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US5424652A
Expired / Lapsed
US
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Method and apparatus for testing an unpackaged semiconductor die
Assignee: Micron Technology Inc
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Filing: 1992-06-10
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Granted: 1995-06-13
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Expires: 2012-06-10
Abstract
Abstract A method and apparatus for testing a singularized semiconductor die prior to packaging the die, thereby allowing for the packaging or other use of only known good die. The apparatus employs a housing of ceramic or other workable material. Contact pads on the interior of the package are coupled to exterior leads with conductive traces. The back side of a semiconductor die to be tested is removably mounted to a lid, and the bond pads on the die are aligned with the contact pads on the interior of the package. The lid is attached to the package thereby electrically coupling the contact pads with the bond pads on the die. Since the package has conventional exterior form and function the package is operational as a functioning device.
Inventors
- 👤 David R. Hembree
- 👤 Warren M. Farnworth
- 👤 Alan G. Wood
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 22:29
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/2851; G01R31/2886; G01R1/00; G01R1/02; G01R1/04; G01R1/0408; G01R1/0433; G01R1/0483; H; H10; H10W; H10W90/00; H10W90/701; H10W90/751; H10W90/754
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
112 words
An apparatus for testing a semiconductor die, comprising: a) a lid having a hole therein and a major surface; b) a housing having an exterior and conductive traces, said traces forming an electrical pathway to said exterior; c) a semiconductor die having a circuit side, a back side, and a plurality of bond pads, said die being attached to said lied with a vacuum force through said hole; d) an interconnect having a plurality of conductive traces thereon, said interconnect being attached to said housing, wherein said traces on said interconnect electrically couple said bond pads with said traces of said housing, and said die is removed from said lid after testing.
Claim 2
Independent Claim
112 words
An apparatus for testing a semiconductor die, comprising: a) a lid having a hole therein and a major surface; b) a housing having an exterior and conductive traces, said traces forming an electrical pathway to said exterior; c) a semiconductor die having a circuit side, a back side, and a plurality of bond pads, said die being attached to said lied with a vacuum force through said hole; d) an interconnect having a plurality of conductive traces thereon, said interconnect being attached to said housing, wherein said traces on said interconnect electrically couple said bond pads with said traces of said housing, and said die is removed from said lid after testing.
Claim 3
Dependent Claim
23 words
The apparatus of claim 1 wherein said traces on said interconnect are electrically coupled to said traces within said housing with bond wires.
Claim 4
Dependent Claim
39 words
The apparatus of claim 1 wherein said traces on said interconnect are electrically coupled to said traces within said housing with a polymer, said polymer being interposed between said traces on said interconnect and said traces within said housing.
Claim 5
Dependent Claim
29 words
The apparatus of claim 1 wherein said traces on said interconnect are electrically coupled to said bond pads with conductive bumps interposed between said bond pads and said traces.
Claim 6
Dependent Claim
21 words
The apparatus of claim 4 wherein said bumps comprise a material selected from the group consisting of gold, palladium, and platinum.
Claim 7
Dependent Claim
128 words
A semiconductor die having a plurality of bond pads, the die tested by a test apparatus, the test apparatus comprising: a) a lid having a hole therein and a major surface; b) a housing having an exterior and conductive traces, said traces forming an electrical pathway to said exterior; c) a semiconductor die having a circuit side and a back side and a plurality of bond pads, said die being attached to said lid with a vacuum force through said hole; d) an interconnect having a plurality of conductive traces thereon, said interconnect being attached to said housing, wherein said plurality of said traces on said interconnect electrically couple the bond pads with said traces of said housing, and the die is removed from said lid after testing.
Claim 8
Dependent Claim
128 words
A semiconductor die having a plurality of bond pads, the die tested by a test apparatus, the test apparatus comprising: a) a lid having a hole therein and a major surface; b) a housing having an exterior and conductive traces, said traces forming an electrical pathway to said exterior; c) a semiconductor die having a circuit side and a back side and a plurality of bond pads, said die being attached to said lid with a vacuum force through said hole; d) an interconnect having a plurality of conductive traces thereon, said interconnect being attached to said housing, wherein said plurality of said traces on said interconnect electrically couple the bond pads with said traces of said housing, and the die is removed from said lid after testing.
Claim 9
Independent Claim
129 words
A method for testing a semiconductor die, comprising the steps of: a) forming a lid having a hole therein and a major surface; b) forming a housing having an exterior and conductive traces, said traces forming an electrical pathway to said exterior; c) forming a semiconductor die having a plurality of bond pads; d) removably attaching said die to said lid with a vacuum force through said hole; e) forming an interconnect having a plurality of conductive traces thereon; f) attaching said interconnect to said housing such that said traces on said interconnect electrically couple said bond pads with said traces of said housing; g) electrically analyzing the die for adherence to predetermined specifications; h) separating said lid from said housing; and i) removing said die from said lid.
Claim 10
Independent Claim
129 words
A method for testing a semiconductor die, comprising the steps of: a) forming a lid having a hole therein and a major surface; b) forming a housing having an exterior and conductive traces, said traces forming an electrical pathway to said exterior; c) forming a semiconductor die having a plurality of bond pads; d) removably attaching said die to said lid with a vacuum force through said hole; e) forming an interconnect having a plurality of conductive traces thereon; f) attaching said interconnect to said housing such that said traces on said interconnect electrically couple said bond pads with said traces of said housing; g) electrically analyzing the die for adherence to predetermined specifications; h) separating said lid from said housing; and i) removing said die from said lid.
Claim 11
Dependent Claim
24 words
The method of claim 7 wherein said traces on said interconnect are coupled with said traces within said housing during a wire bonding step.
Claim 12
Dependent Claim
34 words
The method of claim 7 further comprising the step of interposing a polymer between said traces within said housing and said traces on said interconnect thereby coupling said interconnect traces and said housing traces.
Claim 13
Dependent Claim
34 words
The method of claim 7 further comprising the step of forming conductive bumps and interposing said conductive bumps between said bond pads and said traces, thereby electrically coupling said bond pads and said traces.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-06-12 | 1998-12-12 | 1999-06-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-06-12 | 2002-12-12 | 2003-06-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-06-12 | 2006-12-12 | 2007-06-13 | $7700.00 | Window Closed / Lapsed |