Patent US5422901A successfully refreshed from Google Patents.
US5422901A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor device with high heat conductivity
Assignee: II VI Delaware Inc
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Filing: 1993-11-15
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Granted: 1995-06-06
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Expires: 2013-11-15
Abstract
Abstract A VCSEL having a first mirror stack positioned on the surface of a substrate, an active region positioned on the first mirror stack and substantially coextensive therewith, and a second mirror stack positioned on the active region, the second mirror stack forming a ridge or mesa having a side surface. A metal contact layer is positioned on the side surface of the ridge or mesa and on portions of an end of the ridge or mesa to define a light emitting area, and a layer of diamond-like material is electrolytically plated on the metal contact layer so as to form a heat conductor to remove heat from the laser.
Inventors
- 👤 Michael S. Lebby
- 👤 Chan-Long Shieh
- 👤 Ken Davis
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 22:23
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/45; H10W20/48; H01; H01S; H01S5/00; H01S5/10; H01S5/18; H01S5/183; H10W40/00; H10W40/20; H10W40/25; H10W40/254; H01S2301/00; H01S2301/17; H01S2301/176; H01S5/02; H01S5/024; H01S5/02476; H01S5/02484; H01S5/028; H01S5/0282; H01S5/04; H01S5/042; H01S5/0421; H01S5/0422; Y; Y10; Y10S; Y10S148/00; Y10S148/095
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
141 words
A vertical cavity surface emitting laser with high heat conductivity comprising: a supporting substrate having a surface lying in a first plane; a first mirror stack positioned on the surface of the substrate; an active region including at least an active layer positioned parallel and in overlying abutting engagement with the first mirror stack and substantially coextensive therewith; a second mirror stack positioned parallel and in overlying abutting engagement with the active region, the second stack of mirrors forming a ridge or mesa having a side surface; a metal contact layer positioned on the side surface of the ridge or mesa and on portions of an end of the ridge or mesa to define a light emitting area; and a layer of diamond-like material substantially covering the metal contact layer and forming a heat conductor to remove heat from the laser.
Claim 2
Dependent Claim
141 words
A vertical cavity surface emitting laser with high heat conductivity comprising: a supporting substrate having a surface lying in a first plane; a first mirror stack positioned on the surface of the substrate; an active region including at least an active layer positioned parallel and in overlying abutting engagement with the first mirror stack and substantially coextensive therewith; a second mirror stack positioned parallel and in overlying abutting engagement with the active region, the second stack of mirrors forming a ridge or mesa having a side surface; a metal contact layer positioned on the side surface of the ridge or mesa and on portions of an end of the ridge or mesa to define a light emitting area; and a layer of diamond-like material substantially covering the metal contact layer and forming a heat conductor to remove heat from the laser.
Claim 3
Dependent Claim
44 words
A vertical cavity surface emitting laser with high heat conductivity as claimed in claim 1 wherein the layer of diamond-like material also covers the light emitting area on the end of the ridge or mesa and is transparent to light emissions of the laser.
Claim 4
Dependent Claim
31 words
A vertical cavity surface emitting laser with high heat conductivity as claimed in claim 1 including additional alternating layers of metal and diamond-like material deposited on the layer of diamond-like material.
Claim 5
Dependent Claim
38 words
A vertical cavity surface emitting laser with high heat conductivity as claimed in claim 1 wherein the layer of diamond-like material is planarized and thick enough to cover the end and side surfaces of the ridge or mesa.
Claim 6
Dependent Claim
50 words
A vertical cavity surface emitting laser with high heat conductivity as claimed in claim 4 including in addition first and second electrical contacts positioned on a surface of the planarized diamond-like layer and extending through the planarized diamond-like layer into electrical contact with the first and second mirror stacks, respectively.
References Cited (Backward Citations)
US5299214A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-06-05 | 1998-12-05 | 1999-06-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-06-05 | 2002-12-05 | 2003-06-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-06-05 | 2006-12-05 | 2007-06-06 | $7700.00 | Window Closed / Lapsed |