Patent US5415027A successfully refreshed from Google Patents.
US5415027A
Expired / Lapsed
US
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Jumping probe microscope
Assignee: Bruker Nano Inc
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Filing: 1993-11-05
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Granted: 1995-05-16
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Expires: 2013-11-05
Abstract
Abstract A microscope of the scanning probe variety. This device circumvents one of the serious problems of prior art scanning probe microscopes, i.e. that the probe is always near or on the surface of the object being scanned, creating the danger of damaging the probe on the surface especially on large scans or at high scan speeds. The microscope of this invention jumps the probe over the surface, causing the probe to be near or on the surface during only a very limited portion of the scan and therefore able to scan quickly over rough surfaces without undue damage to the probe or surface. Both scanning tunneling microscopes and atomic force microscopes employing the invention are disclosed. The scanning tunneling microscope is shown with both digital and analog control of the movement of the probe.
Inventors
- 👤 Virgil B. Elings
- 👤 John A. Gurley
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 19:45
CPC Classifications
G; G01; G01Q; G01Q20/00; G01Q20/04; B; B82; B82Y; B82Y35/00; G01Q20/02; G01Q60/00; G01Q60/10; G01Q60/16; G01Q60/24; G01Q60/32; G01Q60/34; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/85; Y10S977/851; Y10S977/86; Y10S977/861; Y10S977/862; Y10S977/863; Y10S977/868; Y10S977/869; Y10S977/873; Y10S977/875
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
170 words
In a method of operating an atomic force microscope wherein a relative scanning motion is produced between a probe and a surface of a sample to obtain data indicative of a physical property of the sample, the improvement comprising the steps of: producing a continuous relative lateral scanning motion between the probe and the surface of the sample; repeatedly moving one of the probe and the sample into contact with the other of the probe and the sample while producing said continuous relative scanning motion to repeatedly produce a repulsive force between the probe and the sample during said relative scanning motion; and upon each occurrence of production of repulsive force between the probe and the surface of the sample and during producing of said continuous relative lateral scanning motion, moving at least one of the probe and the sample to separate the probe and the sample by an essentially constant height for each repeated moving of said one of the probe and the sample into contact with each other.
Claim 2
Dependent Claim
170 words
In a method of operating an atomic force microscope wherein a relative scanning motion is produced between a probe and a surface of a sample to obtain data indicative of a physical property of the sample, the improvement comprising the steps of: producing a continuous relative lateral scanning motion between the probe and the surface of the sample; repeatedly moving one of the probe and the sample into contact with the other of the probe and the sample while producing said continuous relative scanning motion to repeatedly produce a repulsive force between the probe and the sample during said relative scanning motion; and upon each occurrence of production of repulsive force between the probe and the surface of the sample and during producing of said continuous relative lateral scanning motion, moving at least one of the probe and the sample to separate the probe and the sample by an essentially constant height for each repeated moving of said one of the probe and the sample into contact with each other.
Claim 3
Dependent Claim
32 words
The method of claim 1, further comprising the step measuring topography of the surface of the sample based on repeated production of a predetermined repulsive force between the probe and the sample.
Claim 4
Dependent Claim
42 words
The method of claim 2, further comprising the step of: determining an envelope of sample motion at each occurrence of said predetermined repulsive force between the probe and the sample as a measure of the topography of the surface of the sample.
Claim 5
Dependent Claim
35 words
The method of claim 1, further comprising the step of: performing said step of moving at least one of the probe and the sample to separate the probe and the sample at a predetermined rate.
Claim 6
Dependent Claim
39 words
The method of claim 1, further comprising the step of: selecting the essentially constant height which the probe is separated from the surface of the sample after each production of said repulsive force by means of an operator control.
Claim 7
Dependent Claim
40 words
The method of claim 1, wherein the sample comprises a DNA sample, further comprising the step of: detecting a predetermined repulsive force between the probe and the surface of said DNA sample to determine a property of said DNA sample.
Claim 8
Dependent Claim
29 words
The method of claim 1, further comprising the step of: using a strain gauge or a piezoelectric gauge to detect the repulsive force between the probe and the sample.
Claim 9
Dependent Claim
109 words
In a method of operating an atomic force microscope having a probe to obtain data indicative of topography of a surface of a sample, the improvement comprising the steps of: producing a continuous relative lateral scanning motion between the probe and the surface of the sample; oscillating one of the probe and the sample so that the probe repeatedly directly contacts and then separates from the surface of the sample during producing said continuous relative lateral scanning motion; and detecting a change in said oscillation due to the probe touching the surface of the sample to obtain said data indicative of said topography of the surface of the sample.
Claim 10
Dependent Claim
109 words
In a method of operating an atomic force microscope having a probe to obtain data indicative of topography of a surface of a sample, the improvement comprising the steps of: producing a continuous relative lateral scanning motion between the probe and the surface of the sample; oscillating one of the probe and the sample so that the probe repeatedly directly contacts and then separates from the surface of the sample during producing said continuous relative lateral scanning motion; and detecting a change in said oscillation due to the probe touching the surface of the sample to obtain said data indicative of said topography of the surface of the sample.
Claim 11
Dependent Claim
35 words
The method of claim 8, wherein changes in topography of the surface of the sample produce an envelope of said oscillations, and said detecting step comprises the step of: determining said envelope of said oscillations.
Claim 12
Dependent Claim
20 words
The method of claim 9, wherein said detecting step comprises the step of: determining a bottom envelope of said oscillations.
Claim 13
Dependent Claim
31 words
The method of claim 8, wherein the sample is a DNA sample, further comprising the step of: using the detected change in said oscillation to determine topography of said DNA sample.
Claim 14
Dependent Claim
31 words
The method of claim 8, further comprising the step of: using a strain gauge or a piezoelectric gauge to detect the oscillation of the one of the probe and the sample.
Claim 15
Dependent Claim
43 words
The method of claim 8, wherein said oscillating step comprises the step of: oscillating the probe from a position contacting the surface of the sample to a height above the surface of the sample, which height is essentially constant form oscillation to oscillation.
Claim 16
Dependent Claim
47 words
The method of claim 8, wherein said oscillating step comprises the step of: oscillating the sample from a position at which the surface of the sample contacts the probe to a separation distance away from the probe, which separation distance is essentially constant from oscillation to oscillation.
Claim 17
Dependent Claim
73 words
In a method of operating an atomic force microscope wherein a probe mounted on a flexible arm is used to obtain data reflecting a physical property of a surface of a sample, the improvement comprising the steps of: producing a relative lateral scanning motion between the probe and the surface of the sample; and detecting bending of the arm with a strain gauge or piezoelectric gauge while producing said relative lateral scanning motion.
Claim 18
Dependent Claim
73 words
In a method of operating an atomic force microscope wherein a probe mounted on a flexible arm is used to obtain data reflecting a physical property of a surface of a sample, the improvement comprising the steps of: producing a relative lateral scanning motion between the probe and the surface of the sample; and detecting bending of the arm with a strain gauge or piezoelectric gauge while producing said relative lateral scanning motion.
Claim 19
Dependent Claim
42 words
The method of claim 15, further comprising the steps of: using a signal produced by the strain gauge or piezoelectric gauge in a feedback loop which maintains a constant interaction force between the probe and the sample during said lateral scanning motion.
Claim 20
Dependent Claim
28 words
The method of claim 15, further comprising the step of: scanning the probe laterally over the surface of a stationary sample to produce said relative lateral scanning motion.
Claim 21
Dependent Claim
46 words
The method of claim 15, further comprising the step of: during producing of said lateral scanning motion, oscillating one of the probe and the sample in a direction perpendicular to said lateral scanning motion such that the probe touches the surface of the sample each oscillation.
Claim 22
Dependent Claim
28 words
The method of claim 18, further comprising the step of: scanning one of the probe and the sample continuously laterally to produce a continuous relative lateral scanning motion.
Claim 23
Dependent Claim
28 words
The method of claim 15, further comprising the step of: scanning one of the probe and the sample continuously laterally to produce a continuous relative lateral scanning motion.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-05-15 | 1998-11-14 | 1999-05-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-05-15 | 2002-11-14 | 2003-05-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-05-15 | 2006-11-14 | 2007-05-16 | $7700.00 | Window Closed / Lapsed |