Patent US5405490A successfully refreshed from Google Patents.
US5405490A
Expired / Lapsed
US
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Flat display device and method for manufacturing the same
Assignee: Electronics and Telecommunications Research Institute
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Filing: 1993-11-09
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Granted: 1995-04-11
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Expires: 2013-11-09
Abstract
Abstract A flat display device has a plurality of pixels and a plurality of micro light valves which correspond to each of the pixels thereof, and has a plurality of selection lines and data lines disposed in a matrix the micro light valves each comprise a data electrode to be connected with each of the data lines through a via, a selection electrode to be connected with each of the selection lines, a common electrode formed between the selection and data electrodes, a frame, and a shifting element capable of being moved in the frame by driving signals to be applied to the data and selection electrodes, so as to pass or shut off a light beam. A first driving means is connected to the respective selection lines, for supplying a predetermined selection signal for said light valves; and a second driving means is connected to the respective data lines, for supplying a predetermined data signal for said light valve.
Inventors
- 👤 Gyeong-Lyong Park
- 👤 Sin-Chong Park
- 👤 Dong-Goo Kim
- 👤 Hyung-Jin Yoon
- 👤 Chul-Soon Park
- 👤 Min-Kyu Song
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 09:17
CPC Classifications
G; G02; G02F; G02F3/00; C; C03; C03C; C03C17/00; C03C17/34; C03C17/36; C03C17/3602; C03C17/3618; B; B82; B82Y; B82Y15/00; C03C17/3639; C03C17/3642; C03C17/3652; C03C17/3668; C03C17/3671; G02B; G02B26/00; G02B26/02; C03C2217/00; C03C2217/90; C03C2217/94; C03C2217/948
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
154 words
A flat display device having a plurality of micro light valves which correspond to respective pixels for display, said device comprising: a plurality of selection lines and data lines disposed in a matrix; said micro light valves each comprising a data electrode to be connected with a corresponding on of the data lines through a via, a selection electrode to be connected with a corresponding on of the selection lines, a common electrode formed between the selection and data electrodes, a frame, and a shifting element capable of being moved in the frame by driving signals to be applied to the data and selection electrodes, so as to pass or shut off a light beam; a first driving means connected to the respective selection lines, for supplying a selection signal for said light valves; and a second driving means connected to the respective data lines, for supplying a data signal for said light valve.
Claim 2
Dependent Claim
154 words
A flat display device having a plurality of micro light valves which correspond to respective pixels for display, said device comprising: a plurality of selection lines and data lines disposed in a matrix; said micro light valves each comprising a data electrode to be connected with a corresponding on of the data lines through a via, a selection electrode to be connected with a corresponding on of the selection lines, a common electrode formed between the selection and data electrodes, a frame, and a shifting element capable of being moved in the frame by driving signals to be applied to the data and selection electrodes, so as to pass or shut off a light beam; a first driving means connected to the respective selection lines, for supplying a selection signal for said light valves; and a second driving means connected to the respective data lines, for supplying a data signal for said light valve.
Claim 3
Independent Claim
172 words
A method for manufacturing a flat display device having a plurality of pixels and a plurality of micro light valves, one of said micro light valves corresponding to one of said pixels thereof, said method comprising the steps of: preparing a semiconductor substrate with a main surface; forming electrodes to be used as a data electrode, a selection electrode, and a common electrode on said substrate in parallel; depositing an insulating layer on said substrate formed thus; forming a first sacrificial layer on said insulating layer; forming a patterned shifting element layer on said first sacrificial layer; forming a second sacrificial layer on said substrate which is provided with said shifting element layer, and removing a portion of said sacrificial layers by etching to form a frame contact portion; forming a patterned frame layer on the frame contact portion and a portion of said second sacrificial layer; and removing said remaining sacrificial layers to form a frame and a shifting element capable of moving in said frame by electrostatic force applied externally.
Claim 4
Independent Claim
172 words
A method for manufacturing a flat display device having a plurality of pixels and a plurality of micro light valves, one of said micro light valves corresponding to one of said pixels thereof, said method comprising the steps of: preparing a semiconductor substrate with a main surface; forming electrodes to be used as a data electrode, a selection electrode, and a common electrode on said substrate in parallel; depositing an insulating layer on said substrate formed thus; forming a first sacrificial layer on said insulating layer; forming a patterned shifting element layer on said first sacrificial layer; forming a second sacrificial layer on said substrate which is provided with said shifting element layer, and removing a portion of said sacrificial layers by etching to form a frame contact portion; forming a patterned frame layer on the frame contact portion and a portion of said second sacrificial layer; and removing said remaining sacrificial layers to form a frame and a shifting element capable of moving in said frame by electrostatic force applied externally.
Claim 5
Dependent Claim
13 words
The method according to claim 2, wherein said substrate is made of glass.
Claim 6
Dependent Claim
42 words
The method according to claim 2, wherein the step for forming said electrodes comprises the steps of forming said transparent layer on said substrate; and forming a patterned chromium layer on said substrate to form the selection and common electrodes in parallel.
Claim 7
Independent Claim
26 words
The method according to 4, wherein said transparent is made of an ITO film, and each of said selection and common electrodes is made of chromium.
Claim 8
Independent Claim
26 words
The method according to 4, wherein said transparent is made of an ITO film, and each of said selection and common electrodes is made of chromium.
Claim 9
Dependent Claim
22 words
The method according to claim 2, wherein the step for forming said insulating layer is performed by depositing of nitride silicon twice.
Claim 10
Dependent Claim
16 words
The method according to claim 2, wherein each of said sacrificial layers is made of aluminum.
Claim 11
Dependent Claim
24 words
The method according to claim 2, wherein said shifting element layer is formed of a laminated nitride silicon layer and an amorphous silicon layer.
Claim 12
Dependent Claim
23 words
The method according to claim 2, wherein said frame layer is formed of a laminated nitride silicon layer and an amorphous silicon layer.
Claim 13
Independent Claim
207 words
A method for manufacturing a flat display device having a plurality of pixels and a plurality of micro light valves, one of said micro light valves corresponding to one of said pixels thereof, said method comprising the steps of: preparing a semiconductor substrate with a main surface; forming electrodes to be used as a data electrode, a selection electrode, and a common electrode on said substrate in parallel; depositing an first insulating layer on said substrate formed thus, and forming a via hole only on said transparent layer; forming a chromium layer on said insulating layer and said via hole, and depositing a second insulating layer on said chromium layer; forming a first sacrificial layer on said second insulating layer; forming a patterned shifting element layer on said first sacrificial layer; forming a second sacrificial layer on said substrate which is provided with said shifting element layer, and removing a portion of said laminated sacrificial layers by etching to form a frame contact portion; forming a patterned frame layer on the frame contact portion and a portion of said second sacrificial layer; and removing said remaining sacrificial layers to form a frame and a shifting element capable of moving in said frame by electrostatic force applied externally.
Claim 14
Independent Claim
207 words
A method for manufacturing a flat display device having a plurality of pixels and a plurality of micro light valves, one of said micro light valves corresponding to one of said pixels thereof, said method comprising the steps of: preparing a semiconductor substrate with a main surface; forming electrodes to be used as a data electrode, a selection electrode, and a common electrode on said substrate in parallel; depositing an first insulating layer on said substrate formed thus, and forming a via hole only on said transparent layer; forming a chromium layer on said insulating layer and said via hole, and depositing a second insulating layer on said chromium layer; forming a first sacrificial layer on said second insulating layer; forming a patterned shifting element layer on said first sacrificial layer; forming a second sacrificial layer on said substrate which is provided with said shifting element layer, and removing a portion of said laminated sacrificial layers by etching to form a frame contact portion; forming a patterned frame layer on the frame contact portion and a portion of said second sacrificial layer; and removing said remaining sacrificial layers to form a frame and a shifting element capable of moving in said frame by electrostatic force applied externally.
Claim 15
Dependent Claim
13 words
The method according to claim 10, wherein said substrate is made of glass.
Claim 16
Dependent Claim
42 words
The method according to claim 10, wherein the step for forming said electrodes comprises the steps of forming said transparent layer on said substrate; and forming a patterned chromium layer on said substrate to form the selection and common electrodes in parallel.
Claim 17
Independent Claim
26 words
The method according to 12, wherein said transparent is made of an ITO film, and each of said selection and common electrodes is made of chromium.
Claim 18
Independent Claim
26 words
The method according to 12, wherein said transparent is made of an ITO film, and each of said selection and common electrodes is made of chromium.
Claim 19
Dependent Claim
22 words
The method according to claim 10, wherein the step for forming said insulating layer is performed by depositing of nitride silicon twice.
Claim 20
Dependent Claim
16 words
The method according to claim 10, wherein each of said sacrificial layers is made of aluminum.
Claim 21
Dependent Claim
24 words
The method according to claim 10, wherein said shifting element layer is formed of a laminated nitride silicon layer and an amorphous silicon layer.
Claim 22
Dependent Claim
23 words
The method according to claim 10, wherein said frame layer is formed of a laminated nitride silicon layer and an amorphous silicon layer.
References Cited (Backward Citations)
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