduction side and a low-pressure portion on a gas discharge side, and means for supplying excitation species derived from discharge plasma generated in the low-pressure portion onto a surface of said substrate in synchronous with supply of said II group material vapor.
Claim 12
Dependent Claim
18 words
An apparatus according to claim 9, wherein the gas introduced into said discharge tube is a nitrogen gas.
Claim 13
Dependent Claim
19 words
An apparatus according to claim 9, wherein the gas introduced into said discharge tube is a nitrogen-containing compound gas.
Claim 14
Dependent Claim
34 words
An apparatus according to claim 9, wherein the gas introduced into said discharge tube is a mixture gas of one of nitrogen and nitrogen compound, and a non-nitrogen compound constituting a growing thin film.
Claim 15
Dependent Claim
23 words
An apparatus according to claim 9, wherein a pressure in the low pressure portion of said discharge tube is set to 0.07-1 mbar.
Claim 16
Dependent Claim
39 words
An apparatus according to claim 9, wherein said discharge tube has a middle pressure portion between the high and low pressure portions, and the pressure in the low pressure portion of said discharge tube is set to 0.07-1 mbar.
Claim 17
Dependent Claim
31 words
An apparatus according to claim 9, wherein an inner wall of said discharge tube is made of the same material as that contained in the compound thin film to be grown.
Claim 18
Dependent Claim
19 words
An apparatus according to claim 9, further comprising means for irradiating UV light on a surface of said substrate.
Claim 19
Independent Claim
120 words
An apparatus for forming a nitrogen-containing compound thin film on a substrate, comprising: a container for holding the substrate; a plurality of vapor sources in said container; means for supplying material vapor onto a surface of the substrate held in the container; and a discharge tube into which a gas containing at least nitrogen is introduced, having at least two-divided internal portions, a high-pressure portion on a gas introduction side and a low-pressure portion on a gas discharge side, and supplying excitation species derived from discharge plasma generated in the low-pressure portion onto a surface of said substrate, wherein said means for supplying material vapor comprise means for supplying a II Group material vapor and a VI Group material vapor.
Claim 20
Independent Claim
120 words
An apparatus for forming a nitrogen-containing compound thin film on a substrate, comprising: a container for holding the substrate; a plurality of vapor sources in said container; means for supplying material vapor onto a surface of the substrate held in the container; and a discharge tube into which a gas containing at least nitrogen is introduced, having at least two-divided internal portions, a high-pressure portion on a gas introduction side and a low-pressure portion on a gas discharge side, and supplying excitation species derived from discharge plasma generated in the low-pressure portion onto a surface of said substrate, wherein said means for supplying material vapor comprise means for supplying a II Group material vapor and a VI Group material vapor.
Claim 21
Independent Claim
115 words
An apparatus for forming a nitrogen-containing compound thin film on a substrate, comprising: a container for holding the substrate; means for supplying material vapor onto a surface of the substrate held in the container; and a discharge tube into which a gas containing at least nitrogen is introduced, having at least two-divided internal portions, a high-pressure portion on a gas introduction side and a low-pressure portion on a gas discharge side, and supplying excitation species derived from discharge plasma generated in the low-pressure portion onto a surface of said substrate, wherein an inner wall of said discharge tube is made of the same material as that contained in the compound thin film to be grown.
Claim 22
Independent Claim
115 words
An apparatus for forming a nitrogen-containing compound thin film on a substrate, comprising: a container for holding the substrate; means for supplying material vapor onto a surface of the substrate held in the container; and a discharge tube into which a gas containing at least nitrogen is introduced, having at least two-divided internal portions, a high-pressure portion on a gas introduction side and a low-pressure portion on a gas discharge side, and supplying excitation species derived from discharge plasma generated in the low-pressure portion onto a surface of said substrate, wherein an inner wall of said discharge tube is made of the same material as that contained in the compound thin film to be grown.
Claim 23
Independent Claim
109 words
An apparatus for forming a nitrogen-containing compound thin film on a substrate, comprising: a container for holding the substrate; means for supplying material vapor onto a surface of the substrate held in the container; a discharge tube into which a gas containing at least nitrogen is introduced, having at least two-divided internal portions, in both of which discharge is carried out a high-pressure portion on a gas introduction side and a low-pressure portion on a gas discharge side, and supplying excitation species derived from discharge plasma generated in the low-pressure portion onto a surface of said substrate; and means for irradiating UV light on a surface of said substrate.
Claim 24
Independent Claim
109 words
An apparatus for forming a nitrogen-containing compound thin film on a substrate, comprising: a container for holding the substrate; means for supplying material vapor onto a surface of the substrate held in the container; a discharge tube into which a gas containing at least nitrogen is introduced, having at least two-divided internal portions, in both of which discharge is carried out a high-pressure portion on a gas introduction side and a low-pressure portion on a gas discharge side, and supplying excitation species derived from discharge plasma generated in the low-pressure portion onto a surface of said substrate; and means for irradiating UV light on a surface of said substrate.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1998-06-19 | 1998-12-19 | 1999-06-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-06-19 | 2002-12-19 | 2003-06-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-06-19 | 2006-12-19 | 2007-06-20 | $7700.00 | Window Closed / Lapsed |