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US5412129A
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Stabilization of precursors for thin film deposition
Assignee: Agilent Technologies Inc
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Filing: 1994-06-17
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Granted: 1995-05-02
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Expires: 2014-06-17
Abstract
Abstract A precursor used in an MOCVD reactor for production of thin films of certain metal oxides is stabilized by introducing a ligand into the precursor during the precursor synthesis and thereby protecting the precursor from premature oxidation, nucleation, and decomposition.
Inventors
- 👤 Stephen A. DiCarolis
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 16:10
CPC Classifications
C; C07; C07F; C07F1/00; C07F1/005; C07F13/00; C07F13/005; C07F15/00; C07F15/04; C07F15/045; C07F15/06; C07F15/065; C07F3/00; C07F3/003; C23; C23C; C23C16/00; C23C16/06; C23C16/18
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
41 words
An adduct of the formula: M--E--T wherein M is a cation of an element selected from the group consisting of alkali metals, copper, nickel, cobalt, manganese, and zinc; E is a crown ether; and T is an anion of a diketone.
Claim 2
Dependent Claim
41 words
An adduct of the formula: M--E--T wherein M is a cation of an element selected from the group consisting of alkali metals, copper, nickel, cobalt, manganese, and zinc; E is a crown ether; and T is an anion of a diketone.
Claim 3
Dependent Claim
24 words
The adduct of claim 1, wherein T is selected from the group having the formula R(CO)R'(CO)R" wherein R, R', and R" are hydrocarbon radicals.
Claim 4
Dependent Claim
13 words
The adduct of claim 2, wherein R and R" are the same radicals.
Claim 5
Dependent Claim
9 words
The adduct of claim 1, wherein T is 2,2,6,6-tetramethyl-3,5-heptanedionate.
Claim 6
Dependent Claim
16 words
The adduct of claim 1, wherein E is selected from the group 18-crown-6, 15-crown-5, and 12-crown-4.
Claim 7
Dependent Claim
9 words
The adduct of claim 1, wherein M is lithium.
Claim 8
Dependent Claim
9 words
The adduct of claim 1, wherein M is potassium.
Claim 9
Independent Claim
73 words
A method of manufacturing an adduct of the formula M--E--T wherein M is a cation of an element selected from the group consisting of alkali metals, copper, nickel, cobalt, manganese, and zinc; E is a crown ether; and T is an anion of a diketone, comprising the steps of: A. producing a mixture of metallic M with T and E in a solvent; B. refluxing the mixture; and C. stripping away the solvent.
Claim 10
Independent Claim
73 words
A method of manufacturing an adduct of the formula M--E--T wherein M is a cation of an element selected from the group consisting of alkali metals, copper, nickel, cobalt, manganese, and zinc; E is a crown ether; and T is an anion of a diketone, comprising the steps of: A. producing a mixture of metallic M with T and E in a solvent; B. refluxing the mixture; and C. stripping away the solvent.
Claim 11
Dependent Claim
15 words
The method of claim 8, wherein said refluxing step spans a period exceeding 18 hours.
Claim 12
Dependent Claim
17 words
The method of claim 9, wherein said refluxing step spans a period approximately 24 hours in duration.
References Cited (Backward Citations)
US3911176A
Cited
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