US5418599A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Exposure method
Assignee: Renesas Electronics Corp
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Filing: 1994-09-30
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Granted: 1995-05-23
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Expires: 2014-09-30
Abstract
Abstract An exposure apparatus includes a first reflective type photomask 18a, a first mask stage 100a for mounting the first reflected type photomask 18a, a second reflective type photomask 18b, and a second mask stage 180b for mounting the second reflective type photomask 18b. Light 11a from a light source 11 is directed to the first and second reflective type photomasks 18a and 18b. The first exposure light 110c and the second exposure light 110b reflected by the first and second reflective type photomasks 18a and 18b are merged by a half mirror 30 to form a third exposure light 110e to expose a resist film 21a on a semiconductor substrate 21.
Inventors
- 👤 Kazuya Kamon
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 18:13
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70058; G03F7/20; G03F7/2002; G03F7/70216; G03F7/70241; G03F7/70275; G03F7/70283
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
95 words
An exposure method comprising the steps of: emitting light for exposure from a light source, dividing said light using a half mirror for forming a reflected light and a transmitted light, directing said reflected light and said transmitted light to first and second reflective type photomasks having a predetermined pattern for forming a first exposure light and a second exposure light by respective reflected light, and directing said first exposure light and said second exposure light to said half mirror again to merge said first and second exposure light to form a third exposure light.
Claim 2
Dependent Claim
95 words
An exposure method comprising the steps of: emitting light for exposure from a light source, dividing said light using a half mirror for forming a reflected light and a transmitted light, directing said reflected light and said transmitted light to first and second reflective type photomasks having a predetermined pattern for forming a first exposure light and a second exposure light by respective reflected light, and directing said first exposure light and said second exposure light to said half mirror again to merge said first and second exposure light to form a third exposure light.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-05-22 | 1998-11-21 | 1999-05-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-05-22 | 2002-11-21 | 2003-05-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-05-22 | 2006-11-21 | 2007-05-23 | $7700.00 | Window Closed / Lapsed |